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The Properties of Zr, Ti, Al and Si Nitride-Based Multilayer Coatings Obtained By Cathodic Arc Plasma Deposition

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Russian Physics Journal Aims and scope

The paper investigates the cathodic arc plasma deposition of multilayer ZrTiN and ZrTiAlSiN coatings with the maximum hardness of 28 and 29 GPa, respectively. When the rotation velocity is reduced from 3 to 1 rpm, the coating hardness grows by 30% for ZrTiN and 50% for ZrTiAlSiN coatings. The addition of Al and Si to the coating composition leads to a nanostructurization of the multilayer ZrTiAlSiN coatings and improves their heat resistance.

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Authors and Affiliations

  1. Institute of High Current Electronics of the Siberian Branch of the Russian Academy of Sciences, Tomsk, Russia

    V. M. Savostikov, Yu. A. Denisova, V. V. Denisov, А. A. Leonov, S. V. Ovchinnikov & M. V. Savchuk

Authors
  1. V. M. Savostikov
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  2. Yu. A. Denisova
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  3. V. V. Denisov
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  4. А. A. Leonov
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  5. S. V. Ovchinnikov
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  6. M. V. Savchuk
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Corresponding author

Correspondence to V. M. Savostikov.

Additional information

Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 12, pp. 43–48, December 2021.

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Savostikov, V.M., Denisova, Y.A., Denisov, V.V. et al. The Properties of Zr, Ti, Al and Si Nitride-Based Multilayer Coatings Obtained By Cathodic Arc Plasma Deposition. Russ Phys J 64, 2219–2224 (2022). https://doi.org/10.1007/s11182-022-02580-x

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  • DOI: https://doi.org/10.1007/s11182-022-02580-x

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