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Schottky Diodes on Heterostructures with Two-Dimensional Electron Gas

  • PHYSICS OF SEMICONDUCTORS AND DIELECTRICS
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Russian Physics Journal Aims and scope

The results of studies of the characteristics of contacts with Schottky barriers on a pseudomorphic AlGaAs/InGaAs heterostructure are presented. The Ti-based Schottky diodes were created by a standard pHEMT technology. It is shown that the parameters of the fabricated contacts with Schottky barriers are close to the characteristics of ideal contacts based on aluminum or molybdenum created in the process of molecular beam epitaxy. It is also shown that as compared to the diodes based on AlGaAs homostructures, the measured Schottky barrier height is smaller and the ideality factor is higher in diodes created on pseudomorphic heterostructures. Along with the well-known methods for determining the Schottky-barrier height, we tested a technique based on the measurement of the threshold voltage in diodes with a two-dimensional electron gas.

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References

  1. Yasuhiro Nakasha, Yoichi Kawano, Masaru Sato, et al., Fujitsu Sci. Tech. J., 43.4, 486–494 (2007).

    Google Scholar 

  2. Shinohara Keisuke and Matsui Toshiaki, J. National Institute of Inform. and Commun. Technol., 51, No. 1/2, 95–102 (2004).

    Google Scholar 

  3. Azlan Abdu I. Aziz and Mohamed Missous, Workshop EDMO, 297–302 (1997).

  4. Hsien-Chin Chiu, Chih-Wei Yang, Chao-Hung Chen, et al., Microelectron. Reliability, 50, 847–850 (2010).

    Article  Google Scholar 

  5. T. Ytterdal, M. S. Shur, M. Hurt, and W. C. B. Peatman, Appl. Phys. Lett., 70, No. 4, 441–442 (1997).

    Article  ADS  Google Scholar 

  6. M. Missou, W. S. Truscott, and K. E. Singer, J. Appl. Phys., 68, 2239 (1990).

    Article  ADS  Google Scholar 

  7. L. Dobaczewski, J. M. Langer, and M. Missous, Proc. XXII Int. School of Semiconducting Compounds, Jaszowiec, 84, No. 4, 741–744 (1993).

    Google Scholar 

  8. K. Okamoto, C. E. C. Wood, and L. F. Eastman, Appl. Phys. Lett., No. 38, 636 (1981).

  9. M. Eizenberg, M. Heiblum, M. I. Nathan, et al., J. Appl. Phys., 61, 1516 (1987).

    Article  ADS  Google Scholar 

  10. D. H. Zhang, Mater. Sci. Eng., B60, 189–193 (1999).

    Article  Google Scholar 

  11. Lee Jin-Hee, Yoon Hyung-Sup, et al., ETRI J., 18, No. 3, 171–179 (1996).

    Article  Google Scholar 

  12. V. G. Bozhkov, Metal–Semiconductor Contacts: Physics and Models [in Russian], Publishing House of Tomsk State University, Tomsk (2016).

    Google Scholar 

  13. L. Gunter, D. Dugas, X. Yang, et al., CS MANTECH Conference, Vancouver (2006).

  14. S. M. Sze, Physics of Semiconductor Devices, Second edition, Ch. 3, Wiley & Sons (1981).

  15. http://www.ioffe.ru/NSM Archive Aluminium Gallium Arsenide (AlGaAs)-Band Structure and Carrier Concentration.

  16. V. G. Bozhkov, Izv. Vyssh. Uchebn. Zaved. Radiofiz., 45, No. 5, 416–426 (2002).

    Google Scholar 

  17. Zhao Jun Lin, Wu Lu, Jaesun Lee, Dongmin Liu, et al., Appl. Phys. Lett., 82, No. 24, 4364–4365 (2003).

    Article  ADS  Google Scholar 

  18. K. Lee, M. S. Shur, T. J. Drummond, and H. Morkoc, IEEE Trans. Electron Dev., ED-30, No. 3, 207–212 (1983).

    ADS  Google Scholar 

  19. Wang Xin-Hua, Zhao Miao, Liu Xin-Yu, et al., Chin. Phys. B, 19, No. 9, 1–7 (2010).

    Article  Google Scholar 

  20. I. S. Vasil’evskii, A. N. Vinichenko, M. M. Grekhov, et al., Fiz. Tekh. Poluprovodn., 48, Vyp. 9, 1258–1264 (2014).

  21. R. F. Broom, et al., J. Appl. Phys., 60, No. 5, 1832 (1986).

    Article  ADS  Google Scholar 

  22. V. G. Bozhkov and A. V. Shmargunov, Proceed. 21-st International Crimean Conf. “Microwave Technology and Telecommunication Technologies”, Weber, Sevastopol, B. 1 (2011).

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Correspondence to A. Yu. Yushchenko.

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Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 12, pp. 14–20, December, 2018.

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Yushchenko, A.Y., Ayzenshtat, G.I. & Fedotova, F.I. Schottky Diodes on Heterostructures with Two-Dimensional Electron Gas. Russ Phys J 61, 2159–2166 (2019). https://doi.org/10.1007/s11182-019-01652-9

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  • DOI: https://doi.org/10.1007/s11182-019-01652-9

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