Skip to main content
SpringerLink
Log in

Thermodynamic Investigation of the Effect of Target Compositions and Conditions of Their Magnetron Sputtering on Phase Compositions of the Resulting Films

  • Published:
Russian Physics Journal Aims and scope

A thermodynamic investigation of plasmochemical processes taking place in a magnetron during sputtering of the targets consisting of indium and dysprosium ions is performed, which allowed identifying the feasibility of forming under the given conditions certain amounts of the chemical compounds In2O3, Dy2O3, DyInO3. In the thermodynamic analysis of the equilibrium compositions during magnetron sputtering of the films, a universal TERRA software program is used.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. G. V. Sinyarev, N. A. Vatolin, and L. E. Slynko, A Statistical Model of Turbulence, Computation of Thermal Processes, Heat Transfer and Friction (Ed. G. V. Sinyarev) [in Russian], Nauka, Moscow (1973).

  2. B. G. Trusov, in: Proc. 3-rd Int. Symp. Theor. Appl. Plasmochem., Plyos (2002).

  3. Inoue Kazuyoshi, Yano Koki, and Kasami Masashi, Sputtering Target, Semiconductor Film and Semiconductor Device, US P, 8333913 B2, Dec. 18 (2012).

  4. L. А. Artzimovich and R. Z. Sagdeev, Plasma Physics for Physicists [in Russian], Atomizdat, Moscow (1979).

    Google Scholar 

  5. P. M. Martin, Handbook of Deposition Technologies for Films and Coatings: Science, Applications and Technology, Elsevier, Oxford (2010).

    Google Scholar 

  6. F. I. Grigoriev, Deposition of Thin Films from Low-Temperature Plasma and Ion Beams in a Microelectronic Process. A course book [in Russian], Moscow State Inst. Electr. Matem., Moscow (2006).

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. V. D. Kuznetsov Siberian Physical-Technical Institute at Tomsk State University, Tomsk, Russia

    T. D. Malinovskaya, V. I. Sachkov, S. A. Sosnovskii & V. V. Zhek

Authors
  1. T. D. Malinovskaya
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. V. I. Sachkov
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. S. A. Sosnovskii
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. V. V. Zhek
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to T. D. Malinovskaya.

Additional information

Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 7, pp. 52–57, July, 2018.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Malinovskaya, T.D., Sachkov, V.I., Sosnovskii, S.A. et al. Thermodynamic Investigation of the Effect of Target Compositions and Conditions of Their Magnetron Sputtering on Phase Compositions of the Resulting Films. Russ Phys J 61, 1241–1246 (2018). https://doi.org/10.1007/s11182-018-1524-1

Download citation

  • Received:

  • Revised:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11182-018-1524-1

Keywords

Search

Navigation