Skip to main content
SpringerLink
Log in

Properties of Molybdenum Films Produced by High-Power Impulse Magnetron Sputtering

  • Published:
Russian Physics Journal Aims and scope

Results of experiments on deposition of thin molybdenum films on glass substrates by high-power impulse magnetron sputtering are presented. Two high-current modes with different pulse frequencies and durations are used. Properties of the produced molybdenum films are compared with those of films produced by magnetron sputtering at a direct current. It is shown that this method allows the resistivity of molybdenum films to be decreased and their reflectance in the visible range to be increased.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. J. H. Scofield, A. D. Duda, D. Albin, et al., Thin Solid Films, 260, 26–31 (1995).

    Article  ADS  Google Scholar 

  2. P. Bommersbach, L. Arzel, M. Tomassini, et al., Prog. Photovolt: Res. Appl., 21, No. 3, 332–343 (2013).

    Article  Google Scholar 

  3. J. H. Yoon, T. Y. Seong, and J. H. Jeong, Prog. Photovolt: Res. Appl., 21, No. 1, 58–63 (2013).

    Article  Google Scholar 

  4. M. Powalla and B. Dimmler, Thin Solid Films, 361–362, 540–546 (2000).

    Article  Google Scholar 

  5. K. Orgassa, H. W. Schock, and J. H. Werner, Thin Solid Films, 431–432, 387–391 (2003).

    Article  Google Scholar 

  6. M. Samuelsson, D. Lundin, J. Jensen, et al., Surf. Coat. Technol., 205, 591–596 (2010).

    Article  Google Scholar 

  7. I. Repins, M. A. Contreras, B. Egaas, et al., Prog. Photovolt: Res. Appl., 16, 235–239 (2008).

    Article  Google Scholar 

  8. S. A. Vanalakar, G. L. Agawane, S. W. Shin, et al., J. Alloys Compd., 619, 109–121 (2015).

    Article  Google Scholar 

  9. H. Fray, Handbook of Thin Film Technology, Springer, Berlin (2015).

    Book  Google Scholar 

  10. J. N. Alexander, S. Higashiya, D. Caskey, Jr., et al., Sol. En. Mat. Sol. Cells, 125, 47–53 (2014).

    Article  Google Scholar 

  11. Z. H. Li, E. S. Cho, and S. J. Kwon, Appl. Surf. Sci., 257, 9682–9688 (2011).

    Article  ADS  Google Scholar 

  12. C. Roger, S. Noël, O. Sicardy, et al., Thin Solid Films, 548, 608–616 (2013).

    Article  ADS  Google Scholar 

  13. C. H. Huang, H. L. Cheng, W. E. Chang, et al., Semicond. Sci. Technol., 27, 115020 (2012).

    Article  Google Scholar 

  14. Z. C. Chang, H. H. Sung, C. Y. Chen, et al., Mater. Res. Innovat., 19, No. 8, 512–517 (2015).

    Google Scholar 

  15. X. Dai, A. Zhou, L. Feng, et al., Thin Solid Films, 567, 64–71 (2014).

    Article  ADS  Google Scholar 

  16. S. S. Wang, C. Y. Hsu, V. Shiou, et al., J. Electron. Mater., 42, No. 1, 71–78 (2013).

    Article  ADS  Google Scholar 

  17. Y. Pauleau, Vacuum, 61, 175–181 (2001).

    Article  ADS  Google Scholar 

  18. S. Zhang, H. Xie, X. Zeng, et al., Surf. Coat. Technol., 122, 219–224 (1999).

    Article  Google Scholar 

  19. P. Blosch, D. Gutter, A. Chirila, et al., Thin Solid Films, 519, 7453–7457 (2011).

    Article  ADS  Google Scholar 

  20. A. L. Patterson, Phys. Rev., 56, 978–982 (1939).

    Article  ADS  Google Scholar 

  21. P. M. P. Salome, J. Malaquias, P. A. Fernandes, et al., J. Phys. D, 43, 345501 (7 p) (2010).

  22. S. F. Chen, S. J. Wang, W. D. Lee, et al., Atlas J. Mater. Sci., 2, No. 1, 54–59 (2015).

    Article  Google Scholar 

  23. G. Zoppi, N. S. Beattie, J. D. Major, et al., J. Mater. Sci., 46, 4913–4921 (2011).

    Article  ADS  Google Scholar 

  24. D. Zhou, H. Zhu, X. Liang, et al., Appl. Surf. Sci., 362, 202–209 (2016).

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Institute of High-Current Electronics of the Siberian Branch of the Russian Academy of Sciences, Tomsk, Russia

    A. N. Zakharov, A. A. Solov’ev, K. V. Oskomov, V. O. Oskirko & V. A. Semenov

  2. National Research Tomsk Polytechnic University, Tomsk, Russia

    A. A. Solov’ev, M. S. Syrtanov & Yu. S. Bordulev

Authors
  1. A. N. Zakharov
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. A. A. Solov’ev
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. K. V. Oskomov
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. V. O. Oskirko
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. V. A. Semenov
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. M. S. Syrtanov
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. Yu. S. Bordulev
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to A. N. Zakharov.

Additional information

Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 8, pp. 65–69, August, 2017.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Zakharov, A.N., Solov’ev, A.A., Oskomov, K.V. et al. Properties of Molybdenum Films Produced by High-Power Impulse Magnetron Sputtering. Russ Phys J 60, 1336–1340 (2017). https://doi.org/10.1007/s11182-017-1218-0

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11182-017-1218-0

Keywords

Search

Navigation