Abstract
The results of the study of physical characteristics of molybdenum films deposited by magnetron sputtering on the perlite glass-ceramic substrates in an argon environment are presented. It is found that the films prepared at the substrate temperatures higher than 250°C have good adhesion and the bonding strength is more than 30 MPa. Under optimal deposition conditions, the obtained films have a high degree of texturing with the crystallite sizes about 100 nm and have the relatively low resistivity (5×10−4 Ω cm) at low deposition rate; they can be used as a bottom contact for thin film solar cells based on the copper multicomponent compounds with the chalcopyrite structure.
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Original Russian Text © L.A. Harutyunyan, S.G. Petrosyan, K.E. Avjyan, 2015, published in Izvestiya NAN Armenii, Fizika, 2015, Vol. 50, No. 2, pp. 236–241.
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Harutyunyan, L.A., Petrosyan, S.G. & Avjyan, K.E. Physical characteristics of molybdenum films deposited by magnetron sputtering on perlite glass-ceramic substrates. J. Contemp. Phys. 50, 177–181 (2015). https://doi.org/10.3103/S1068337215020115
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DOI: https://doi.org/10.3103/S1068337215020115