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Calculation of the Stoichiometric Composition of Nanostructures Synthesized by Molecular Layer Deposition on the Surface of Solid Matrices

  • Inorganic Synthesis and Industrial Inorganic Chemistry
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Abstract

Calculational formulas for determining from the results of chemical and thermogravimetric analyses the true relative contents of components in products formed in molecular layer deposition of nanostructures on the surface of solid matrices are suggested. The approaches considered are illustrated by the example of evaluation of the chemical composition of titanium oxide (nitrogen) and silicon-nitrogen nano-layers synthesized by molecular layer deposition on the silica surface.

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Authors and Affiliations

  1. St. Petersburg State Technological Institute, St. Petersburg, Russia

    E. A. Sosnov, A. A. Malkov & A. A. Malygin

Authors
  1. E. A. Sosnov
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  2. A. A. Malkov
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  3. A. A. Malygin
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Translated from Zhurnal Prikladnoi Khimii, Vol. 78, No. 3, 2005, pp. 373–379.

Original Russian Text Copyright © 2005 by Sosnov, Malkov, Malygin.

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Sosnov, E.A., Malkov, A.A. & Malygin, A.A. Calculation of the Stoichiometric Composition of Nanostructures Synthesized by Molecular Layer Deposition on the Surface of Solid Matrices. Russ J Appl Chem 78, 367–374 (2005). https://doi.org/10.1007/s11167-005-0298-8

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  • DOI: https://doi.org/10.1007/s11167-005-0298-8

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