Skip to main content
SpringerLink
Log in

Reactivity of Hydroxyl Groups on the Surface of Solid Oxides in Atomic Layer Deposition Processes

  • Published:
Inorganic Materials Aims and scope

Abstract—

This paper demonstrates the feasibility of using induction constants for quantitatively assessing the reactivity of hydroxyl groups on the surface of some solid oxides in the synthesis of nanostructures by molecular layering (atomic layer deposition). It is shown that a surface reaction can reach completion if hydroxyl groups have a larger induction constant than does the active group of the reagent. The proposed approach is substantiated and experimental data are presented for solid silicon, aluminum, magnesium, titanium, and beryllium oxides.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1.
Fig. 2.
Fig. 3.

Similar content being viewed by others

REFERENCES

  1. Malygin, A.A. and Smirnov, V.M., Early work on atomic layer deposition cited, Solid State Technol., 2002, vol. 45, pp. 14–17.

    Google Scholar 

  2. Puurunen, R., Surface chemistry of atomic layer deposition: a case study for the trimethylaluminum/water process, J. Appl. Phys., 2005, vol. 97, paper 121301.

  3. Pal’m, V.A., Osnovy kolichestvennoi teorii organicheskikh reaktsii (Principles of Quantitative Theory of Organic Reactions), Leningrad: Khimiya, 1977.

  4. Aleskovskii, V.B., On the nature of solid chemical compounds, Zh. Prikl. Khim. (Leningrad), 1982, vol. 55, no. 4, pp. 725–730.

    CAS  Google Scholar 

  5. Aleskovskii, V.B., Khimiya nadmolekulyarnykh soedinenii (The Chemistry of Supramolecular Compounds), St. Petersburg: SPbGU, 1996.

  6. Ezhovskii, Yu.K., Surface reactivity of single-crystal silicon in atomic layer deposition processes, Inorg. Mater., 2019, vol. 55, no. 2, pp. 101–105.

    Article  CAS  Google Scholar 

  7. Spravochnik khimika (Chemist’s Handbook), Leningrad: Khimiya, 1971, vol. 3.

  8. Ezhovskii, Yu.K. and Osipov, A.V., A thermodynamic model for the formation of surface functional groups, Poverkhnost, 1999, no. 3, pp. 39–43.

  9. Tsyganenko, A.A. and Filimonov, V.N., IR spectra of the hydroxyl shell of oxides with the wurtzite structure, Dokl. Akad. Nauk SSSR, 1972, vol. 203, pp. 636–639.

    CAS  Google Scholar 

  10. Tsyganenko, A.A., Khomenya, A.V., and Filimonov, V.N., Proton donor ability of OH groups on oxide surfaces studied by IR spectroscopy, Adsorbts. Adsorbenty, 1976, vol. 4, pp. 86–90.

    CAS  Google Scholar 

  11. Ezhovskii, Yu.K., Nanolayers of tantalum- and aluminum oxides and dielectric compositions based on them, J. Surf. Invest.: X-ray, Synchrotron Neutron Tech., 2021, no. 2, pp. 267–272.

Download references

Author information

Authors and Affiliations

  1. St. Petersburg State Technological Institute (Technical University), 190013, St. Petersburg, Russia

    Yu. K. Ezhovskii

Authors
  1. Yu. K. Ezhovskii
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Yu. K. Ezhovskii.

Additional information

Translated by O. Tsarev

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Ezhovskii, Y.K. Reactivity of Hydroxyl Groups on the Surface of Solid Oxides in Atomic Layer Deposition Processes. Inorg Mater 57, 913–918 (2021). https://doi.org/10.1134/S0020168521090065

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S0020168521090065

Keywords:

Search

Navigation