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Theoretical Investigation of DBD Discharge Development for VUV Emission in Excimer Lamp

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Abstract

The present work is devoted to the study of DBD discharge development in Ne–Xe gas mixture for optimization of UV source efficiency in excimer lamps. This study was based on a longitudinal on-dimensional model of the dielectric barrier discharge DBD with the aim to investigate the discharge conditions for excimer lamps working and VUV emissions optimization. The results of the present description show the concentration of charged particles, photonic species, and excited atoms and molecules. The effect of operation conditions such as applied voltage, gas mixture composition, and gas pressure, as well as the secondary electron emission due to ion impact at the cathode on DBD discharge characteristics and 173 nm photon generation have been also analyzed and discussed.

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Authors and Affiliations

  1. Laboratoire de Physique des Plasmas, Matériaux Conducteurs et leurs Applications (LPPMCA), Université d’Oran des Sciences et de la Technologie, USTO-MB, Oran, Algérie

    Amar Benmoussa, Abdelali Bouchachia, Fatiha Ghaleb, Ahmed Belasri, Zoheir Harrache & Soumia Bendella

  2. Ecole Supérieure en Génie Electrique Et Energétique (ESG2E), Oran, Algérie

    Amar Benmoussa

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  1. Amar Benmoussa
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  2. Abdelali Bouchachia
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  4. Ahmed Belasri
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Benmoussa, A., Bouchachia, A., Ghaleb, F. et al. Theoretical Investigation of DBD Discharge Development for VUV Emission in Excimer Lamp. Plasma Chem Plasma Process 43, 657–677 (2023). https://doi.org/10.1007/s11090-023-10316-z

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