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Effects of Pressure and Electrode Length on the Abatement of N2O and CF4 in a Low-Pressure Plasma Reactor

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Abstract

The emission of greenhouse gases, such as N2O and fluorinated gases, has been increasingly regulated in the semiconductor industry. Pressure effects on the abatement of N2O and CF4 were investigated in a low-pressure plasma reactor by using Fourier transform infrared (FTIR) spectroscopy. The destruction and removal efficiency (DRE) of N2O and CF4 was significantly lowered below 0.2 Torr. When the pressure was increased, the DRE of CF4 with H2O as the reactant gas increased continuously, but that with O2 or without any reactant gas first increased and then decreased. A larger electrode length yielded a higher DRE of N2O and CF4, especially at lower pressures. To understand this phenomenon, the electrical waveforms for the discharge in N2O were analyzed in conjunction with its optical emission profiles, and the rotational temperatures for different electrode lengths were compared using the N2 + ion band (λ = 391.4 nm). They provided insights into the mechanism involved in terms of plasma property and gas residence time.

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Acknowledgments

This work is supported by the World Class 300 Project funded by Korea Small and Medium Business Administration and by the Development program of Manufacturing Technology for Flexible Electronics with High Performance funded by Korea Institute of Machinery and Materials (KIMM). The World Class 300 project has been performed in cooperation with Lotvacuum Co., Ltd.

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Authors and Affiliations

  1. Plasma Engineering Laboratory, Korea Institute of Machinery & Materials, 156 Gajeongbuk-Ro, Yuseong-Gu, Daejeon, 34103, Republic of Korea

    M. Hur, J. O. Lee, J. Y. Lee, W. S. Kang & Y.-H. Song

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  1. M. Hur
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  2. J. O. Lee
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  3. J. Y. Lee
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  4. W. S. Kang
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  5. Y.-H. Song
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Correspondence to M. Hur.

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Hur, M., Lee, J.O., Lee, J.Y. et al. Effects of Pressure and Electrode Length on the Abatement of N2O and CF4 in a Low-Pressure Plasma Reactor. Plasma Chem Plasma Process 36, 1589–1601 (2016). https://doi.org/10.1007/s11090-016-9744-z

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  • DOI: https://doi.org/10.1007/s11090-016-9744-z

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