Abstract
In this work thin BCN films were deposited by plasma enhanced chemical vapor deposition (PECVD) using chloridic precursors. Through adjusting the BCl3 content in the inlet gas mixture the chemical composition of the deposited films was changed from carbon rich to boron rich. Based on optical emission spectroscopy (OES) measurements, a correlation between film composition and precursor species concentration in the plasma was established. The films were amorphous as detected by grazing incidence X-ray diffraction (GIXRD). The hardness and the elastic modulus have maximal values of 25.5±1.2 and 191±6 GPa, respectively, for the films with a boron concentration of 45.2 at.%. GIXRD data suggest that a depletion in boron content may initiate the formation of graphitic domains in the amorphous matrix. The observed degradation of the mechanical properties is associated with the graphitization. The tribological behavior was studied with a tribometer operated in pin-on-plate configuration at the temperatures 25 and 400°C. The wear mechanisms were discussed with respect to the formation of a boric acid surface layer which was detected by reflection electron energy loss spectroscopy (REELS) analysis.
Similar content being viewed by others
References
R. Kassing E. Oesterschulze W. Kulisch (2003) Surf. Coat. Technol. 169–170 237
C. Binda A. Erdemir (1996) Appl. Phys. Lett. 68 923 Occurrence Handle1996ApPhL..68..923B
A. Erdemir C. Bindal G. R. Fenske (1996) Appl. Phys. Lett. 68 1637 Occurrence Handle10.1063/1.115676 Occurrence Handle1996ApPhL..68.1637E
A. Erdemir M. Halter G. R. Fenske (1997) Wear 205 236 Occurrence Handle10.1016/S0043-1648(96)07508-4
C. Chien S. Chattopadhyay L. C. Chen S. T. Lin K. H. Chen (2003) Diamond Relat. Mater. 12 1463
S. Kurooka T. Ikeda M. Suzuki A. Tanaka (2003) Diamond Relat. Mater. 12 1122
E. Byon J.-K. Kim S. Lee J.-H. Hah K. Sugimoto (2003) Surf. Coat. Technol. 169-170 340 Occurrence Handle10.1016/S0257-8972(03)00102-6
D. Kurapov D. Neuschütz R. Cremer T. Pedersen M. Wuttig D. Dietrich G. Marx J. M. Schneider (2003) Vacuum 68 335
H. Ahn K. S. Klimek K.-T. Rie (2003) Surf. Coat. Technol. 174-175 1225 Occurrence Handle10.1016/S0257-8972(03)00403-1
T. Hasegawa K. Yamamoto Y. Kakudate M. Ban (2003) Surf. Coat. Technol. 169-170 270 Occurrence Handle10.1016/S0257-8972(03)00039-2
H. Lüthje K. Bewilogua S. Daaud M. Johansson L. Hultman (1995) Thin Solid Films 257 40
C. Schaffnit L. Thomas F. Rossi R. Hugon Y. Pauleau (1998) Surf. Coat. Technol. 98 1262 Occurrence Handle10.1016/S0257-8972(97)00368-X
F. Rossi C. Schaffnit L. Thomas H. del Puppo R. Hugon (1999) Vacuum 52 169 Occurrence Handle10.1016/S0042-207X(98)00201-2
W. C. Oliver G. M. Pharr (1992) J. Mater Res. 7 1564 Occurrence Handle1992JMatR...7.1564O
K. Holmberg and A. Metthews, Coating Tribology, Elsevier, 1994, 290
R. Pintaske Th. Welzel M. Schaller N. Kahl J. Nahn F. Richter (1998) Surf. Coat. Technol. 99 266 Occurrence Handle10.1016/S0257-8972(97)00566-5
R. W. B. Pearse and A. G. Gyadon, The Identification of Molecular Spectra, Chapman and Hall 1963
J. A. Stockdale D. R. Nelson F. J. Davis R. N. Compton (1972) J. Chem. Phys. 56 3336 Occurrence Handle10.1063/1.1677702
T. A. Beer J. Laimer H. Störi (2000) J. Vac. Sci. Technol. A18 423 Occurrence Handle2000JVST...18..423B
J. M. Schneider K. Larsson J. Lu E. Olsson B. Hjörvalsson (2002) Appl. Phys. Lett. 80 1144 Occurrence Handle2002ApPhL..80.1144S
R. L. Johnson H. E. Sliney (1962) Ceram. Bull. 41 504
J. Hosoi T. Oikawa M. Inoue Y. Matsui T. Endo (1982) J. Electron Spectrosc. Relat. Phenom. 27 243 Occurrence Handle10.1016/0368-2048(82)80006-6
H. K. Schmid (1995) Mocrosc. Microanal Microstruct. 6 99
P. Widmayer H.-G. Boyen P. Ziemann P. Reinke P. Oelhafen (1999) Phys. Rev. B59 5233 Occurrence Handle1999PhRvB..59.5233W
P. Widmayer P. Ziemann H.-G. Boyen (1998) Diamond Relat. Mater. 7 385
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Kurapov, D., Schneider, J.M. Structure, Composition, Mechanical, and Tribological Properties of BCN Films Deposited by Plasma Enhanced Chemical Vapor Deposition. Plasma Chem Plasma Process 25, 613–623 (2005). https://doi.org/10.1007/s11090-005-6816-x
Received:
Revised:
Issue Date:
DOI: https://doi.org/10.1007/s11090-005-6816-x