Abstract
This study examines the electrical and optical properties of p-Si/n-SiC heterojunctions subjected to UV and visible light in addition to the conduction mechanism of the device. The surfaces of the sputtered SiC film was analyzed using energy-dispersive X-ray (EDX) and scanning electron microscopy (SEM). The rectification ratio of the heterojunction was determined as 1.4 × 103 in the dark. In addition, the device exhibited good rectification under all lights. In stability tests of the device, an improvement in characteristics was observed in I–V measurements after 67 days, and this was attributed to carbon migration or stacking faults between Si and SiC, the interface modification and interfacial states. Since the band gap of SiC is suitable for UV detection, it was observed that the photoresponse under UV was quite good. Responsivity, detectivity, ON/OFF ratio and EQE values were analyzed as the function of applied voltage. It was observed that the device exhibited the best performance especially under 365 nm UV light. The responsivity and detectivity of the device are found to be ~ 5 A/W and 7.6 × 1011 Jones, respectively under UV (365 nm) illumination, respectively.
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Akkal, B., Benamara, Z., Gruzza, B., Bideux, L.: Characterization of interface states at Au/InSb/InP(100) Schottky barrier diodes as a function of frequency. Vacuum 57, 219–228 (2000). https://doi.org/10.1016/S0042-207X(00)00131-7
Altındal, Ş, Uslu, H.: The origin of anomalous peak and negative capacitance in the forward bias capacitance–voltage characteristics of Au/PVA/n-Si structures. J. Appl. Phys. 109, 074503 (2011). https://doi.org/10.1063/1.3554479
Anzalone, R., Litrico, G., Piluso, N., Reitano, R., Alberti, A., Fiorenza, P., Coffa, S., La Via, F.: Carbonization and transition layer effects on 3C-SiC film residual stress. J. Cryst. Growth. 473, 11–19 (2017). https://doi.org/10.1016/j.jcrysgro.2017.05.015
Bartolf, H., Sundaramoorthy, V.K., Mihaila, A., Berthou, M., Godignon, P., Millan, J.: Study of 4H-SiC schottky diode designs for 3.3kV applications. Mater. Sci. Forum. (2014). https://doi.org/10.4028/www.scientific.net/MSF.778-780.795
Chang, P.-C., Chen, C.-H., Chang, S.-J., Su, Y.-K., Yu, C.-L., Huang, B.-R., Chen, P.-C.: High UV/visible rejection contrast AlGaN/GaN MIS photodetectors. Thin Solid Films 498, 133–136 (2006). https://doi.org/10.1016/j.tsf.2005.07.094
Chattopadhyay, P., Haldar, D.P.: Capacitance–voltage characteristic of anisotype heterojunction in the presence of interface states and series resistance. Appl. Surf. Sci. 171, 207–212 (2001). https://doi.org/10.1016/S0169-4332(00)00705-4
Chaudhry, M.I.: Electrical transport properties of crystalline silicon carbide/silicon heterojunctions. IEEE Electron. Device Lett. 12, 670–672 (1991). https://doi.org/10.1109/55.116950
Chava, V.S.N., Barker, B.G., Balachandran, A., Khan, A., Simin, G., Greytak, A.B., Chandrashekhar, M.V.S.: High detectivity visible-blind SiF4 grown epitaxial graphene/SiC Schottky contact bipolar phototransistor. Appl. Phys. Lett. 111, 243504 (2017). https://doi.org/10.1063/1.5009003
Chiu, F.-C.: A review on conduction mechanisms in dielectric films. Adv. Mater. Sci. Eng. 2014, 1–18 (2014). https://doi.org/10.1155/2014/578168
Chung, G.Y., Tin, C.C., Williams, J.R., McDonald, K., Chanana, R.K., Weller, R.A., Pantelides, S.T., Feldman, L.C., Holland, O.W., Das, M.K., Palmour, J.W.: Improved inversion channel mobility for 4H-SiC MOSFETs following high temperature anneals in nitric oxide. IEEE Electron Device Lett. 22, 176–178 (2001). https://doi.org/10.1109/55.915604
Coskun, C., Aydogan, S., Efeoglu, H.: Temperature dependence of reverse bias capacitance–voltage characteristics of Sn/p-GaTe Schottky diodes. Semicond. Sci. Technol. (2004). https://doi.org/10.1088/0268-1242/19/2/020
Dutta, D., De, D.S., Fan, D., Roy, S., Alfieri, G., Camarda, M., Amsler, M., Lehmann, J., Bartolf, H., Goedecker, S., Jung, T.A.: Evidence for carbon clusters present near thermal gate oxides affecting the electronic band structure in SiC-MOSFET. Appl. Phys. Lett. 115, 101601 (2019). https://doi.org/10.1063/1.5112779
Elfadill, N.G., Hashim, M.R., Saron, K.M.A., Chahrour, K.M., Qaeed, M.A., Bououdina, M.: Ultraviolet-Visible photo-response of p-Cu2O/n-ZnO heterojunction prepared on flexible (PET) substrate. Mater. Chem. Phys. 156, 54–60 (2015). https://doi.org/10.1016/j.matchemphys.2015.02.019
Fan, J.Y., Wu, X.L., Zhao, P.Q., Chu, P.K.: Stability of luminescent 3C-SiC nanocrystallites in aqueous solution. Phys. Lett. A 360, 336–338 (2006). https://doi.org/10.1016/j.physleta.2006.08.006
Fang, Y.K., Hwang, S.-B., Chen, K.-H., Liu, C.-R., Tsai, M.-J., Kuo, L.-C.: An amorphous SiC/Si heterojunction p-i-n diode for low-noise and high-sensitivity UV detector. IEEE Trans. Electron Devices 39, 292–296 (1992). https://doi.org/10.1109/16.121685
Ferhati, H., Djeffal, F., Bendjerad, A., Foughali, L., Benhaya, A., Saidi, A.: Highly-detective tunable band-selective photodetector based on RF sputtered amorphous SiC thin-film: Effect of sputtering power. J. Alloys Compd. 907, 164464 (2022). https://doi.org/10.1016/j.jallcom.2022.164464
Ferro, G.: 3C-SiC heteroepitaxial growth on silicon: the quest for holy grail. Crit. Rev. Solid State Mater. Sci. 40, 56–76 (2015). https://doi.org/10.1080/10408436.2014.940440
Gumus, I., Aydogan, S.: On the studies of capacitance–voltage and impedance spectroscopy of an Ni/(GO-Fe3O4)/n-Si heterojunction device over a wide temperature range. Semicond. Sci. Technol. (2020). https://doi.org/10.1088/1361-6641/aba419
Gumus, I., Aydogan, S.: The electrical and dielectric properties of the magnetite nanoparticles supported graphene-oxide/n-Si MOS type device that operates across a wide temperature range. Sens. Actuators A Phys. 331, 112989 (2021). https://doi.org/10.1016/j.sna.2021.112989
Guo, X., Tan, Y., Hu, Y., Zafar, Z., Liu, J., Zou, J.: High quality VO2 thin films synthesized from V2O5 powder for sensitive near-infrared detection. Sci. Rep. 11, 21749 (2021). https://doi.org/10.1038/s41598-021-01025-8
Han, L., Zou, Y., Jia, B., Guan, X., Zhao, H., Hu, Y., Zhang, X., Lu, P.: Atomic and electronic properties of different types of SiC/SiO2 interfaces: First-principles calculations. Surfaces and Interfaces. 33, 102273 (2022). https://doi.org/10.1016/j.surfin.2022.102273
Hirabayashi, Y., Karasawa, S., Kobayashi, K., Misawa, S., Yoshida, S.: Spectral response of a photodiode using 3C-SiC single crystalline film. Sens. Actuators A Phys. 43, 164–169 (1994). https://doi.org/10.1016/0924-4247(93)00687-Y
Juang, F.-R., Fang, Y.-K., Chiang, Y.-T., Chou, T.-H., Lin, C.-I.: A high-performance n-i-p SiCN homojunction for low-cost and high-temperature ultraviolet detecting applications. IEEE Sens. J. 11, 150–154 (2011). https://doi.org/10.1109/JSEN.2010.2052799
Kagoyama, Y., Okamoto, M., Yamasaki, T., Tajima, N., Nara, J., Ohno, T., Yano, H., Harada, S., Umeda, T.: Anomalous carbon clusters in 4H-SiC/SiO2 interfaces. J. Appl. Phys. 125, 065302 (2019). https://doi.org/10.1063/1.5066356
Karataş, S., Yakuphanoglu, F., Amanullah, F.M.: Capacitancevoltage and conductancevoltage characteristics of Ag/n-CdO/p-Si MIS structure prepared by solgel method. J. Phys. Chem. Solids. 73, 46–51 (2012). https://doi.org/10.1016/J.JPCS.2011.09.020
Karazhanov, S.Z., Atabaev, I.G., Saliev, T.M., Kanaki, É.V., Dzhaksimov, E.: Excess tunneling currents in p-Si-n-3C-SiC heterostructures. Semiconductors 35, 77–79 (2001). https://doi.org/10.1134/1.1340293
Khalili, S., Chenari, H.M., Orhan, Z., Yıldırım, F., Aydoğan, Ş: Synthesis characterization of SnO2 nanofibers (NFs) and application of high-performing photodetectors based on SnO2 NFs/n-Si heterostructure. Sens. Actuators A Phys. 342, 113631 (2022a). https://doi.org/10.1016/j.sna.2022.113631
Kim, D., Park, K., Lee, J.H., Kwon, I.S., Kwak, I.H., Park, J.: Anisotropic 2D SiAs for high-performance UV–visible photodetectors. Small 17, 2006310 (2021). https://doi.org/10.1002/smll.202006310
Koca, M., Kudaş, Z., Ekinci, D.: Aydoğan: Performance improvement of n-TiO2/p-Si heterojunction by forming of n-TiO2/polyphenylene/p-Si anisotype sandwich heterojunction. Mater. Sci. Semicond. Process. (2021). https://doi.org/10.1016/j.mssp.2020.105436
Kumar, M.J., Reddy, C.L.: Realizing wide bandgap p-SiC-emitter lateral heterojunction bipolar transistors with low collectoremitter offset voltage and high current gain—a novel proposal using numerical simulation 1–31 (2010). https://doi.org/10.48550/arXiv.1008.3031
Li, H., Dimitrijev, S., Harrison, H.B., Sweatman, D.: Interfacial characteristics of N2O and NO nitrided SiO2 grown on SiC by rapid thermal processing. Appl. Phys. Lett. 70, 2028–2030 (1997). https://doi.org/10.1063/1.118773
Massoubre, D., Wang, L., Hold, L., Fernandes, A., Chai, J., Dimitrijev, S., Iacopi, A.: Vertically conductive single-crystal SiC-based Bragg reflector grown on Si Wafer. Sci. Rep. 5, 17026 (2015). https://doi.org/10.1038/srep17026
Md Foisal, A.R., Dinh, T., Nguyen, V.T., Tanner, P., Phan, H.-P., Nguyen, T.-K., Haylock, B., Streed, E.W., Lobino, M., Dao, D.V.: Self-Powered Broadband (UV-NIR) Photodetector Based on 3C-SiC/Si Heterojunction. IEEE Trans. Electron Devices 66, 1804–1809 (2019). https://doi.org/10.1109/TED.2019.2899742
Mridha, S., Basak, D.: Ultraviolet and visible photoresponse properties of n-ZnO∕p-Si heterojunction. J. Appl. Phys. 101, 083102 (2007). https://doi.org/10.1063/1.2724808
Nicollian, E.H., Goetzberger, A.: The Si-SiO2 interface—electrical properties as determined by the metal-insulator-silicon conductance technique. Bell Syst. Tech. J. (1967). https://doi.org/10.1002/j.1538-7305.1967.tb01727.x
Nishiguchi, T., Nakamura, M., Nishio, K., Isshiki, T., Nishino, S.: Heteroepitaxial growth of (111) 3C–SiC on well-lattice-matched (110) Si substrates by chemical vapor deposition. Appl. Phys. Lett. 84, 3082–3084 (2004). https://doi.org/10.1063/1.1719270
Noh, S.-S., Seo, J.-H., Lee, E.-A.: The fabrication by using surface MEMS of 3C-SiC micro-heaters and RTD sensors and their resultant properties. Trans. Electron. Electron. Mater. 10, 131–134 (2009). https://doi.org/10.4313/TEEM.2009.10.4.131
Orhan, Z., Yıldırım, F., Khalili, S., Chenari, H.M., Aydoğan, Ş: Long-term stable, self-powered and highly sensitive photodetectors based on the ZnO:ZrO2 composite fibers (Fs)/N-Si heterojunction. JOM. 74, 3091–3102 (2022). https://doi.org/10.1007/s11837-022-05339-4
Özmen, A., Aydogan, S., Yilmaz, M.: Fabrication of spray derived nanostructured n-ZnO/p-Si heterojunction diode and investigation of its response to dark and light. Ceram. Int. 45, 14794–14805 (2019). https://doi.org/10.1016/j.ceramint.2019.04.210
Pezoldt, J., Förster, C., Weih, P., Masri, P.: Electrical characterization of SiC/Si heterostructures with Ge-modified interfaces. Appl. Surf. Sci. 184, 79–83 (2001). https://doi.org/10.1016/S0169-4332(01)00480-9
Phan, H.-P., Dao, D.V., Tanner, P., Han, J., Nguyen, N.-T., Dimitrijev, S., Walker, G., Wang, L., Zhu, Y.: Thickness dependence of the piezoresistive effect in p-type single crystalline 3C-SiC nanothin films. J. Mater. Chem. c. 2, 7176–7179 (2014). https://doi.org/10.1039/C4TC01054J
Rhoderick, E.H., Williams, R.H.: Metal-Semiconductor Contacts. Clarendon Press, pp. 1–252 (1988)
Saddow, S.: Silicon Carbide Biotechnology A Biocompatible Semiconductor for Advanced Biomedical Devices and Applications. Elsevier (2016)
Srivastava, A., Jit, S., Tripathi, S.: High-performance pentacene/ZnO UV–visible photodetector using solution method. IEEE Trans. Electron Devices. 68, 3439–3445 (2021). https://doi.org/10.1109/TED.2021.3077348
Sugii, T., Ito, T., Furumura, Y., Doki, M., Mieno, F., Maeda, M.: beta-SiC/Si heterojunction bipolar transistors with high current gain. IEEE Electron Device Lett. 9, 87–89 (1988). https://doi.org/10.1109/55.2049
Tang, X., Zheng, Y., Cao, B., Wu, Q., Liang, J., Wang, W., Li, G.: GaN nanowire/Nb-doped MoS2 nanoflake heterostructures for fast UV–visible photodetectors. ACS Appl. Nano Mater. 5, 4515–4523 (2022). https://doi.org/10.1021/acsanm.2c00761
Tanner, P., Iacopi, A., Phan, H.-P., Dimitrijev, S., Hold, L., Chaik, K., Walker, G., Dao, D.V., Nguyen, N.-T.: Excellent rectifying properties of the n-3C-SiC/p-Si heterojunction subjected to high temperature annealing for electronics, MEMS, and LED applications. Sci. Rep. 7, 17734 (2017a). https://doi.org/10.1038/s41598-017-17985-9
Vural, Ö., Şafak, Y., Türüt, A., Altındal, Ş: Temperature dependent negative capacitance behavior of Al/rhodamine-101/n-GaAs Schottky barrier diodes and Rs effects on the C-V and G/ω–V characteristics. J. Alloys Compd. 513, 107–111 (2012). https://doi.org/10.1016/j.jallcom.2011.09.101
Wang, L., Dimitrijev, S., Tanner, P., Zou, J.: Aluminum induced in situ crystallization of amorphous SiC. Appl. Phys. Lett. 94, 181909 (2009). https://doi.org/10.1063/1.3132053
Werner, J., Levi, A.F.J., Tung, R.T., Anzlowar, M., Pinto, M.: Origin of the excess capacitance at intimate Schottky contacts. Phys. Rev. Lett. 60, 53–56 (1988). https://doi.org/10.1103/PhysRevLett.60.53
Yıldırım, F., Orhan, Z., Taşkın, M., Incekara, U., Biber, M., Aydoğan, Ş: Photo-sensor characteristics of tannic acid (C76H52O46)/n-Si hybrid bio-photodiode for visible and UV lights detection. Opt. Laser Technol. 153, 108194 (2022). https://doi.org/10.1016/j.optlastec.2022.108194
Yildirim, M.A., Teker, K.: Self-powered fine-pattern flexible SiC single nanowire ultraviolet photodetector. J. Alloys Compd. 868, 159255 (2021). https://doi.org/10.1016/j.jallcom.2021.159255
Yildirim, F., Orhan, Z., Khalili, S., Chenari, H.M., Aydoğan, Ş: A comparative study of the ZnO Fibers-based photodetectors on n-Si and p-Si. J. Phys. D. Appl. Phys. 55, 395102 (2022a). https://doi.org/10.1088/1361-6463/ac7f04
Yıldız, D.E., Altındal, Ş: On the temperature dependence of series resistance and interface states in Al/SiO2/p-Si (MIS) Schottky diodes. Microelectron. Eng. 85, 289–294 (2008). https://doi.org/10.1016/j.mee.2007.06.015
Yu, M.B., Rusli, Yoon, S.F., Chen, Z.M., Ahn, J., Zhang, Q., Chew, K., Cui, J.: Deposition of nanocrystalline cubic silicon carbide films using the hot-filament chemical-vapor-deposition method. J. Appl. Phys. 87, 8155–8158 (2000). https://doi.org/10.1063/1.373511
Zakhvalinskii, V., Piliuk, E., Goncharov, I., Simashkevich, A., Sherban, D., Bruc, L., Curmei, N., Rusu, M.: Silicon carbide nanolayers as a solar cell constituent. Phys. Status Solidi. 212, 184–188 (2015). https://doi.org/10.1002/pssa.201431357
Zeyrek, S., Acaroğlu, E., Altındal, Ş, Birdoğan, S., Bülbül, M.M.: The effect of series resistance and interface states on the frequency dependent C-V and G/w–V characteristics of Al/perylene/p-Si MPS type Schottky barrier diodes. Curr. Appl. Phys. 13, 1225–1230 (2013). https://doi.org/10.1016/j.cap.2013.03.014
Zhang, F., Ding, Y., Zhang, Y., Zhang, X., Wang, Z.L.: Piezo-phototronic effect enhanced visible and ultraviolet photodetection using a ZnO–CdS core-shell micro/nanowire. ACS Nano 6, 9229–9236 (2012). https://doi.org/10.1021/nn3035765
Zhang, Z., Wang, Z., Guo, Y., Robertson, J.: Carbon cluster formation and mobility degradation in 4H-SiC MOSFETs. Appl. Phys. Lett. 118, 031601 (2021). https://doi.org/10.1063/5.0037241
Zhu, Y.H., Zhang, J.C., Chen, Z.T., Egawa, T.: Demonstration on GaN-based light-emitting diodes grown on 3C-SiC/Si(111). J. Appl. Phys. 106, 124506 (2009). https://doi.org/10.1063/1.3273311
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BCŞ contributed for data curation, experimental section, Investigation. FY contributed for data curation, Formal analysis, experimental section. ZO contributed for data curation, Formal analysis, experimental section. SA contributed for formal analysis, Investigation, Validation, Writing-review & editing. All authors read and approved the final manuscript.
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Şakar, B.C., Yıldırım, F., Orhan, Z. et al. Conduction mechanism and UV/visible photodetection properties of p-Si/n-SiC heterostructure. Opt Quant Electron 55, 375 (2023). https://doi.org/10.1007/s11082-023-04571-9
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DOI: https://doi.org/10.1007/s11082-023-04571-9