Skip to main content
SpringerLink
Log in

Influence of Ar gas pressure on the structural and optical properties and surface topography of Al-doped ZnO thin films sputtered by DC-Magnetron sputtering method

  • Published:
Optical and Quantum Electronics Aims and scope Submit manuscript

Abstract

In this work, Aluminum doped Zinc oxide thin films were sputtered on glass substrate by the direct current (DC) magnetron sputtering method. The influence of Ar gas pressure on the structural and optical properties was measured. The optical parameters were calculated by UV–Visible spectroscopy, the nature of transition reveals direct allowed transition for the prepared films. Also, some physical quantities such as the strength of electron–phonon interaction, dissipation factor (tanδ) in the visible region and the lattice dielectric constant were presented for these thin films. The AFM analysis extracts surface parameters of the AZO thin films that help us to quantitively investigate the surface analysis. The band gap energy and transition index without any presumption about transition natural were calculated from Derivation Ineffective Thickness Method (DITM) and it was found that the reaction of Ar gas pressure plays an essential part in controlling the physical quantities of AZO thin films.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11
Fig. 12
Fig. 13
Fig. 14
Fig. 15
Fig. 16
Fig. 17
Fig. 18

Similar content being viewed by others

Availability of data and material

Not applicable.

Code availability

Not applicable.

References

  • Abdullah, A.Q.: Surface and volume energy loss, optical conductivity of Rhodamine 6G dye (R6G). Chem. Mater. Res. 3, 56–63 (2013)

    Google Scholar 

  • Akkaya Arier, U.O., Uysal, B.O.: Effects of precursor parameters on the optical and electrical properties of AZO nanocomposite films. Optic 127, 5065–5069 (2016)

    Google Scholar 

  • Bashar, M.S., Matin, R., Sultana, M., Siddika, A., Rahama, M., Gafur, M.A., Ahmed, F.: Effect of rapid thermal annealing on structural and optical properties of ZnO thin films fabricated by RF magnetron sputtering technique. J. Theoret. Appl. Phys 14, 53–68 (2020)

    Article  Google Scholar 

  • Belahssen, O., Benramache, S., Benhaoua, B.: Effect of Urbach energy with precursor molarity on the crystallite size in undoped ZnO thin film. Main Group Chem. 13, 343–352 (2014)

    Article  Google Scholar 

  • Caglar, M.: The effects of Al doping on the optical constants of ZnO thin films prepared by spray pyrolysis method. J. Mater. Sci.: Mater. Electron. 19, 704–708 (2008)

    Google Scholar 

  • Chai Lin, T., Chang Huang, W., Chun Tsai, F.: The structural and electro-optical characteristics of AZO/Cr:Cu/AZO transparent conductive film. Thin Solid Film 589, 446–450 (2015)

    Article  ADS  Google Scholar 

  • Chi, J., Fan, P., Liang, G., Zhang, D., Cai, X., Zheng, Z., Chen, T.: Room Temperature Deposition and Properties of AZO thin films by DC magnetron sputtering under different p;asma power. Adv. Mater. Res. 194–196, 2440–2443 (2011)

    Article  Google Scholar 

  • Dejam, L., Solaymani, Sh., Achour, A., Stach, S., Talu, S., Beryani Nezafat, N., Dalouji, V., Shokri, A.A., Ghaderi, A.: Correlation between surface topography, optical band gaps and crystalline properties of engineered AZO and CAZO thin films. Chem. Phys. Lett. 719, 78–90 (2019)

    Article  ADS  Google Scholar 

  • Dimitrov, V., Sakaa, S.: Electronic oxide polarizability and optical basicity of simple oxides I. J. Appl. Phys. 79, 1736–1740 (1996a)

    Article  ADS  Google Scholar 

  • Dimitrov, V., Sakaa, S.: Linear and nonlinear optical properties of simple oxide II. J. Appl. Phys. 79, 1741–1745 (1996b)

    Article  ADS  Google Scholar 

  • Evcimen-Duygulu, N., Kodolbas, A.O., Ekerim, E.: Effects of argon pressure and r.f. power on magnetron sputtered aluminum doped ZnO thin films. J. Cryst. Growth 394, 116–125 (2014)

    Article  ADS  Google Scholar 

  • Fang, G., Li, D., Yao, B.L.: Fabrication and vacuum annealing of transparent conductive AZO thin films prepared by DC magnetron sputtering. Vacuum 68, 363–372 (2002a)

    Article  ADS  Google Scholar 

  • Fang, G.J., Li, D.J., Yao, B.L.: Effect of vacuum annealing on the properties of transparent conductive AZO thin films prepared by DC magnetron sputtering. Physica Status Solid 193, 139–152 (2002b)

    Article  ADS  Google Scholar 

  • Franz, U.: The long-wavelength edge of photographic sensivity and of the electronic absorption of solids. Phys. Rev. 92, 1324 (1953)

    Article  ADS  Google Scholar 

  • Ghobadi, N.: Derivation of ineffective thickness method for investigation of the exact behavior of the optical transitions in nanostructured thin films. J Master Sci: Master Electron 27, 8951–8956 (2016)

    Google Scholar 

  • Ghobadi, N., Shiravand, M., Gholami Hatam, E.: Influence of sputtered time on the structural and optical characterization of Al-doped ZnO thin films prepared by RF sputtering technique. Opt. Quant. Electron. 53, 14 (2021)

    Article  Google Scholar 

  • Hssanien, A.S., Akl, A.A.: Effect of Se addition on optical and electrical properties of chalcogenide CdSSe thin films. Superlattices Microstruct. 89, 153–169 (2016)

    Article  ADS  Google Scholar 

  • Islam, M.R., Rahman, M., Farhad, S.F.U., Podder, J.: Structural, optical, and phptocatalysis properties of sol-gel deposited Al-doped ZnO thin films. Surfaces Interfaces 16, 120–126 (2019)

    Article  Google Scholar 

  • Juhnevica, I., Masonkina, M., Mezinskis, G., Gabrene, A.: Synthesis and properties ZnO /Al thin films prepared by dip-coating process. Mater Sci Chem 31, 33–38 (2015)

    Google Scholar 

  • Kaid, M.A., Ashour, A.: Preparation of ZnO–doped Al films by spray pyrolysis technique. Appl. Surf. Sci 235, 3029–3033 (2007)

    Article  ADS  Google Scholar 

  • Kim, D.K., Kim, H.B.: Room temperature deposition of Al- doped thin films on glass by RF magnetron sputtering under different Ar gas pressure. J. Alloy. Compd. 509, 421–425 (2011)

    Article  Google Scholar 

  • Kumar, K.D.A., Valanarasu, S., Rosario, S.R., Ganesh, V., Shkir, M., Sreelatha, C.J., AlFaify, S.: Evaluation of the structural, optical, and electrical properties of AZO thin films prepared by chemical bath deposition for optoelectronics. Solid State Sci. 78, 58–68 (2018)

    Article  ADS  Google Scholar 

  • Lee, K.E., Wang, M., Kim, E.J., Hahn, S.H.: Structural and optical properties of sol-gel AZO thin film. Curr. Appl. Phys. 9, 683–687 (2009)

    Article  ADS  Google Scholar 

  • Li, M., Mani, A.M., Salleh, S., Alias, A.: Effect of flexible substrates on the structural and optical properties of ZnO films deposited by sputtering method. Adv. Mater. Res. 11017, 678–683 (2015)

    Google Scholar 

  • Li, C., Han, C., Zhang, Y., Zang, Z., Wang, M., Tang, X., Du, J.: Enhanced photoresponse of self-powered perovskite photodetector based on ZnO nanoparticles decorated CsPbBr3 films. Sol. Energy Mater. Sol. Cells 172, 341–346 (2017)

    Article  Google Scholar 

  • Molamohammadi, M., Arman, A., Achour, A., et al.: Microstructure and optical properties of cobalt-carbon nanocomposites prepared by RF-sputtering. J. Mater. Sci. Mater. Electron 26, 5964–5969 (2015a)

    Article  Google Scholar 

  • Molamohammadi, M., Luna, C., Arman, A., et al.: Preparation and magnetoresistance behavior of nickel nanoparticles embedded in hydrogenated carbon film. J. Mater. Sci. Mater. Electron 26, 6814–6818 (2015b)

    Article  Google Scholar 

  • Patel, M., Kim, J.: Electrical circuit of ITO/AZO/Ge photodetector. Data Brief 14, 62–67 (2017)

    Article  Google Scholar 

  • Rahmane, S., Djouadi, M.A., Aida, M.S., Barreau, N., Abdallah, B., Zoubir, N.H.: Power and pressure effects upon magnetron sputtered aluminum doped ZnO films properties. Thin Solid Films 519, 5–10 (2010)

    Article  ADS  Google Scholar 

  • Sabeeh, S.H., Jassam, R.H.: The effect of annealing and Al dopant on characterization of ZnO thin films prepared by sol-gel method. Results Phys. 10, 212–216 (2018)

    Article  ADS  Google Scholar 

  • Samanta, K., Hattacharya, P.B., Katiyar, R.S.: Raman scattering studies of p-type Sb doped ZnO thin films. J. Appl. Phys 108, 3501–3504 (2010)

    Article  Google Scholar 

  • Saravanakumar, M., Agilan, S., Muthukumarasamy, N.: Effect of annealing temperature on characterization of ZnO thin films by sol-gel method. Int J Chem Tech Res 6, 2941–2945 (2014)

    Google Scholar 

  • Sengupta, J., Sahoo, R.K., Mukherjee, C.D.: Effect of annealing on the structural, topographical and optical properties of sol-gel derived ZnO and AZO thin films. Mater. Lett. 83, 84–87 (2012)

    Article  Google Scholar 

  • Sharmin, A., Tabassum, S., Bashar, M.S., Mahmood, Z.H.: Depositions and characterization of sol-gel processed Al-doped ZnO (AZO) as transparent conducting oxide(TCO) for solar cell application. J. Theoret. Appl.phys. 13, 123–132 (2019)

    Article  ADS  Google Scholar 

  • Shokri, A., Dejam, L.: Experimental and theoretical investigation on temperature and voltage dependence 0f Au/AZO thin-film Schottky diode. Int. Nano Lett. 9, 161–168 (2019)

    Article  Google Scholar 

  • Subramanyam, T.K., Goutham, P., Kumar, S., Yadhuraj, S.R., Geetha, K.S.: Optimization of sputtered AZO thin films for device application. Mater. Today 5, 10851–10859 (2018)

    Google Scholar 

  • Terasako, T., Yagi, M., Ishizaki, M., Senda, Y., Matsuura, H., Shirakata, S.: Growth of ZnO films and nanowires by atmospheric –pressure chemical vapor deposition using zinc powder and water as source materials. Surf. Coat. Technol. 201, 8924–8930 (2007)

    Article  Google Scholar 

  • Torrisi, G., Crupi, I., Mirabella, S., Terrasi, A.: Robustness and electrical reliability of AZO/Ag/AZO thin film after bending stress. Sol. Energy Mater. Sol. Cells 165, 88–93 (2017)

    Article  Google Scholar 

  • Tseng, Sh.: Investigation of post-annealing aluminum-doped zinc oxide (AZO) thin films by a graphene–based heater. Appl. Surf. Sci. 448, 136–167 (2018)

    Article  Google Scholar 

  • Valentini, A., Quaranta, F., Penza, M., Rizzi, F.R.: The stability of zinc oxide electrodes fabricated by dual ion beam sputtering. J. Appl. Phys 73, 1143–1145 (1993)

    Article  ADS  Google Scholar 

  • Wang, M., Liu, Q., Dong, G., He, Y., Diao, X.: Influence of thickness on the structure, electrical, optical and electrochromic properties of AZO thin films and their inorganic all-solid-state devices. Electrochim. Acta 258, 1336–1347 (2017)

    Article  Google Scholar 

  • Wang, H., Li, H., Cai, W., Zhang, P., Cao, S., Chen, Z., Zang, Z.: Challenges and strategies relating to device function layers and their integration toward high-performance inorganic perovskite solar cells. Nanoscale 12, 14369–14404 (2020a)

    Article  Google Scholar 

  • Wang, H., Cao, S., Yang, B., Li, H.: NH4Cl modified ZnO for high-performance CsPbIBr2 perovskite solar cells via low temperature process. Solar PRL 4, 1900363 (2020b)

    Google Scholar 

  • Wen, L., Bibhuti, B., Hye, S., Kim, R., Jeon, G.: Study on the electrical, optical, structural, and morphological properties of highly transparent and conductive AZO thin films prepared near room temperature. Appl. Surf. Sci. 473, 649–656 (2019)

    Article  ADS  Google Scholar 

  • Xia, Y., Wang, P., He, G., Zhang, M., Shi, S., Liu, Y., Sun, Z.: Microstructure, optoelectrical and pre-strain dependent electrical properties of AZO films on flexible glass substrates for flexible electronics. Surf. Coat. Technol. 320, 34–38 (2017)

    Article  Google Scholar 

  • Yun, J., Duraisamy, N., Melvin-David-Kumar, M., Kim, J.: Optical and electrical of AZO/Ni/ITO transparent conductor. Mater. Lett. 143, 215–218 (2015)

    Article  Google Scholar 

  • Zaiour, A., Benhaya, A., Bentrcia, T.: Impact of deposition methods and doping on structural, optical and electrical properties of ZnO-Al thin films. Optik-Int. J. Light Electron Optics 186, 293–299 (2019)

    Article  Google Scholar 

  • Zang, Z.: Efficiency enhancement of ZnO/Cu2O solar cells with well oriented and micrometer grain sized Cu2O films. Appl. Phys. Lett. 112, 042106 (2018)

    Article  ADS  Google Scholar 

  • Zhang, W., Xiong, J., Liu, L., Zhang, X., Gu, H.: Influence of annealing temperature on structural, optical and electrical properties of AZO/Pd/AZO films. Sol. Energy Mater. Sol. Cells 153, 52–60 (2016)

    Article  Google Scholar 

Download references

Acknowledgements

Not applicable.

Funding

Not applicable.

Author information

Authors and Affiliations

  1. Department of Physics, Faculty of Science, Malayer University, Malayer, Iran

    Mahdiyeh Shiravand, Nader Ghobadi & Ebrahim Gholami Hatam

Authors
  1. Mahdiyeh Shiravand
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Nader Ghobadi
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Ebrahim Gholami Hatam
    View author publications

    You can also search for this author in PubMed Google Scholar

Contributions

Not applicable.

Corresponding author

Correspondence to Nader Ghobadi.

Ethics declarations

Conflicts of interest

The authors declare that they have no known competing financial interests or personal relationships that could have appeared to influence the work reported in this paper.

Ethics approval

Not applicable.

Consent to participate

Not applicable.

Consent for publication

Not applicable.

Additional information

Publisher's Note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Springer Nature or its licensor holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Shiravand, M., Ghobadi, N. & Hatam, E.G. Influence of Ar gas pressure on the structural and optical properties and surface topography of Al-doped ZnO thin films sputtered by DC-Magnetron sputtering method. Opt Quant Electron 54, 828 (2022). https://doi.org/10.1007/s11082-022-04237-y

Download citation

  • Received:

  • Accepted:

  • Published:

  • DOI: https://doi.org/10.1007/s11082-022-04237-y

Keywords

Search

Navigation