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Structural and opto-electrical properties of Al doped ZnO sputtered thin films

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Abstract

Transparent and conductive aluminum-doped zinc oxide (AZO) thin films with high preferential c-axis orientation have been deposited on glass substrates by radio frequency magnetron sputtering method of ZnO and DC magnetron sputtering of Al. Structural, surface morphology, optical and electrical properties of ZnO thin films were studied by X-ray diffraction, scanning electron microscope, ultraviolet–visible spectrophotometer, surface plasmon spectroscopy and Hall effect measurements. The results show that AZO films are polycrystalline and exhibit the hexagonal wurzite crystal structure with a preferred orientation along (002) direction. When DC sputtering power supplied to Al target increases, the crystallinity decreases while the electrical resistivity increases. The average measured transmittance exceeded 75 % in the visible range for all AZO thin films. The band gap values increase with decreasing the Al concentrations.

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References

  1. Z.Q. Ma, B. He, in. TCO-Si Based Heterojunction Photovoltaic Devices, Solar Cells—Thin-Film Technologies, ed. by L.A. Kosyachenko, ISBN:978-953-307-570-9, InTech, Available from: http://www.intechopen.com/books/solar-cells-thin-film-technologies/tco-si-based-heterojunction-photovoltaic-devices

  2. S.H. Park, S.E. Park, J.C. Lee, P.K. Song, Photoluminescence characterization of Al-doped ZnO films deposited by using DC magnetron sputtering. J. Korean Phys. Soc. 54(3), 1344–1347 (2009). doi:10.3934/jkps.54.1344

    Article  Google Scholar 

  3. K.-K. Kim, S.-N. Lee, H. Kim, S. Cho, Structural, optical, and electrical properties of E-beam and sputter-deposited Ito films for led applications. Electron. Mater. Lett. 7(2), 145–149 (2011)

    Article  Google Scholar 

  4. T. Soderstrom, F.-J. Haug, X. Niquille, C. Ballif, TCOs for nip thin film silicon solar cells. Prog. Photovoltaics Res. Appl. 17(3), 165–176 (2009). doi:10.1002/pip

    Article  Google Scholar 

  5. K. Ravichandran, N. Jabena Begum, K. Swaminathan, B. Sakthivel, Fabrication of a double layered FTO/AZO film structure having enhanced thermal, electrical and optical properties, as a substitute for ITO films. Superlattices Microstruct. 64, 185–195 (2013). doi:10.1016/j.spmi.2013.09.029

    Article  Google Scholar 

  6. J. Chang, W. Lin, M. Hon, Effects of post-annealing on the structure and properties of Al-doped zinc oxide films. Appl. Surf. Sci. 183, 18–25 (2001). doi:10.1016/S0169-4332(01)00541-4

    Article  Google Scholar 

  7. B.L. Zhu, J. Wang, S.J. Zhu, J. Wu, D.W. Zeng, C.S. Xie, Thickness study of AZO films by RF sputtering in Ar+H2 atmosphere at room temperature. Phys. Status Solidi 209(7), 1251–1258 (2012). doi:10.1002/pssa.201228014

    Article  Google Scholar 

  8. M.Y. Zhang, Q. Nian, G.J. Cheng, Room temperature deposition of alumina-doped zinc oxide on flexible substrates by direct pulsed laser recrystallization. Appl. Phys. Lett. 100(15), 151902–151904 (2012). doi:10.1063/1.3702460

    Article  Google Scholar 

  9. Y.-J. Choi, S.C. Gong, D.C. Johnson, S. Golledge, G.Y. Yeom, H.-H. Park, Characteristics of the electromagnetic interference shielding effectiveness of Al-doped ZnO thin films deposited by atomic layer deposition. Appl. Surf. Sci. 269, 92–97 (2013). doi:10.1016/j.apsusc.2012.09.159

    Article  Google Scholar 

  10. Z. Zhang, C. Bao, W. Yao, S. Ma, L. Zhang, S. Hou, Influence of deposition temperature on the crystallinity of Al-doped ZnO thin films at glass substrates prepared by RF magnetron sputtering method. Superlattices Microstruct. 49, 644–653 (2011). doi:10.1016/j.spmi.2011.04.002

    Article  Google Scholar 

  11. Z.A. Wang, J.B. Chu, H.B. Zhu, Z. Sun, Y.W. Chen, S.M. Huang, Solid-state electronics growth of ZnO: Al films by RF sputtering at room temperature for solar cell applications. Solid State Electron. 53, 1149–1153 (2009). doi:10.1016/j.sse.2009.07.006

    Article  Google Scholar 

  12. B.L. Zhu, J. Wang, S.J. Zhu, J. Wu, D.W. Zeng, C.S. Xie, Thickness study of AZO films by RF sputtering in Ar+H2 atmosphere at room temperature. Phys. Status Solidi 209, 1251–1258 (2012). doi:10.1002/pssa.201228014

    Article  Google Scholar 

  13. K. Jong-Wook, K. Hong-Bae, K.K. Deok, Effect of RF power on an Al-doped ZnO thin film deposited by RF magnetron sputtering. J. Korean Phys. Soc. 59, 2349 (2011). doi:10.3938/jkps.59.2349

    Article  Google Scholar 

  14. B.-Y. Oh, M.-C. Jeong, W. Lee, J.-M. Myoung, Properties of transparent conductive ZnO: Al films prepared by co-sputtering. J. Cryst. Growth 274(3–4), 453–457 (2005). doi:10.1016/j.jcrysgro.2004.10.026

    Article  Google Scholar 

  15. H.-M. Zhou, D.-Q. Yi, Y. Zhi-ming, L.-R. Xiao, Preparation of aluminum doped zinc oxide films and the study of their microstructure, electrical and optical properties. Thin Solid Films 515, 6909–6914 (2007). doi:10.1016/j.tsf.2007.01.041

    Article  Google Scholar 

  16. Z. Huafu, L. Hanfa, Z. Aiping, Y. Changkun, Influence of the distance between target and substrate on the properties of transparent conducting Al–Zr co-doped zinc oxide thin films. J. Semicond. 30(11), 113002 (2009). doi:10.1088/1674-4926/30/11/113002

    Article  Google Scholar 

  17. K. Nouneh, T. Ajjammouri, Z. Laghfour, A. Maaroufi, M. Abd-Lefdil, D. Chaumont, Z. Sekkat, Structural and spectral properties of ZnO nanorods by wet chemical method for hybrid solar cells applications. Mater. Lett. 139, 26–30 (2015). doi:10.1016/j.matlet.2014.09.141

    Article  Google Scholar 

  18. J. T-Thienprasert, S. Rujirawat, W. Klysubun, J.N. Duenow, T.J. Coutts, S.B. Zhang, D.C. Look, S. Limpijumnong, Compensation in Al-doped ZnO by Al-related acceptor complexes: synchrotron X-ray absorption spectroscopy and theory. PRL 110(5), 055502 (2013). doi:10.1103/PhysRevLett.110.055502

    Article  Google Scholar 

  19. M. Caglar, S. Ilican, Y. Caglar, F. Yakuphanoglu, The effects of Al doping on the optical constants of ZnO thin films prepared by spray pyrolysis method. J. Mater. Sci.: Mater. Electron. 19, 8–9 (2008)

    Google Scholar 

  20. S. Rehman, A. Rahmouni, T. Mahfoud, D.V. Nesterenko, Z. Sekkat, Determination of the optical thickness of sub 10-nm thin metal films by SPR experiments. Plasmonics 9, 381–387 (2014)

    Article  Google Scholar 

  21. Z. Sekkat, J. Wood, Y. Geerts, W. Knoll, Surface plasmon investigations of light-induced modulation in the optical thickness of molecularly thin photochromic layers. Langmuir 12, 2976 (1996)

    Article  Google Scholar 

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Authors and Affiliations

  1. Moroccan Foundation for Advanced Science, Innovation and Research (MAScIR), Optics and Photonics Center, Rabat, Morocco

    Z. Laghfour, T. Ajjammouri, S. Aazou, S. Refki, D. V. Nesterenko, A. Rahmouni & Z. Sekkat

  2. Faculty of Sciences, University Mohammed V, Rabat, Morocco

    Z. Laghfour, T. Ajjammouri, S. Refki, M. Abd-Lefdil & Z. Sekkat

  3. SINTEF Materials and Chemistry, Oslo, Norway

    A. Ulyashin

  4. ICube Laboratory, Université de Strasbourg and CNRS, Strasbourg, France

    A. Slaoui

  5. Department of Applied Physics, Graduate School of Engineering, Osaka University, Suita, Osaka, 585-0871, Japan

    Z. Sekkat

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  1. Z. Laghfour
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  2. T. Ajjammouri
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  3. S. Aazou
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  4. S. Refki
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  5. D. V. Nesterenko
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  6. A. Rahmouni
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  7. M. Abd-Lefdil
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  8. A. Ulyashin
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  9. A. Slaoui
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  10. Z. Sekkat
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Correspondence to Z. Sekkat.

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Laghfour, Z., Ajjammouri, T., Aazou, S. et al. Structural and opto-electrical properties of Al doped ZnO sputtered thin films. J Mater Sci: Mater Electron 26, 6730–6735 (2015). https://doi.org/10.1007/s10854-015-3277-8

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  • DOI: https://doi.org/10.1007/s10854-015-3277-8

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