Abstract
This paper presents experimental results of laser modification of the surface of monocrystalline silicon under the influence of a double femtosecond laser pulse with varying delays less than or close to the electron–phonon interaction time, as well as the results of numerical simulation of the photoexcitation of a semiconductor in the approximation of dielectric constant. It is shown that the excitation of cylindrical surface waves not only precedes the excitation of plane surface electromagnetic waves, but is also a determining factor in the cumulative change in the dielectric constant of the medium and the creation of conditions for the excitation of plane surface electromagnetic waves.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Agranovich, V.M., Mills, D.L.: Surface Polaritons: Electromagnetic Waves on Surfaces and Interfaces. Nauka, Moscow (1985)
Aktsipetrov, O.A., Baranova, I.M., Evtyukhov, K.N.: Nonlinear Optics of Silicon and Silicon Nanostructures, p. 544. Fizmatlit, Moscow (2012)
Bonch-Bruevich, A.M., Libenson, M.N., Makin, V.S., Trubaev, V.V.: Surface electromagnetic waves in optics. Opt. Eng. 31, 718–730 (1992)
Bonse, J., Kruger, J.: Pulse number dependence of laser-induced periodic surface structures for femtosecond laser irradiation of silicon. J. Appl. Phys. 108, 034903 (2010)
Bonse, J., Baudach, S., Kruger, J., Kautek, W., Lenzner, M.: Femtosecond laser ablation of silicon-modification thresholds and morphology. Appl. Phys. A 74, 19–25 (2002)
Bonse, J., Rosenfeld, A., Kruger, J.: On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses. J. Appl. Phys. 106, 104910 (2009)
Derrien, T.J.-Y., Kruger, J., Itina, T.E., Holm, S., Rosenfeld, A., Bonse, J.: Rippled area formed by surface plasmon polaritons upon femtosecond laser double-pulse irradiation of silicon. Opt. Express 21, 29643–29655 (2013)
Derrien, T.J-Y., Kruger J., Itina, T.E., Hohm, S., Rosenfeld, A. Bonse, J.: Rippled area formed by surface plasmon polaritons upon femtosecond laser double-pulse irradiation of silicon: the role of carrier generation and relaxation processes. Appl. Phys. A. 117, 77–81 (2014)
Guk, I.V., Shandybina, G.D., Yakovlev, E.B.: Influence of accumulation effects on heating of silicon surface by femtosecond laser pulses. Appl. Surf. Sci. 353, 851–855 (2015)
Gurevich, E.L.: On the influence of surface plasmon-polariton waves on pattern formation upon laser ablation. Appl. Surf. Sci. 278, 52–56 (2013)
Hohm, S., Herzlieb, M., Rosenfeld, A., Kruger, J., Bonse, J.: Femtosecond laser-induced periodic surface structures on silicon upon polarization controlled two-color double-pulse irradiation. Opt. Express 23, 61–71 (2015)
Kosobukin, V.A., Libenson, M.N., Rumyantsev, A.G.: Light excitation of cylindrical surface electromagnetic waves. Opt. Spectrosc. 65, 948–951 (1988)
Libenson, M.N., Rumyantsev, A.G.: Light excitation of cylindrical surface electromagnetic waves. Opt. Spectrosc. 60, 675–677 (1986)
Liu, J., Jia, X., Wu, W., Cheng, K., Feng, D., Zhang, S., Sun, Z., Jia, T.: Ultrafast imaging on the formation of periodic ripples on a Si surface with a prefabricated nanogroove induced by a single femtosecond laser pulse. Opt. Express 26, 6302–6315 (2018)
Martinez-Calderon, M., Manso-Silvan, M., Rodriguez, A., Gomez-Aranzadi, M., Garcia-Ruiz, J.P., Olaizola, S.M., Martin-Palma, R.J.: Surface micro- and nano-texturing of stainless steel by femtosecond laser for the control of cell migration. Sci. Rep. 6, 36296 (2016)
Műller, F., Kunz, C., Gräf, S.: Bio-inspired functional surfaces based on laser-induced periodic surface structures. Materials 9, 476 (2016)
Phillips, K.C., Gandhi, H.H., Mazur, E., Sundaram, S.K.: Ultrafast laser processing of materials: a review. Adv. Opt. Photonics 7, 684–712 (2015)
Polyakov, D.S., Yakovlev, E.B.: Influence of the effect of two-photon interband absorption saturation on the photoexcitation of monocrystalline Si by intense femtosecond laser pulse. Opt. Quantum Electron. 50, 235 (2018a)
Polyakov, D.S., Yakovlev, E.B.: Influence of Burstein–Moss effect on photoexcitation and heating of silicon by short and ultrashort laser pulses at wavelength 1.06 μm. Appl. Phys. A 124, 803 (2018b)
Shuleiko, D.V., Potemkin, F.V., Romanov, I.A., Parhomenko, I.N., Pavlikov, A.V., Presnov, D.E., Zabotnov, S.V., Kazanskii, A.G., Kashkarov, P.K.: Femtosecond laser pulse modification of amorphous silicon films: control of surface anisotropy. Laser Phys. Lett. 15, 056001 (2018)
Sipe, E.J., Young, J.F., Preston, J.S., van Driel, H.M.: Laser induced periodic surface structure. I. Theory. Phys. Rev. B. 2, 1141–1154 (1983)
Sokolowski-Tinten, K., von der Linde, D.: Generation of dense electron–hole plasmas in silicon. Phys. Rev. B 61, 2643–2650 (2000)
Straeten, K., Nottrodt, O., Zuric, M., Olowinsky, A., Abels, P., Gillner, A.: Polygon scanning system for high-power, high-speed microstructuring. Procedia CIRP. 74, 491–494 (2018)
Tull, B.R., Carey, J.E., Mazur, E., McDonald, J.P., Yalisove, S.M.: Silicon surface morphologies after femtosecond laser irradiation. MRS Bull. 31, 626–633 (2006)
Varlamova, O., Bounhalli, M., Reif, J.: Influence of irradiation dose on laser-induced surface nanostructures on silicon. Appl. Surf. Sci. 278, 62–66 (2013)
Veiko, V.P., Odintsova, G.V., Gazizova, M.Y., Karlagina, Y.Y., Manokhin, S.S., Yatsuk, R.M., Vasilkov, S.D., Kolobov, Y.R.: The influence of laser micro- and nanostructuring on the wear resistance of Grade-2 titanium surface. Laser Phys. 28, 086002 (2018)
Vercillo, V., Laroche, A., Mayèn Guillèn, J.A., Karpen, N., Jorge, R.A., Lasagni, A.F., Bonaccurso, E.: Analysis and modelling of icing of engines’ air intake protection grid structures and improvement of performances with surface laser patterning. In: Abstract of 19th International Symposium on Laser Precision Microfabrication Edinburgh, Scotland 85 (2018)
Vorobyev, A.Y., Guo, C.: Multifunctional surfaces produced by femtosecond laser pulses. J. Appl. Phys. 117, 033103 (2014)
Zhao, X., Shin, Y.C.: Ablation enhancement of silicon by ultrashort double-pulse laser ablation. Appl. Phys. Lett. 105, 111907 (2014)
Acknowledgements
The study was supported by RFBR Grant №18-32-00839. The authors are grateful to E. B. Yakovlev for helpful discussions.
Author information
Authors and Affiliations
Corresponding authors
Additional information
Publisher's Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
About this article
Cite this article
Kuzmin, E., Polyakov, D., Samokhvalov, A. et al. Cylindrical and plane surface electromagnetic waves in laser technology of silicon surface texturing with a double femtosecond pulse. Opt Quant Electron 51, 317 (2019). https://doi.org/10.1007/s11082-019-2035-1
Received:
Accepted:
Published:
DOI: https://doi.org/10.1007/s11082-019-2035-1