Abstract
Nanosphere lithography is an inexpensive method used to fabricate gold nanostructures on a substrate. Using dispersed-nanosphere lithography, in which the nanospheres are dispersed on a substrate, 2D or 3D nanostructures can be fabricated by obliquely depositing a gold film on the nanospheres and etching the gold film afterward. These nanostructures are tunable and acute, and are thus good emitting elements for the localized surface plasmon resonance applications. So far, for the fabrication of nanostructures on a substrate with dispersed nanospheres, only 2D nanostructures have been reported through perpendicular etching. We report in this paper that the 3D nanostructures fabricated by dispersed-nanosphere lithography are rigid non-conformal structures, and perpendicular gold etching can be expanded to oblique etching, which provides more possibilities for fabricating the gold nanostructures in various shapes. The profiles of gold nanostructures after several varying angle depositions, and their final profiles after perpendicular or oblique etching, are calculated in this paper. Our profile simulations are applicable for nanospheres (or microspheres) within the range of tens of nanometers to tens of micrometers, and are consistent with our fabricated nanostructures observed using scanning electron and atomic force microscopy.
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References
Aizpurua J, Hanarp P, Sutherland DS et al (2003) Optical properties of gold nanorings. Phys Rev Lett 90:057401. doi:10.1103/PhysRevLett.90.057401
Clark AW, Sheridan AK, Glidle A et al (2007) Tuneable visible resonances in crescent shaped nano-split-ring resonators. Appl Phys Lett 91:093109. doi:10.1063/1.2772180
Dirix Y, Bastiaansen C, Caseri W et al (1999) Oriented pearl-necklace arrays of metallic nanoparticles in polymers: a new route toward polarization-dependent color filters. Adv Mater 11:223–227. doi:10.1002/(SICI)1521-4095(199903)11:3<223::AID-ADMA223>3.0.CO;2-J
Freeman RG, Graber KC, Allison KJ et al (1995) Self-assembled metal colloid monolayers: an approach to SERS substrates. Science 267:1629–1632. doi:10.1126/science.267.5204.1629
Haes J, Stuart DA, Nie S et al (2004) Using solution-phase nanoparticles, surface-confined nanoparticle arrays and single nanoparticles as biological sensing platforms. J Fluoresc 14:335–367. doi:10.1023/B:JOFL.0000031817.35049.1f
Haynes CL, McFarland AD, Zhao L et al (2003) Nanoparticle optics: the importance of radiative dipole coupling in two-dimensional nanoparticle arrays. J Phys Chem B 107:7337–7342. doi:10.1021/jp034234r
Lu Y, Liu GL, Kim J et al (2005) Nanophotonic crescent moon structures with sharp edge for ultrasensitive biomolecular detection by local electromagnetic field enhancement effect. Nano Lett 5:119–124. doi:10.1021/nl048232+
Maier SA, Brongersma ML, Kik PG et al (2001) Plasmonics—a route to nanoscale optical devices. Adv Mater 13:1501–1505. doi:10.1002/1521-4095(200110)13:19<1501::AID-ADMA1501>3.0.CO;2-Z
Maier SA, Kik PG, Atwater HA et al (2003) Local detection of electromagnetic energy transport below the diffraction limit in metal nanoparticle plasmon waveguides. Nat Mater 2:229–232. doi:10.1038/nmat852
Ozbay E (2006) Plasmonics: merging photonics and electronics at nanoscale dimensions. Science 311:189–193. doi:10.1126/science.1114849
Papavassiliou GC (1979) Optical properties of small inorganic and organic metal particles. Prog Solid State Chem 12:185–271. doi:10.1016/0079-6786(79)90001-3
Pawar AB, Kretzschmar I (2008) Patchy particles by glancing angle deposition. Langmuir 24:355–358. doi:10.1021/la703005z
Rochholz H, Bocchlo N, Kreiter M (2007) Tuning resonances on crescent-shaped noble-metal nanoparticles. N J Phys 9(10):53. doi:10.1088/1367-2630/9/3/053
Shafer-Peltier KE, Haynes CL, Glucksberg MR et al (2003) Toward a glucose biosensor based on surface enhanced Raman scattering. J Am Chem Soc 125:588–593. doi:10.1021/ja028255v
Shelby RA, Smith DR, Schultz S (2001) Experimental verification of a negative index of refraction. Science 292:77–78. doi:10.1126/science.1058847
Shumaker-Parry JS, Rochholz H, Kreiter M (2005) Fabrication of crescent-shaped optical antennas. Adv Mater 17:2131–2134. doi:10.1002/adma.200500063
Wang D, Zhang G, Mohwald H (2006) Nanoembossment of Au patterns on microspheres. Chem Mater 18:3985–3992. doi:10.1021/cm060358f
Willets KA, Van Duyne RP (2007) Localized surface plasmon resonance spectroscopy and sensing. Annu Rev Phys Chem 58:267–297. doi:10.1146/annurev.physchem.58.032806.104607
Yang S-M, Jang SG, Choi D-G et al (2006) Nanomachining by colloidal lithography. Small 2:458–475. doi:10.1002/smll.200500390
Yonzon CR, Stuart DA, Zhang X et al (2005) Towards advanced chemical and biological nanosensors—an overview. Talanta 67:438–448. doi:10.1016/j.talanta.2005.06.039
Zhang G, Wang D, Mohwald H (2005) Patterning microsphere surfaces by templating colloidal crystals. Nano Lett 5:143–146. doi:10.1021/nl048121a
Zhang G, Wang D, Mohwald H (2007) Ordered binary arrays of Au nanoparticles derived from colloidal lithography. Nano Lett 7:127–132. doi:10.1021/nl062284c
Zhao J, Zhang X, Yonzon C et al (2006) Localized surface plasmon resonance biosensors. Nanomedicine 1:219–228. doi:10.2217/17435889.1.2.219
Acknowledgments
The authors gratefully appreciate the Institute of Materials Research and Engineering (IMRE) of Singapore A*STAR (Agency for Science, Technology and Research) for its financial support on the project “Localized Surface Plasmon Resonance (LSPR) MEMS device with nano-structured noble metal.”
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Zhou, X., Knoll, W., Zhang, N. et al. Profile calculation of gold nanostructures by dispersed-nanosphere lithography through oblique etching for LSPR applications. J Nanopart Res 11, 1065–1074 (2009). https://doi.org/10.1007/s11051-008-9508-7
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DOI: https://doi.org/10.1007/s11051-008-9508-7