Skip to main content
Log in

Use of Information Redundancy in Optical Digital Measurement Systems with 2D Sensor

  • Published:
Measurement Techniques Aims and scope

A unified approach to the management of measurements in optical digital measurement systems with 2D sensor is considered. The proposed approach is based on exhaustive use of information redundancy, that is, the use of coordinate information about the object distributed over the entire field of the image. The efficiency of the approach is demonstrated for the case of autocollimators. Results of simulation and experiment that confirm that the precision of devices may be increased through the use of a multi-element mark and coordinate information over the entire information field are presented. The basic problems that arise in the development and introduction of the approach are formulated.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Fig. 1.
Fig. 2.
Fig. 3.

Similar content being viewed by others

References

  1. A. B. Bel’skii, M. Gan, I. Mironov, and R. P. Seysyan, “Outlook for the development of optical systems for nanolithography,” Opt. Zh., 76, No. 8, 59–69 (2009).

    Google Scholar 

  2. A. N. Korolev and A. I. Gartsuev, “A study of the positioning precision of an image in a CCD array,” Izmer. Tekhn., No. 5, 20–22 (2004).

  3. R. Geckeler, M. Krause, A. Just, et al., “New frontiers in angle metrology at the PTB,” Measurement, 73, 231–238 (2015).

    Article  Google Scholar 

  4. Z. Chen and P. S. Huang, “A vision-based method for planar position measurement,” Meas. Sci. Tech., No. 27, 125018 (2016).

  5. T. Suzuki, T. Endo, O. Sasaki, and J. E. Greivenkamp, “Two-dimensional small-rotation-angle measurement using an imaging method,” Opt. Eng., No. 45 (4), 043604 (2006).

  6. C. J. Hsu, M. Lu, and Y. Lu, “Distance and angle measurement of objects on an oblique plane based on pixel number variation of CCD images,” IEEE Trans. Inst. Meas., 60, No. 5, 1779–1794 (2011).

    Article  Google Scholar 

  7. C. Feng, M. Kajima, S. Gonda, et al., “Accurate measurement of orthogonality of equal-period, two-dimensional gratings by an interferometric method,” Opt. Zh., 76, No. 10, 42–47 (2009).

    Google Scholar 

  8. A. N. Korolev, A. I. Gartsuev, G. S. Polishchuk, and V. P. Tregub, “Digital two-coordinate autocollimator,” Opt. Zh., 76, No. 10, 42–47 (2009).

    Google Scholar 

  9. A. N. Korolev, A. I. Gartsuev, G. S. Polishchuk, and V. P. Tregub, “Metrological studies and the choice of the form of the optical mark in digital measurement systems,” Opt. Zh., 77, No. 6, 25–27 (2010).

    Google Scholar 

  10. N. V. Goncharov, “Survey of modern angle-measurement technology,” Fotonika, No. 1, 64–72 (2014).

  11. Ye. N. Kharitonova, “Determination of the optimal form and size of the mark of a digital autocollimator,” Izmer. Tekhn., No. 5, 22–25 (2011).

  12. R. Geckeler, A. Just, M. Krause, and V. V. Yashchuck, “Autocollimators for deflectometry: Current status and future progress,” Nucl. Instrum. Meth. Phys. Res., Sect. A, 616, 140–146 (2010).

  13. A. N. Korolev, A. Ya. Lukin, and G. S. Polishchuk, “A new concept of angle measurement: model and experimental studies,” Opt. Zh., 79, No. 6, 52–58 (2012).

  14. B. J. Eves, “The NRS autocollimator calibration facility,” Metrologia, 50, 433–440 (2013).

    Article  ADS  Google Scholar 

  15. N. Korolev, A. Ya. Lukin, G. S. Polishchuk, and V. P. Tregub, “An optical digital automated device that measures the deviations from rectilinearity,” Opt. Zh., 80, No. 9, 45–50 (2013).

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to A. N. Korolev.

Additional information

Translated from Izmeritel’naya Tekhnika, No. 3, pp. 29–33, March, 2017.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Korolev, A.N., Lukin, A.Y. & Polishchuk, G.S. Use of Information Redundancy in Optical Digital Measurement Systems with 2D Sensor. Meas Tech 60, 242–247 (2017). https://doi.org/10.1007/s11018-017-1180-9

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11018-017-1180-9

Keywords

Navigation