A unified approach to the management of measurements in optical digital measurement systems with 2D sensor is considered. The proposed approach is based on exhaustive use of information redundancy, that is, the use of coordinate information about the object distributed over the entire field of the image. The efficiency of the approach is demonstrated for the case of autocollimators. Results of simulation and experiment that confirm that the precision of devices may be increased through the use of a multi-element mark and coordinate information over the entire information field are presented. The basic problems that arise in the development and introduction of the approach are formulated.
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References
A. B. Bel’skii, M. Gan, I. Mironov, and R. P. Seysyan, “Outlook for the development of optical systems for nanolithography,” Opt. Zh., 76, No. 8, 59–69 (2009).
A. N. Korolev and A. I. Gartsuev, “A study of the positioning precision of an image in a CCD array,” Izmer. Tekhn., No. 5, 20–22 (2004).
R. Geckeler, M. Krause, A. Just, et al., “New frontiers in angle metrology at the PTB,” Measurement, 73, 231–238 (2015).
Z. Chen and P. S. Huang, “A vision-based method for planar position measurement,” Meas. Sci. Tech., No. 27, 125018 (2016).
T. Suzuki, T. Endo, O. Sasaki, and J. E. Greivenkamp, “Two-dimensional small-rotation-angle measurement using an imaging method,” Opt. Eng., No. 45 (4), 043604 (2006).
C. J. Hsu, M. Lu, and Y. Lu, “Distance and angle measurement of objects on an oblique plane based on pixel number variation of CCD images,” IEEE Trans. Inst. Meas., 60, No. 5, 1779–1794 (2011).
C. Feng, M. Kajima, S. Gonda, et al., “Accurate measurement of orthogonality of equal-period, two-dimensional gratings by an interferometric method,” Opt. Zh., 76, No. 10, 42–47 (2009).
A. N. Korolev, A. I. Gartsuev, G. S. Polishchuk, and V. P. Tregub, “Digital two-coordinate autocollimator,” Opt. Zh., 76, No. 10, 42–47 (2009).
A. N. Korolev, A. I. Gartsuev, G. S. Polishchuk, and V. P. Tregub, “Metrological studies and the choice of the form of the optical mark in digital measurement systems,” Opt. Zh., 77, No. 6, 25–27 (2010).
N. V. Goncharov, “Survey of modern angle-measurement technology,” Fotonika, No. 1, 64–72 (2014).
Ye. N. Kharitonova, “Determination of the optimal form and size of the mark of a digital autocollimator,” Izmer. Tekhn., No. 5, 22–25 (2011).
R. Geckeler, A. Just, M. Krause, and V. V. Yashchuck, “Autocollimators for deflectometry: Current status and future progress,” Nucl. Instrum. Meth. Phys. Res., Sect. A, 616, 140–146 (2010).
A. N. Korolev, A. Ya. Lukin, and G. S. Polishchuk, “A new concept of angle measurement: model and experimental studies,” Opt. Zh., 79, No. 6, 52–58 (2012).
B. J. Eves, “The NRS autocollimator calibration facility,” Metrologia, 50, 433–440 (2013).
N. Korolev, A. Ya. Lukin, G. S. Polishchuk, and V. P. Tregub, “An optical digital automated device that measures the deviations from rectilinearity,” Opt. Zh., 80, No. 9, 45–50 (2013).
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Translated from Izmeritel’naya Tekhnika, No. 3, pp. 29–33, March, 2017.
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Korolev, A.N., Lukin, A.Y. & Polishchuk, G.S. Use of Information Redundancy in Optical Digital Measurement Systems with 2D Sensor. Meas Tech 60, 242–247 (2017). https://doi.org/10.1007/s11018-017-1180-9
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DOI: https://doi.org/10.1007/s11018-017-1180-9