A high precision system for monitoring the thicknesses of the layers of multilayer dielectric coatings over a wide spectral range has been constructed. An example of the use of the system to construct an antireflection coating with a maximum reflection coefficient of 0.15% in the 400 – 660 nm spectral range on VU-2M vacuum equipment is presented.
Similar content being viewed by others
References
B. Badoil et al., “Manufacturing of an absorbing filter controlled by a broadband optical monitoring,” OSA. Opt. Express, 16. No. 16, 12008-12017 (2008).
S. Wilbrandt et al., “In-situ broadband monitoring and characterization of optical coatings,” OSA. Opt. Interference Coat. (2004).
V. A. Labusov et al., “The Kolibri multichannel spectrometer and its use for the simultaneous determination of alkali and alkali-earth metals by the plasma photometry method,” Zavod. Lab. Diagn. Mater., 73, No. S. C., 35-39 (2007).
A. V. Tikhonravov and M. K. Trubetskov, “Computational manufacturing as a bridge between design and production,” OSA. Appl. Opt., 44, No. 32, 6877-6884 (2005).
The OptiLayer Thin Film Software Package, www.optilayer.com, accessed May 23, 2013.
U. Schulz, “Wideband antireflection coatings by combining interference multilayers with structured top layers,” OSA. Opt. Express, 17, No. 11, 8704-8708 (2009).
Author information
Authors and Affiliations
Corresponding author
Additional information
Translated from Izmeritel’naya Tekhnika, No. 12, pp. 11–14, December, 2013.
Rights and permissions
About this article
Cite this article
Labusov, V.A., Semenov, Z.V., Zarubin, I.A. et al. A System for the Spectral Monitoring of the Deposition of Multilayer Dielectric Coatings. Meas Tech 56, 1327–1332 (2014). https://doi.org/10.1007/s11018-014-0376-5
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s11018-014-0376-5