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IR Spectroscopy and Raman Spectroscopy for Controlling and Investigating Thin-Film Coatings

  • Proceedings of the XII International Scientific School-Seminar “Fundamental Research and Innovation: Nanooptics, Photonics, and Coherent Spectroscopy”
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Bulletin of the Russian Academy of Sciences: Physics Aims and scope

Abstract

Vibrational spectroscopy is used to characterize inorganic solid, superhard, and anticorrosive thin-film coatings prepared via magnetron sputtering and surface chemical reactions. The most detailed and correct information on the parameters of the dielectric function of coatings can be obtained from the frequency angular spectra of phonon polaritons. Optical characteristics of coatings are considered using examples of SiOxNy and SiOx films grown on steel and silicon substrates.

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Authors and Affiliations

  1. Institute of Spectroscopy, Russian Academy of Sciences, Troitsk, Moscow oblast, 108840, Russia

    E. A. Vinogradov

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  1. E. A. Vinogradov
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Correspondence to E. A. Vinogradov.

Additional information

Original Russian Text © E.A. Vinogradov, 2018, published in Izvestiya Rossiiskoi Akademii Nauk, Seriya Fizicheskaya, 2018, Vol. 82, No. 8, pp. 1097–1101.

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Vinogradov, E.A. IR Spectroscopy and Raman Spectroscopy for Controlling and Investigating Thin-Film Coatings. Bull. Russ. Acad. Sci. Phys. 82, 993–997 (2018). https://doi.org/10.3103/S1062873818080427

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  • DOI: https://doi.org/10.3103/S1062873818080427

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