Skip to main content
SpringerLink
Log in

Standard sample for calibration of transmission electron microscopes nanometrology

  • Nanometrology
  • Published:
Measurement Techniques Aims and scope

A prototype standard sample GSO 10030-2011 for the stepped parameters of thin layers of single crystal silicon is developed and certified. It is intended for calibration of transmission electron microscopes at magnifications of 1000–1,500,000×. The certified parameters are the step size of the stepped structure and the distance between the (111) planes of the single crystal silicon in this material. Both parameters are independently traceable to the unit of length, the meter.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3

Similar content being viewed by others

References

  1. L. M. Utevskii, Diffraction Electron Microscopy in Metallurgy [in Russian], Metallurgiya, Moscow (1973).

    Google Scholar 

  2. D. Williams and C. Carter, Transmission Electron Microscopy: A Textbook for Materials Science, Springer Science + Business Media, NY (2009).

  3. Yu. A. Novikov et al., “Linear gauge in the micrometer and nanometer ranges for scanning electron and atomic-force microscopy,” in: Trudy IOFAN (2006), Vol. 62, pp. 36–76.

  4. NIST 2008 SRM 2000, Calibration Standard for High-Resolution x-Ray Diffraction, pp. 1–11.

  5. GOST R 8.631-2007, GSI. Electron Measurement Microscopes. Verification Technique.

  6. GOST R 8.629-2007, GSI. Relief Gauges in the Nanometer Range with Trapezoidal Element Profiles. Verification Technique.

Download references

Author information

Authors and Affiliations

  1. Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV), Moscow, Russia

    D. S. Bodunov, V. P. Gavrilenko, A. Yu. Kuzin, V. B. Mityukhlyaev, A. V. Rakov & P. A. Todua

  2. Moscow Institute of Physics and Technology (MFTI), Dolgoprudnyi, Russia

    A. V. Zablotskii & A. A. Kuzin

  3. Kurnakov Institute of General and Inorganic Chemistry, Russian Academy of Sciences (IONKh RAN), Moscow, Russia

    M. N. Filippov

Authors
  1. D. S. Bodunov
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. V. P. Gavrilenko
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. A. V. Zablotskii
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. A. A. Kuzin
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. A. Yu. Kuzin
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. V. B. Mityukhlyaev
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. A. V. Rakov
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. P. A. Todua
    View author publications

    You can also search for this author in PubMed Google Scholar

  9. M. N. Filippov
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to V. P. Gavrilenko.

Additional information

Translated from Izmeritel’naya Tekhnika, No. 10, pp. 16–18, October, 2012.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Bodunov, D.S., Gavrilenko, V.P., Zablotskii, A.V. et al. Standard sample for calibration of transmission electron microscopes nanometrology. Meas Tech 55, 1137–1140 (2013). https://doi.org/10.1007/s11018-012-0098-5

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11018-012-0098-5

Keywords

Search

Navigation