Skip to main content
SpringerLink
Log in

Numerical simulation of optical profile restoration procedure with scattering of radiation by nanostructures

  • Nanometrology
  • Published:
Measurement Techniques Aims and scope

Numerical simulation of the profile restoration procedure for an optical surface with scattering of radiation by nanostructures of the type of single grooves or single protrusions as well as that of a periodic “comb-like” profile is performed. A comparison of the results of the simulation with observation data obtained with the use of a modified interference microscope (micro-interferometer) is performed. The effectiveness of numerical simulation of these procedures is confirmed.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. M. Totzeck and H. J. Tiziano, “Interference microscopy of sub-lambda structures. A rigorous computation method and measurements,” Opt. Comm., 136, 61 (1997).

    Article  ADS  Google Scholar 

  2. M. Totzeck and H. J. Tiziano, “Phase singularities in 2D diffraction fields and interference microscopy,” Opt. Comm., 138, 365 (1997).

    Article  ADS  Google Scholar 

  3. K. Hornik, M. Stinchcombe, and H. White, “Multilayer feedforward networks are universal approximators,” Neural Networks, 2, 259 (1989).

    Article  Google Scholar 

  4. G. N. Vishnyakov and G. G. Levin, “Linnik topographic microscope for investigation of optically transparent objects,” Izmer. Tekhn., No. 10, 18 (1998); Measur. Techn., 41, No. 10, 906 (1998).

  5. Y. Surrel, “Design of algorithms for phase measurements by the use of phase stepping,” Appl. Opt., 35, No. 1, 51 (1996).

    Article  ADS  Google Scholar 

  6. G. G. Levin et al., “Simulation of processes involved in scattering of optical radiation by nano-dimensional structures,” Metrologiya, No. 12, 7 (2009).

  7. Ya. A. Ilyushin et al., “Simulation of processes involved in scattering of optical radiation by nano-dimensional objects with finite dielectric permittivity and conductivity,” Metrologiya, No. 1, 10 (2010).

Download references

Author information

Authors and Affiliations

  1. Lomonosov Moscow State University, Moscow, Russia

    Ya. A. Ilyushin

  2. All-Russia Research Institute of Optophysical Measurements (VNIIOFI), Moscow, Russia

    A. G. Lomakin & G. G. Levin

  3. All-Russia Research Institute of Metrological Service (VNIIMS), Moscow, Russia

    S. Yu. Zolotarevskii & S. A. Kononogov

Authors
  1. Ya. A. Ilyushin
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. A. G. Lomakin
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. S. Yu. Zolotarevskii
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. G. G. Levin
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. S. A. Kononogov
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Ya. A. Ilyushin.

Additional information

Translated from Metrologiya, No. 2, pp. 3–12, February, 2010.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Ilyushin, Y.A., Lomakin, A.G., Zolotarevskii, S.Y. et al. Numerical simulation of optical profile restoration procedure with scattering of radiation by nanostructures. Meas Tech 53, 251–256 (2010). https://doi.org/10.1007/s11018-010-9491-0

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11018-010-9491-0

Key words

Search

Navigation