Skip to main content
SpringerLink
Log in

Approximation of elastic deformations on the surface of a silicon piezoresistive pressure transducer with three-dimensional E-type micromechanical structure

  • Published:
Measurement Techniques Aims and scope

    We’re sorry, something doesn't seem to be working properly.

    Please try refreshing the page. If that doesn't work, please contact support so we can address the problem.

Approximation expressions for use in calculating tangential deformations on the surface of an E-type silicon piezoresistive membrane pressure transducer with three-dimensional micromechanical structure under actual operating conditions of a permanent joint and restraint by means of a supporting element are obtained.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. V. I. Vaganov, Integral Strain Transducers [in Russian], Energoatomizdat, Moscow (1983).

    Google Scholar 

  2. L. E. Andreeva, Elastic Elements of Devices [in Russian], Mashgiz, Moscow (1962).

    Google Scholar 

  3. L. V. Sokolov and V. M. Shkol’nikov, Mikrosist. Tekhn., No. 12, 3 (2001)

    Google Scholar 

  4. L. V. Sokolov and V. M. Shkol’nikov, Mikrosist. Tekhn., No. 3, 3 (2003).

  5. N. S. Bakhvalov, N. P. Zhidkov, and G. M. Kobel’kov, Numerical Methods [in Russian], Nauka, Moscow (1987).

    MATH  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Research Institute of Aviation Equipment, Zhukovskii, Russia

    L. V. Sokolov

  2. Lenin Ivanovo State Power Engineering University, Ivanovo, Russia

    N. A. Agafonova & Yu. V. Naumov

Authors
  1. L. V. Sokolov
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. N. A. Agafonova
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Yu. V. Naumov
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to L. V. Sokolov.

Additional information

Translated from Izmeritel’naya Tekhnika, No. 3, pp. 36–39, March, 2009.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Sokolov, L.V., Agafonova, N.A. & Naumov, Y.V. Approximation of elastic deformations on the surface of a silicon piezoresistive pressure transducer with three-dimensional E-type micromechanical structure. Meas Tech 52, 277–281 (2009). https://doi.org/10.1007/s11018-009-9252-0

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11018-009-9252-0

Key words

Search

Navigation