New measurement methods and measurement instrumentation with resolution of 0.1 nm are developed that make it possible to achieve objective reliable estimation of the influence that deformations exert on the accuracy with which precision parts are monitored in the nanometric range and to determine the parameters of these deformations.
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Translated from Izmeritel’naya Tekhnika, No. 12, pp. 6–10, December, 2008.
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Kainer, G.B. New methods for estimating deformations in measurement of the linear parameters of precision parts in the nanometric range. Meas Tech 51, 1262–1268 (2008). https://doi.org/10.1007/s11018-009-9198-2
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DOI: https://doi.org/10.1007/s11018-009-9198-2