The ozone-sensitive properties of two types of semiconductor NiO gas sensors having different widths of the active layer are investigated. Their calibration characteristics for ozone concentrations of 0–300 ppb and different temperature ranges are obtained. Sensors with a thin NiO layer showed good operating capability for ozone concentrations of up to tens of ppm. The results of parallel operation of the sensors as the active elements of a model of an ozone meter and a series analyzer of ozone confirmed the possibility of using them in ozone-measuring apparatus.
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Translated from Izmeritel'naya Tekhnika, No. 9, pp. 67–71, September, 2008.
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Demin, V.S., Krasovskii, A.N., Lyudchik, A.M. et al. Measurement of ozone over a wide range of concentrations using semiconductor NiO gas sensors. Meas Tech 51, 1038–1044 (2008). https://doi.org/10.1007/s11018-008-9149-3
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DOI: https://doi.org/10.1007/s11018-008-9149-3