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Gas-sensitive properties of thin nickel oxide films

  • Inorganic Synthesis and Industrial Inorganic Chemistry
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Abstract

The results of a study of the gas-sensitive properties of nickel oxide layers with respect to n-hexane, acetone, ethanol, benzene, o-xylene, toluene and ammonia are presented. NiO layers 100 ± 5 nm thick were obtained by chemical vapor deposition in the systems (EtCp)2Ni–О2–Ar and (EtCp)2Ni–О3–О2–Ar. The electrical resistance of the layers changes in the presence of hexane, ethanol, benzene, and ammonia vapors. The electrical resistance of the obtained layers changed in the presence of vapors of hexane, ethanol, benzene and ammonia. Response and recovery time of the sensing element of the gas sensors did not exceed 6 s in the temperature range 500–600 K.

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Authors and Affiliations

  1. Peter the Great St. Petersburg Polytechnic University, ul. Politekhnicheskaya 29, St. Petersburg, 195251, Russia

    A. S. Kondrateva, P. G. Bespalova, L. A. Filatov & S. E. Alexandrov

  2. Ioffe Institute, ul. Politekhnicheskaya 26, St. Petersburg, 194021, Russia

    E. M. Tanklevskaya & S. I. Pavlov

Authors
  1. A. S. Kondrateva
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  2. P. G. Bespalova
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  3. L. A. Filatov
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  4. E. M. Tanklevskaya
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  5. S. I. Pavlov
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  6. S. E. Alexandrov
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Corresponding author

Correspondence to A. S. Kondrateva.

Additional information

Original Russian Text © A.S. Kondrateva, P.G. Bespalova, L.A. Filatov, E.M. Tanklevskaya, S.I. Pavlov, S.E. Alexandrov, 2017, published in Zhurnal Prikladnoi Khimii, 2017, Vol. 90, No. 6, pp. 689−695.

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Kondrateva, A.S., Bespalova, P.G., Filatov, L.A. et al. Gas-sensitive properties of thin nickel oxide films. Russ J Appl Chem 90, 846–852 (2017). https://doi.org/10.1134/S1070427217060039

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  • DOI: https://doi.org/10.1134/S1070427217060039

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