Abstract
A microstrip sensor on coplanar comb structures with capacitive connectors is analyzed. It is shown that it is possible to use such a sensor as part of radio-wave transducers to measure and monitor the gaps or metallization thickness on dielectric substrates.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
A. A. Elizarov and Yu. N. Pchel’nikov, Radio-Wave Components of Technological Instruments and Devices Using Electrodynamic Slow-Wave Systems [in Russian], Radio i Svyaz’, Moscow (2002).
Yu. N. Pchel’nikov and A. A. Yelizarov, Proc. SPIE Microelectronic Manufacturing Symposium, Santa Clara (CA, USA), No. 3507-25, (1998).
Yu. N. Pchel’nikov, A. N. Vinogradov, and A. G. Pchel’nikov, Radiotekh. Élektron., 42, No.3, 267 (1997).
E. I. Nefedov and A. T. Fialkovskii, Strip Transmission Lines [in Russian], Nauka, Moscow (1980).
Yu. N. Pchel’nikov, E. V. Zykova, and N. E. Ivanova, Radiotekhnika i Elektronika, 25, No. 6, 1231 (1980).
Yu. N. Pchel’nikov et al., Proceedings of the LX-th Scientific Session Dedicated to Radio Day, Moscow 2, 175 (2005).
Additional information
__________
Translated from Izmeritel’naya Tekhnika, No. 12, pp. 50–52, December 2005.
Rights and permissions
About this article
Cite this article
Pchel’nikov, Y.N., Elizarov, A.A. & Lebedeva, T.A. Investigation of a microstrip sensor on coplanar comb structures with capacitive connectors. Meas Tech 48, 1222–1226 (2005). https://doi.org/10.1007/s11018-006-0049-0
Received:
Issue Date:
DOI: https://doi.org/10.1007/s11018-006-0049-0