Skip to main content
SpringerLink
Log in

Surface sol–gel synthesis of silica films on polyimide substrate

  • Original Paper
  • Published:
Journal of Sol-Gel Science and Technology Aims and scope Submit manuscript

Abstract

Silica films were grown on polyimide substrate using surface sol–gel reaction, and the film growth process was characterized by ellipsometry, atomic force microscopy, and X-ray photoelectron spectroscopy. On the activated polyimide surface, silica film was grown by sequential immersion in SiCl4 solution and H2O. The thickness of silica films is linear with the depositing cycle, about 5.0 nm per cycle. The silica films present an island-like growth type and are not a strict equilibrium SiO2 structure. Moreover, the result of the tensile test suggests that the silica films have a good adhesion to the polyimide substrate.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5

Similar content being viewed by others

References

  1. Marshall JM, Kirov N, Vavrek A (1994) Electronic, optoelectronic and magnetic thin films. Wiley, New York

    Google Scholar 

  2. Wu YY, Li BS, Wang CQ (2005) Equip Electron Prod Manuf 125:6–17

    Google Scholar 

  3. Kovtyukhova NI, Buzaneva EV, Waraksa CC et al (2000) Chem Mater 12:383–389

    Article  CAS  Google Scholar 

  4. Ichinose I, Senzu H, Kunitake T (1996) Chem Lett 25:831–834

    Article  Google Scholar 

  5. Ichinose I, Senzu H, Kunitake T (1997) Chem Mater 9:1296–1298

    Article  CAS  Google Scholar 

  6. Nicolau YF, Menard JC (1992) Colloids Surf 63:83–92

    Article  Google Scholar 

  7. Takaki R, Takemoto H, Fujikawa S et al (2008) Colloids Surf A Physicochem Eng Aspects 321:227–232

    Article  CAS  Google Scholar 

  8. Yan W, Mahurin SM, Overbury SH et al (2005) Chem Mater 17:1923–1925

    Article  CAS  Google Scholar 

  9. Yan W, Chen B, Mahurin SM et al (2004) J Phys Chem B 108:2793–2796

    Article  CAS  Google Scholar 

  10. Houng MP, Huang CJ, Wang YH et al (1997) J Appl Phys 82:5788–5792

    Article  CAS  Google Scholar 

  11. Huang CJ, Houng MP, Wang YH et al (1999) J Appl Phys 86:7151–7155

    Article  CAS  Google Scholar 

  12. Fang M, Kim CH, Martin BR et al (1999) J Nanopart Res 1:43–49

    Article  CAS  Google Scholar 

  13. Gong YP, Li AD, Zhao C et al (2010) Microelectron Eng 87:1756–1759

    Article  CAS  Google Scholar 

  14. Zhang X, Wu YY, He SY (2010) Hebei J Ind Sci Technol 27:149–152

    CAS  Google Scholar 

  15. Seah MP, Dench WA (1979) Surf Interface Anal 1:2–11

    Article  CAS  Google Scholar 

  16. Wagner CD, Naumkin AV, Kraut-Vass A et al NIST Standard Reference Database 20, Version 3.4 (Web Version)

  17. Mirley CL, Koberstein JT (1995) Langmuir 11:1049–1052

    Article  CAS  Google Scholar 

  18. Takeda S, Fukawa M, Hayashi Y et al (1999) Thin Solid Films 339:220–224

    Article  CAS  Google Scholar 

  19. Stec WJ, Morgan WE, Albridge RG et al (1972) Inorg Chem 11:219–225

    Article  CAS  Google Scholar 

  20. Andersons J, Leterrier Y, Tornare G et al (2007) Mech Mater 39:834–844

    Article  Google Scholar 

  21. Kozuka H, Takenaka S, Tokita H et al (2003) J Sol-Gel Sci Technol 26:681–686

    Article  CAS  Google Scholar 

  22. Li HB, Sharma RK, Zhang Y et al (2003) Langmuir 19:6845–6850

    Article  CAS  Google Scholar 

  23. Teshima K, Inoue Y, Sugimura H et al (2002) Thin Solid Films 420/421:324–329

    Article  Google Scholar 

  24. Erlat AG, Spontak RJ (1999) J Phys Chem B 103:6047–6055

    Article  CAS  Google Scholar 

  25. Kim D, Shen YR (1999) Appl Phys Lett 74:3314–3316

    Article  CAS  Google Scholar 

  26. Stoffel NC, Hsieh M, Chandra S et al (1996) Chem Mater 8:1035–1041

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. College of Materials Science and Engineering, Hebei University of Science and Technology, Shijiazhuang, 050018, People’s Republic of China

    Xin Zhang, Lei Mao & Jing Ma

Authors
  1. Xin Zhang
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Lei Mao
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Jing Ma
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Xin Zhang.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Zhang, X., Mao, L. & Ma, J. Surface sol–gel synthesis of silica films on polyimide substrate. J Sol-Gel Sci Technol 61, 34–38 (2012). https://doi.org/10.1007/s10971-011-2586-5

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10971-011-2586-5

Keywords

Search

Navigation