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Fabrication of Ternary Phase Composition-Spread Thin Film Libraries and Their High-Throughput Characterization: Ti1− x − y Zr x Hf y O2 for Bandgap Engineering

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Abstract

Ternary phase composition-spread thin film libraries, TiO2-ZrO2-HfO2, were synthesized by using a combinatorial pulsed laser deposition system. The composition, crystalline structure, and optical transmission properties were characterized in a high-throughput way. TiO2 doped with Zr and Hf was found to exhibit a wider bandgap than pure TiO2; hence, these compounds can be used as wide gap semiconductors for heteroepitaxial spintronics devices, based on a ferromagnetic semiconductor, Co-doped TiO2.

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Authors and Affiliations

  1. Institute for Materials Research, Tohoku University, Sendai, 980-8577, Japan

    Y. Yamada, T. Fukumura, M. Ikeda, M. Ohtani, H. Toyosaki, A. Ohtomo & M. Kawasaki

  2. Japan Science and Technology Agency, Kawaguchi, 332-0012, Japan

    A. Ohtomo

  3. Research Institute of Electrical Communication, Tohoku University, Sendai, 980-8577, Japan

    F. Matsukura & H. Ohno

  4. Combinatorial Materials Exploration and Technology, National Institute for Materials Science, Tsukuba, 305-0044, Japan

    M. Kawasaki

Authors
  1. Y. Yamada
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  2. T. Fukumura
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  3. M. Ikeda
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  4. M. Ohtani
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  5. H. Toyosaki
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  6. A. Ohtomo
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  7. F. Matsukura
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  8. H. Ohno
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  9. M. Kawasaki
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Yamada, Y., Fukumura, T., Ikeda, M. et al. Fabrication of Ternary Phase Composition-Spread Thin Film Libraries and Their High-Throughput Characterization: Ti1− x − y Zr x Hf y O2 for Bandgap Engineering. J Supercond 18, 109–113 (2005). https://doi.org/10.1007/s10948-005-2160-x

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  • DOI: https://doi.org/10.1007/s10948-005-2160-x

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