Abstract
The paper gives definitions of conventional terms related to silicon surface science, such as surface, surfaced phase, adatoms, “in phase” and “on phase” atoms. The formation methods of surface phases are illustrated as well as their role in physical processes on the surface. The influence of surface phases on diffusion, desorption, adsorption, and phase interface formation at the silicon surface is described.
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Original Russian Text Copyright © 2004 by V. G. Lifshits, B. K. Churusov, Yu. L. Gavrilyuk, N. Enebish, V. G. Kotlyar, S. V. Kuznetsova, S. V. Ryzhkov, and D. A. Tsukanov
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Translated from Zhurnal Strukturnoi Khimii, Vol. 45, Supplement, pp. 37–60, 2004.
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Lifshits, V.G., Churusov, B.K., Gavrilyuk, Y.L. et al. Surface phases and nanostructures on silicon surface. J Struct Chem 45 (Suppl 1), S36–S59 (2004). https://doi.org/10.1007/s10947-006-0094-1
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DOI: https://doi.org/10.1007/s10947-006-0094-1