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Synthesis of Diamond-Like Carbon Films on Si Substrate with Different Filling Gases Using a Novel Miniature Dense Plasma Focus Device

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Abstract

A low energy (60 J) miniature plasma focus with novel configuration was used to deposit diamond-like carbon films at room temperature on Si (1 0 0) substrates. The samples were deposited using 200 numbers of shots, and at off-center position with argon and methane as filling gases. The structure of deposited films are determined by X-ray diffractometry (XRD), surface morphology by scanning electron microscopy (SEM), component bonds by Raman spectroscopy and elemental composition by energy dispersive X-ray (EDX) analysis. The XRD data showed that the samples had only diffraction peaks related to SiO2 and there were no observable peaks related to carbon. SEM micrographs showed uniformly distributed film with small nanoparticles. Raman spectroscopy verified the formation of amorphous carbon with D and G peaks. The D and G peak positions along with change in intensity ratio (ID/IG) in the samples prepared with different filling gases were investigated. The EDX spectra showed the presence of expected constituent elements.

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Authors and Affiliations

  1. Faculty of Physics, Sahand University of Technology, 51335-1996, Tabriz, Iran

    M. A. Nalbandzadeh & E. Ghareshabani

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  1. M. A. Nalbandzadeh
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  2. E. Ghareshabani
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Correspondence to E. Ghareshabani.

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Nalbandzadeh, M.A., Ghareshabani, E. Synthesis of Diamond-Like Carbon Films on Si Substrate with Different Filling Gases Using a Novel Miniature Dense Plasma Focus Device. J Fusion Energ 34, 152–157 (2015). https://doi.org/10.1007/s10894-014-9775-5

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