Abstract
The γ-ray total dose radiation effects on HfO2-based ferroelectric thin-film memories with various configurations were investigated. Electrical characteristics such as I–V, P–V, C–V, εr–f, and fatigue properties of different capping electrodes, and diverse substrates of HfO2-based ferroelectric thin films were quantified before and after the radiation. It was found from I–V characteristics of all configurations that I increases with the voltage in the range of 0 to the forward coercive voltage (Vc+), then it exhibited a reduction above Vc+, after a dose of 1 Mrad (Si), which indicated a weakened built-in electric field or a decreased depolarization field was induced by the ionizing radiation. The P–V and C–V of all the configurations displayed a decrease after the radiation tests due to an enhanced pinned effect of switchable domains. The attenuation in εr–f curves further certified the enhanced pinned effect of such configurations. A competitive relationship between the enhanced pinned effect and weakened built-in electric field was proposed to explain the performance evolution during the ionizing radiation. This work will be useful to better understand the radiation mechanism of HfO2-based ferroelectric thin-film memories.
Similar content being viewed by others
Data availability
The data that support the findings of this study are available from the corresponding author upon reasonable request. The data that support the findings of this study are available within the article and its supplementary material.
References
J.S. Meena, S.M. Sze, U. Chand et al., Overview of emerging nonvolatile memory technologies. Nanoscale Res. Lett. 9(1), 526 (2014)
Z. Z.Fan, J. Chen, J. Wang, Ferroelectric HfO2-based materials for next-generation ferroelectric memories. J. Adv. Dielect. 6, 1630003 (2016)
S.S. Cheema, D. Kwon, N. Shanker et al., Enhanced ferroelectricity in ultrathin films grown directly on silicon. Nature. 580, 478–482 (2020)
M. Hoffmann, F.P.G. Fengler, M. Herzig et al., Unveiling the double-well energy landscape in a ferroelectric layer. Nature. 565, 464–467 (2020)
A.I. Khan, A. Keshavarzi, S. Datta, The future of ferroelectric field-effect transistor technology. Nat. Electron. 3, 588–597 (2020)
M.H. Park, T. Schenk, M. Hoffmann et al., Effect of acceptor doping on phase transitions of HfO2 thin films for energy related applications. Nano Energy. 36, 381–389 (2017)
M. Ghatge, G. Walters, T. Nishida et al., An ultrathin integrated nanoelectromechanical transducer based on hafnium zirconium oxide. Nat. Electron. 2, 506–512 (2019)
F. Huang, Y. Wang, X. Liang et al., HfO2-based highly stable radiation-immune ferroelectric memory. IEEE Electron. Device Lett. 38(3), 330–333 (2017)
K.Y. Chen, Y.S. Tsai, Y.H. Wu, Ionizing Radiation effect on memory characteristics for HfO. IEEE Electron. Device Lett. 40(9), 1370–1373 (2019)
S. Dai, Q. Yang, B. Zeng et al., Robustly stable ferroelectric polarization states enable long-term nonvolatile storage against radiation in HfO2-based ferroelectric field-effect transistors. ACS Appl. Mater. Interfaces. 14(45), 51459–51467 (2022)
W.L. Zhang, G. Li, X.J. Long et al., A comparative study of the γ-ray radiation effect on Zr-doped and Al-doped HfO2-based ferroelectric memory. Phys. Status Solidi B 257(5), 1900736 (2020)
S. Kang, W.-S. Jang, A.N. Morozovska et al., Highly enhanced ferroelectricity in HfO2-based ferroelectric thin film by light ion bombardment. Science. 376(6594), 731–738 (2022)
J. Namkung, M.S. Song, K.C. Lee et al., Conditional radiation tolerance of ferroelectric Hf0.5Zr0.5O2 thin film under 60Co gamma-ray irradiation. Appl. Phys. Lett. 120(16), 162903 (2022)
Y.H. Mao, W.L. Zhang, L. Cui et al., Growth kinetics of the ferroelectric Al-doped HfO2 thin films with a synergistic effect of vital influencing factors. Ceram. Int. 47, 4674–4680 (2021)
W.L. Zhang, Y.H. Mao, L. Cui et al., Impact of radiation effect on energy storage density and wake-up behaviors of antiferroelectric-like Al-doped HfO2 thin films. Phys. Chem. Chem. Phys. 22, 21893 (2020)
M.H. Park, Y.H. Lee, H.J. Kim et al., Ferroelectricity and antiferroelectricity of doped thin HfO2-based films. Adv. Mater. 27, 1811–1831 (2015)
W.W. Xiao, C. Liu, Y. Peng et al., Thermally stable and radiation hard ferroelectric Hf0.5Zr0.5O2 thin films on muscovite mica for flexible nonvolatile memory applications. ACS Appl. Electron. Mater. 1, 919–927 (2019)
E.D. Grimley, T. Schenk, T. Mikolajick et al., Atomic structure of domain and interphase boundaries in ferroelectric HfO2. Adv. Mater. Interfaces. 5, 1701258 (2018)
T. Schenk, M. Hoffmann, J. Ocker et al., Complex internal bias fields in ferroelectric hafnium oxide. ACS Appl. Mater. Inter. 7, 20224 (2015)
P.D. Lomenzo, C. Richter, T. Mikolajick et al., Depolarization as driving force in antiferroelectric hafnia and ferroelectric wake-up. ACS Appl. Electr. Mater. 2, 1583–1595 (2020)
W. Wang, R. Sun, S. He et al., Atomic structure, work function and magnetism in layered single crystal VOCl. 2D Mater. 8, 015027 (2021)
M.N.F. Hoque, R. He, J. Warzywoda et al., Effects of moisture-based grain boundary passivation on cell performance and ionic migration in organic–inorganic halide perovskite solar cells. ACS Appl. Mater. Interfaces. 10, 30322–30329 (2018)
X. Zhu, T. Zhang, Y. He, Y. Liu et al., Carrier tuning of 2D electron gas in field-effect devices based on Al2O3/ZnO heterostructures. Nanoscale. 15, 12071–12077 (2023)
X. Wang, J. Wang, J. Wang et al., Atomic structure and electronic property of two-dimensional ferroelectric CuInP2Se6. Ceram. Int. 46, 7014–7018 (2020)
E.O. Filatova, A.S. Konashuk, S.S. Sakhonenkov et al., Mechanisms of TiN effective workfunction tuning at interfaces with HfO2 and SiO2. J. Phys. Chem. C 12, 415547–415557 (2020)
Y. Li, Y. Ma, W. Lin et al., Study of γ-ray irradiation influence on TiN/HfO2/Si MOS capacitor by C–V and DLTS. Superlattice Microst. 120, 313–318 (2018)
Q.Q. Ke, A. Kumar, X.J. Lou et al., Microstructural evolution of charged defects in the fatigue process of polycrystalline BiFeO3 thin films. Acta Materialia 82, 190–197 (2015)
T. Vogel, N. Kaiser, S. Petzold et al., Defect-induced phase transition in hafnium oxide thin films: comparing heavy ion irradiation and oxygen engineering effects. IEEE Trans. Nucl. Sci. 68, 1542–1547 (2021)
A.D.E.M. Tataroğlu, Ş. Altındal, S. Karadeniz et al., Au/SnO2/n-Si (MOS) structures response to radiation and frequency. Microelectron. J. 34, 1043–1049 (2003)
S. Dulkadir, H.U. Tecimer, F. Parlaktürk et al., The effect of radiation on the forward and reverse bias current–voltage (I–V) characteristics of Au/(Bi4Ti3O12/SiO2)/n-Si (MFIS) structures. J. Mater. Sci.—Mater. Electron. 31, 12514–12521 (2020)
R. Ertugrul-Uyar, A. Buyukbas-Ulusan, A.D.E.M. Tataroglu, Ionizing radiation effects on Au/TiO2/n-Si metal-insulator-semiconductor (MIS) structure. J. Mater. Sci.—Mater. Electron. 31, 19846–19851 (2020)
Funding
The authors would like to thank the financial support from the Chongqing Municipal Education Commission Science and Technology Research Program Youth Project (KJQN202101423 and KJQN202301414).
Author information
Authors and Affiliations
Contributions
WZ and YM proposed the topic of this work. Material preparation, data collection and analysis were performed by GW, YL, JL, and HW. WZ and YM wrote the first draft of the manuscript. GW and YM participated in discussion and gave some valuable suggestions. LC and GW and revised the manuscript before submission.
Corresponding authors
Ethics declarations
Conflict of interest
The authors declare that they have no conflict of interest, financial interests, or personal relationship that could have appeared to influence the work reported in this paper.
Additional information
Publisher’s Note
Springer nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.
About this article
Cite this article
Zhang, W., Wan, G., Lin, Y. et al. Investigation of ionizing radiation mechanisms on HfO2-based ferroelectric thin-film memories with various configurations. J Mater Sci: Mater Electron 35, 296 (2024). https://doi.org/10.1007/s10854-024-12033-5
Received:
Accepted:
Published:
DOI: https://doi.org/10.1007/s10854-024-12033-5