Skip to main content
SpringerLink
Log in

Changing the conductivity type of ultrasonically sprayed ZnO thin films: comparison of the effects of Li, N, and B dopants

  • Published:
Journal of Materials Science: Materials in Electronics Aims and scope Submit manuscript

Abstract

ZnO is a material widely used in technological applications. However, the difficulty of preparing p-type ZnO creates a bottleneck for developing ZnO-based devices. In this study, Li, N, and B-doped ZnO thin films were prepared on glass substrates by ultrasonic spray pyrolysis. To determine the conductivity type, the structural, electrical, and optical properties of all samples were investigated. The crystal structure of all ZnO thin films was hexagonal with planes (100), (002), (101), (102), and (110). The B-doped ZnO thin films had small-sized grains similar to pebble stones. The Li dopant increased the defect concentrations, as the B dopant decreased the defect concentrations in the ZnO thin films. The N doping did not change the band gap (3.22 eV), the Li doping decreased the band gap to 3.20 eV and the B doping increased the band gap to 3.28 eV. The electrical conductivity type of the Li and N-doped ZnO thin films was n-type as in the undoped ZnO, while 4–6% B-doped ZnO thin films showed predominantly p-type conductivity due to the B–O complexes and interstitial oxygen defects. Thus, p-type conductivity was found experimentally in B-doped ZnO thin films.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11

Similar content being viewed by others

Data availability

The data that support the findings of this study are available from the corresponding author upon reasonable request.

References

  1. E.F. Keskenler, M.F. Keskenler, M. Tomakin, V. Nevruzoğlu, J. Mater. Sci. Mater. Electron. 30, 6082 (2019)

    CAS  Google Scholar 

  2. Ü. Özgür, Y. I. Alivov, C. Liu, A. Teke, M. A. Reshchikov, S. Doǧan, V. Avrutin, S. J. Cho, H. Morko̧ (2005) J. Appl. Phys. 98, 041301

    Google Scholar 

  3. D.K. Hwang, M.S. Oh, J.H. Lim, S.J. Park, J. Phys. D 40, R387 (2007)

    CAS  Google Scholar 

  4. O. Maksimov, Rev. Adv. Mater. Sci. 24, 26 (2010)

    CAS  Google Scholar 

  5. G. Brauer, J. Kuriplach, C.C. Ling, A.B. Djurišić, J. Phys. Conf. Ser. 265, 012002 (2011)

    Google Scholar 

  6. H. Morkoç, Ü. Özgür, Zinc oxide: fundamentals materials and device technology (Wiley, New York, 2009)

    Google Scholar 

  7. R. Yang, F. Wang, J. Lu, Y. Lu, B. Lu, S. Li, Z. Ye, ACS Appl. Electron. Mater. 5(8), 4014–4034 (2023)

    CAS  Google Scholar 

  8. E.C. Lee, Y.S. Kim, Y.G. Jin, K.J. Chang, Phys. Rev. B 64, 085120 (2001)

    Google Scholar 

  9. B. Deng, Z. Guo, H. Sun, Appl. Phys. Lett. 96, 172106 (2010)

    Google Scholar 

  10. K. Samanta, P. Bhattacharya, R.S. Katiyar, J. Appl. Phys. 108, 113501 (2010)

    Google Scholar 

  11. Y.Y.Q. Wang, A. Zou, L. Yang, B. Liu, Y. Zhang, F. Chen, J. Wang, S. Zhang, Y. Jiang, J. Alloys Compd. 887, 161429 (2021)

    CAS  Google Scholar 

  12. A. Das, D. Basak, A.C.S. Appl, Electron. Mater. 3, 3693 (2021)

    CAS  Google Scholar 

  13. T. Zhang, M. Li, J. Chen, Y. Wang, L. Miao, Y. Lu, Y. He, Mater. Sci. Eng. Rep. 147, 100661 (2022)

    Google Scholar 

  14. C. Rauch, W. Gehlhoff, M.R. Wagner, E. Malguth, G. Callsen, R. Kirste, B. Salameh, A. Hoffmann, S. Polarz, Y. Aksu, M. Driess, J. Appl. Phys. 107, 024311 (2010)

    Google Scholar 

  15. C.H. Park, S.B. Zhang, S.H. Wei, Phys. Rev. B 66, 073202 (2002)

    Google Scholar 

  16. S. Sushama, P. Murkute, H. Ghadi, S. Chakrabarti, A.C.S. Appl, Electron. Mater. 1, 325 (2019)

    CAS  Google Scholar 

  17. X. Chen, Z. Zhang, B. Yao, Y. Zhang, Y. Gu, P. Zhao, B. Li, D. Shen, J. Alloys Compd. 672, 260 (2016)

    CAS  Google Scholar 

  18. C. Feng, Z. Chen, W. Li, F. Zhang, X. Li, L. Xu, M. Sun, Phys. B 555, 53 (2019)

    CAS  Google Scholar 

  19. R.S. Gaikwad, S.S. Bhande, R.S. Mane, B.N. Pawar, S.L. Gaikwad, S.H. Han, O.S. Joo, Mater. Res. Bull. 47, 4257 (2012)

    CAS  Google Scholar 

  20. C. Mao, L. Fang, H. Zhang, W. Li, F. Wu, G. Qin, H. Ruan, C. Kong, J. Alloys Compd. 676, 135 (2016)

    CAS  Google Scholar 

  21. T. Hurma, J. Mol. Struct. 1189, 1 (2019)

    CAS  Google Scholar 

  22. J. Zhao, C. Xie, L. Yang, S. Zhang, G. Zhang, Z. Cai, Appl. Surf. Sci. 330, 126 (2015)

    CAS  Google Scholar 

  23. S.S. Shinde, P.S. Shinde, Y.W. Oh, D. Haranath, C.H. Bhosale, K.Y. Rajpure, J. Anal. Appl. Pyrolysis 97, 181 (2012)

    CAS  Google Scholar 

  24. W. Wang, T. Ai, Q. Yu, Sci. Rep. 7, 42615 (2017)

    CAS  Google Scholar 

  25. M. Caglar, S. Ilican, Y. Caglar, F. Yakuphanoglu, J. Alloys Compd. 509, 3177 (2011)

    CAS  Google Scholar 

  26. Q. Yu, L. Li, H. Li, S. Gao, D. Sang, J. Yuan, P. Zhu, Appl. Surf. Sci. 257, 5984 (2011)

    CAS  Google Scholar 

  27. M. Sharmin, A.H. Bhuiyan, J. Mater. Sci. Mater. Electron. 30, 4867 (2019)

    CAS  Google Scholar 

  28. Y.M. Hao, S.Y. Lou, S.M. Zhou, R.J. Yuan, G.Y. Zhu, N. Li, Nanoscale Res. Lett. 7, 19 (2012)

    Google Scholar 

  29. F. Yi, Y. Huang, Z. Zhang, Q. Zhang, Y. Zhang, Opt. Mater. (Amst). 35, 1532 (2013)

    CAS  Google Scholar 

  30. F. Abrinaei, J. Mater. Sci. Mater. Electron. 30, 8619 (2019)

    CAS  Google Scholar 

  31. M. M. H. Farooqi, R. K. Srivastava (2020) Proc. Natl. Acad. Sci. India Sect. A 90, 845

    Google Scholar 

  32. A. Antony, P. Poornesh, K. Ozga, J. Jedryka, P. Rakus, I.V. Kityk, Mater. Sci. Semicond. Process. 87, 100 (2018)

    CAS  Google Scholar 

  33. J.W. Zhang, G. He, T.S. Li, M. Liu, X.S. Chen, Y.M. Liu, Z.Q. Sun, Mater. Res. Bull. 65, 7 (2015)

    CAS  Google Scholar 

  34. N. Tu, H. Van Bui, D.Q. Trung, A.T. Duong, D.M. Thuy, D.H. Nguyen, K.T. Nguyen, P.T. Huy, J. Alloys Compd. 791, 722 (2019)

    CAS  Google Scholar 

  35. X. Chen, Q. Xie, J. Li, Ceram. Int. 46, 2309 (2020)

    CAS  Google Scholar 

  36. W. Zhang, L.P. Guo, Q.W. Deng, M.X. Li, Optik (Stuttg). 196, 163195 (2019)

    CAS  Google Scholar 

  37. T. Jiang, B. Du, H. Zhang, D. Yu, L. Sun, G. Zhao, C. Yang, Y. Sun, M. Yu, M.N.R. Ashfold, Appl. Surf. Sci. 483, 922 (2019)

    CAS  Google Scholar 

  38. S. Dey, S. Das, A.K. Kar, Mater. Chem. Phys. 270, 124872 (2021)

    CAS  Google Scholar 

  39. S. Devasia, P.V. Athma, M. Shaji, M.C.S. Kumar, E.I. Anila, Phys. B 533, 83 (2018)

    CAS  Google Scholar 

  40. L. Dejam, S. Kulesza, J. Sabbaghzadeh, A. Ghaderi, S. Solaymani, Ș Țălu, M. Bramowicz, M. Amouamouha, A. Hossein, S. Shayegan, A.H. Sari, Results Phys. 44, 5 (2023)

    Google Scholar 

  41. S.K. Abdel-aal, A.S. Abdel-rahman, J. Electron. Mater. 48, 1686 (2019)

    CAS  Google Scholar 

  42. B.D. Viezbicke, S. Patel, B.E. Davis, D.P. Birnie, Phys. Status Solidi Basic Res. 252, 1700 (2015)

    CAS  Google Scholar 

  43. D. Acosta, A. López-Suárez, C. Magaña, F. Hernández, Thin Solid Films 653, 309 (2018)

    CAS  Google Scholar 

  44. M.R.A. Cruz, O. Ceballos-Sanchez, E. Luévano-Hipólito, L.M. Torres-Martínez, Int. J. Hydrogen Energy 43, 10301 (2018)

    Google Scholar 

  45. G. Byzynski, C. Melo, D.P. Volanti, M.M. Ferrer, A.F. Gouveia, C. Ribeiro, J. Andrés, E. Longo, Mater. Des. 120, 363 (2017)

    CAS  Google Scholar 

  46. H. Nian, S.H. Hahn, K.K. Koo, E.W. Shin, E.J. Kim, Mater. Lett. 63, 2246 (2009)

    CAS  Google Scholar 

  47. N. Nripasree, N.K. Deepak, Mater. Sci. Eng. B 211, 121 (2016)

    CAS  Google Scholar 

  48. H. Sudrajat, S. Hartuti, Mater. Res. Bull. 102, 319 (2018)

    CAS  Google Scholar 

  49. M. Arif, M. Shkir, S. AlFaify, A. Sanger, P.M. Vilarinho, A. Singh, Opt. Laser Technol. 112, 539 (2019)

    CAS  Google Scholar 

  50. K. Mahmood, D. Song, S.B. Park, Surf. Coat. Technol. 206, 4730 (2012)

    CAS  Google Scholar 

  51. B. Wen, C.Q. Liu, N. Wang, H.L. Wang, S.M. Liu, Y.H. Ren, W.P. Chai, Appl. Phys. A 123, 211 (2017)

    Google Scholar 

  52. S. Bose, S. Mandal, A.K. Barua, S. Mukhopadhyay, J. Mater. Sci. Technol. 55, 136 (2020)

    CAS  Google Scholar 

  53. S.D. Senol, O. Ozturk, C. Terzioğlu, Ceram. Int. 41, 11194 (2015)

    CAS  Google Scholar 

  54. U. Manzoor, M. Islam, L. Tabassam, S.U. Rahman, Phys. E 41, 1669 (2009)

    CAS  Google Scholar 

  55. R. Swapna, M.C.S. Kumar, Mater. Res. Bull. 49, 44 (2014)

    CAS  Google Scholar 

  56. M. Tomakin, Z. Onuk, N. Rujisamphan, S.I. Shah, Thin Solid Films 642, 163 (2017)

    CAS  Google Scholar 

  57. S.H. Basri, W.H.A. Majid, N.A. Talik, M.A.M. Sarjidan, J. Alloys Compd. 769, 640 (2018)

    CAS  Google Scholar 

  58. Y.J. Zeng, Z.Z. Ye, W.Z. Xu, D.Y. Li, J.G. Lu, L.P. Zhu, B.H. Zhao, Appl. Phys. Lett. 88, 3 (2006)

    Google Scholar 

  59. C. Ravichandran, G. Srinivasan, C. Lennon, S. Sivanathan, J. Kumar, Mater. Sci. Semicond. Process. 13, 46 (2010)

    CAS  Google Scholar 

  60. S.U. Awan, S.K. Hasanain, Z. Mehmood, D.H. Anjum, S.A. Shah, M. Aftab, T.A. Abbas, Smart Mater. Struct. 24, 115025 (2015)

    Google Scholar 

  61. C.F. Klingshirn, ChemPhysChem 8, 782 (2007)

    CAS  Google Scholar 

  62. M.G. Wardle, J.P. Goss, P.R. Briddon, Phys. Rev. B 71, 155205 (2005)

    Google Scholar 

  63. J.J.A.J.J. Ortega, A.A. Ortiz-Hernández, J. Berumen-Torres, R. Escobar-Galindo, V.H. Méndez-García, Mater. Lett. 181, 12 (2016)

    CAS  Google Scholar 

  64. S. Golshahi, S.M. Rozati, A.M.B. do Rego, J. Wang, E. Elangovan, R. Martins, E. Fortunato, Mater. Sci. Eng. B 178, 103 (2013)

    CAS  Google Scholar 

  65. H. Yang, X. Xu, X. Zhou, Y. Ma, J. Dong, T. Wang, J. Miao, Y. Jiang, J. Mater. Sci. 47, 6513 (2012)

    CAS  Google Scholar 

  66. S.Y. Wakhare, M.D. Deshpande, J. Mol. Graph. Model. 101, 107753 (2020)

    CAS  Google Scholar 

  67. S.K. Hazra, S. Basu, Solid State Commun. 133, 245 (2005)

    CAS  Google Scholar 

  68. R. Al-Gaashani, S. Radiman, A.R. Daud, N. Tabet, Y. Al-Douri, Ceram. Int. 39, 2283 (2013)

    CAS  Google Scholar 

  69. A. Jilani, J. Iqbal, S. Rafique, M.S. Abdel-wahab, Y. Jamil, A.A. Al-Ghamdi, Optik (Stuttg). 127, 6358 (2016)

    CAS  Google Scholar 

  70. R. Bhujel, S. Rai, B.P. Swain, Mater. Sci. Semicond. Process. 102, 104592 (2019)

    CAS  Google Scholar 

  71. R. Ahmad, N. Tripathy, M.Y. Khan, K.S. Bhat, M.S. Ahn, Y.B. Hahn, RSC Adv. 6, 54836 (2016)

    CAS  Google Scholar 

  72. X. Zhao, P. Song, H. Gai, Y. Li, C. Ai, D. Wen, Micromachines 11, 889 (2020)

    Google Scholar 

  73. B. KaniAmuthan, S. Vinoth, V. Karthikeyan, V.A.L. Roy, P. Thilakan, Ceram. Int. 45, 24324 (2019)

    CAS  Google Scholar 

  74. B. Chavillon, L. Cario, A. Renaud, F. Tessier, F. Cheviré, M. Boujtita, Y. Pellegrin, E. Blart, A. Smeigh, L. Hammarström, F. Odobel, S. Jobic, J. Am. Chem. Soc. 134, 464 (2012)

    CAS  Google Scholar 

  75. A. Kumar, I. Ahmad, Appl. Phys. A 126, 598 (2020)

    CAS  Google Scholar 

  76. R.E. Núñez-Salas, A. Hernández-Ramírez, L. Hinojosa-Reyes, J.L. Guzmán-Mar, M. Villanueva-Rodríguez, M.L. de Maya-Treviño, Catal. Today 328, 202 (2019)

    Google Scholar 

  77. Z. Deng, J. Ji, M. Xing, J. Zhang, Nanoscale Adv. 2, 4986 (2020)

    CAS  Google Scholar 

  78. M. Shaheera, K.G. Girija, M. Kaur, V. Geetha, A.K. Debnath, R.K. Vatsa, K.P. Muthe, S.C. Gadkari, Chem. Phys. Lett. 758, 137951 (2020)

    CAS  Google Scholar 

  79. C.Y. Tsay, W.Y. Chiu, Coatings 10, 1069 (2020)

    CAS  Google Scholar 

  80. X. Zhao, Y. Li, C. Ai, D. Wen, Materials (Basel). 12, 1282 (2019)

    CAS  Google Scholar 

  81. Y. Lee, H. Terashima, Y. Shimodaira, K. Teramura, M. Hara, H. Kobayashi, K. Domen, M. Yashima, J. Phys. Chem. C 111, 1042 (2007)

    CAS  Google Scholar 

  82. S. Gandla, S.R. Gollu, R. Sharma, V. Sarangi, D. Gupta, Appl. Phys. Lett. 107, 152102 (2015)

    Google Scholar 

  83. G.H. Kim, D.H. Hwang, S.I. Woo, Mater. Chem. Phys. 131, 77 (2011)

    CAS  Google Scholar 

  84. P. Gomathisankar, K. Hachisuka, H. Katsumata, T. Suzuki, K. Funasaka, S. Kaneco, RSC Adv. 3, 20429 (2013)

    CAS  Google Scholar 

  85. Z. Peng, D. Wu, W. Wang, F. Tan, X. Wang, J. Chen, X. Qiao, Powder Technol. 315, 73 (2017)

    CAS  Google Scholar 

  86. S. Ghosh, P.M.G. Nambissan, S. Thapa, K. Mandal, Phys. B 454, 102 (2014)

    CAS  Google Scholar 

  87. S. Shawuti, A.U.R. Sherwani, M.M. Can, M.A. Gülgün, Sci. Rep. 10, 8228 (2020)

    CAS  Google Scholar 

  88. G.P. Qin, H. Zhang, W.J. Li, H.B. Ruan, J. Wang, D. Wang, L. Fang, C.Y. Kong, J. Mater. Sci. Mater. Electron. 30, 6059 (2019)

    CAS  Google Scholar 

  89. A. Ievtushenko, O. Khyzhun, I. Shtepliuk, O. Bykov, R. Jakieła, S. Tkach, E. Kuzmenko, V.B. Karpenko, O. Olifan, G. Lashkarev, J. Alloys Compd. 722, 683 (2017)

    CAS  Google Scholar 

  90. H. Zhang, W. Li, G. Qin, L. Fang, H. Ruan, M. Tan, F. Wu, C. Kong, Appl. Phys. A 124, 147 (2018)

    CAS  Google Scholar 

  91. L. Sun, Q. Shao, Y. Zhang, H. Jiang, S. Ge, S. Lou, J. Lin, J. Zhang, S. Wu, M. Dong, Z. Guo, J. Colloid Interface Sci. 565, 142 (2020)

    CAS  Google Scholar 

  92. S. Yilmaz, J. Nisar, Y. Atasoy, E. McGlynn, R. Ahuja, M. Parlak, E. Bacaksiz, Ceram. Int. 39, 4609 (2013)

    CAS  Google Scholar 

Download references

Acknowledgements

This work was supported by the research fund of Recep Tayyip Erdogan University, Rize, Turkey, under Contract No. FBA-2018-925.

Funding

The authors declare that no funds, grants, or other support were received during the preparation of this manuscript.

Author information

Authors and Affiliations

  1. Central Research Laboratory, Recep Tayyip Erdogan University, 53100, Rize, Turkey

    Tuğba Bayazıt

  2. Department of Physics, Faculty of Arts and Sciences, Recep Tayyip Erdogan University, 53100, Rize, Turkey

    Sait Barış Güner & Murat Tomakin

Authors
  1. Tuğba Bayazıt
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Sait Barış Güner
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Murat Tomakin
    View author publications

    You can also search for this author in PubMed Google Scholar

Contributions

TB: Conceptualization, Methodology, Investigation, Data curation, Writing—original draft. SBG: Validation, Formal analysis, Investigation, Writing—review and editing, Visualization. MT: Investigation, Resources, Writing—review and editing, Supervision, Project administration.

Corresponding author

Correspondence to Murat Tomakin.

Ethics declarations

Competing interest

The authors declare that they have no known competing financial interests or personal relationships that could have appeared to influence the work reported in this paper.

Additional information

Publisher's Note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Bayazıt, T., Güner, S.B. & Tomakin, M. Changing the conductivity type of ultrasonically sprayed ZnO thin films: comparison of the effects of Li, N, and B dopants. J Mater Sci: Mater Electron 34, 2095 (2023). https://doi.org/10.1007/s10854-023-11518-z

Download citation

  • Received:

  • Accepted:

  • Published:

  • DOI: https://doi.org/10.1007/s10854-023-11518-z

Search

Navigation