Abstract
In recent years, pressure sensors with high sensitivity and flexibility have been widely used in the fields of wearable electronics, soft robots, medical monitoring, and so on. In this paper, a through-hole structure comprising of multi-walled carbon nanotubes (MwCNTs)/carboxymethyl cellulose (CMC)/polydimethylsiloxane (PDMS) was constructed through an ice template method and then it functioned as the dielectric layer of a newly made flexible capacitive pressure sensor. The sensitivity, stability, response time, and human applicability of the sensor were fully studied. The experimental method with ice template has the advantages of environmental protection and safety. More importantly, through the regulation of chemical composition, the porous sponge can have a specific pore morphology. The experimental e results showed that the dielectric layer with a through-hole structure had been built successfully and the PDMS resin was impregnated into the through-hole structure. The MwCNTs/CMC/PDMS capacitive pressure sensor possessed a high sensitivity (~ 2.143 kPa−1) and good stability in the low-pressure range (0–1 kPa). Moreover, a low detection limit (~ 3 Pa) and fast response time (~ 250 ms) were obtained. Human applicability tests revealed that our flexible sensor could catch the response of the human body swiftly so that it exhibited bright application prospects in wearable electronics.
Similar content being viewed by others
Data availability
Data will be made available on reasonable request.
References
K. Omri, N. Alonizan, J. Mater. Sci.: Mater. Electron. 33, 15448–15459 (2022)
K. Omri, S. Gouadria, M. Madani, S. Mnefgui, N. Alonizan, F. Alharbi, J. Mater. Sci.: Mater. Electron. 34, 444 (2023)
W. Li, L. Xiong, Y. Pu, Y. Quan, S. Li, Nanoscale Res. Lett. 14, 1–7 (2019)
L. Tong, X.X. Wang, X.X. He, G.D. Nie, J. Zhang, B. Zhang, W.Z. Guo, Y.Z. Long, Nanoscale Res. Lett. 13, 1–8 (2018)
S.H. Ha, S.H. Ha, M.B. Jeon, H.C. Ji, J.M. Kim, Nanoscale 10, 5105–5113 (2018)
R. Shi, Z. Lou, S. Chen, G. Shen, Sci. China Mater. 61, 1587–1595 (2018)
Y. Kim, S. Jang, J.H. Oh, Microelectron. Eng. 215, 111002 (2019)
M. Liu, L. Yu, S. Vudayagiri, A.L. Skov, Int. J. Smart Nano Mater. 11, 11–23 (2020)
X. Wei, X. Cao, Y. Wang, G. Zheng, K. Dai, C. Liu, C. Shen, Compos. Sci. Technol. 149, 166–177 (2017)
I. Trase, Z. Xu, Z. Chen, H. Tan, J.X.J. Zhang, Sens. Actuators A 303, 111655 (2020)
G. Gang, Y. Cai, Q. Dong, Y. Zhang, J. Shao, H. Wei, X. Dong, Nanoscale 10, 10033–10040 (2018)
X. Wang, Z. Liu, T. Zhang, Small 13, 1602790 (2017)
T. Cai, Y. Yang, T. Bi, E. Bi, Y. Li, Nanotechnology 31, 24LT01 (2020)
T. Jin, Y. Pan, G.J. Jeon, H.I. Yeom, S. Zhang, K.W. Paik, S.K. Park, ACS Appl. Mater. Interfaces 12, 13348–13359 (2020)
T. Sekitani, U. Zschieschang, H. Klauk, T. Someya, Nat. Mater. 9, 1015–1022 (2010)
S.G. Yoon, S.T. Chang, J. Mater. Chem. C 5, 1910–1919 (2017)
B.S. Prakash, K. Varma, Compos. Sci. Technol. 67, 2363–2368 (2007)
S.W. Kim, H.R. Choi, C.S. Han, D.B. Kim, J.W. Kim, Y.S. Cho, RSC Adv. 7, 56038–56043 (2017)
S.A. Mohd Chachuli, M.N. Hamidon, M.S. Mamat, M. Ertugrul, N.H. Abdullah, Mater. Sci. Semicond. Process. 99, 140–148 (2019)
R. Su, Z. Luo, D. Zhang, Y. Liu, Z. Wang, J. Li, J. Bian, Y. Li, X. Hu, J. Gao, Y. Yang, J. Phys. Chem. C 120, 11769–11776 (2016)
A. Rana, J.P. Roberge, V.J. I, S.J. Duchaine, IEEE Sens. J. 16, 7853–7863 (2016)
A. Chhetry, S. Sharma, H. Yoon, S. Ko, J.Y. Park, Adv. Funct. Mater. 30, 1910020 (2020)
J. Jia, G. Huang, J. Deng, K. Pan, Nanoscale 11, 4258–4266 (2019)
X. Wu, X. Liu, J. Wang, J. Huang, S. Yang, ACS Appl. Mater. Interfaces 10, 39009–39017 (2018)
Y. Zhang, X. Guo, W. Wang, L. Chen, L. Liu, H. Liu, Y. He, IEEE Sens. J. 20, 14118–14125 (2020)
T. Li, H. Luo, L. Qin, X. Wang, Z. Xiong, H. Ding, Y. Gu, Z. Liu, T. Zhang, Small 12, 5042–5048 (2016)
A.A. Saberi, Phys. Rep. 578, 1–32 (2015)
H. Xu, X. Yin, M. Li, X. Li, X. Li, X. Dang, L. Zhang, L. Cheng, ACS Appl. Mater. Interfaces 11, 22628–22636 (2019)
L. Ma, X. Shuai, Y. Hu, X. Liang, P. Zhu, R. Sun, C. Wong, J. Mater. Chem. C 6, 13232–13240 (2018)
Z. He, W. Chen, B. Liang, C. Liu, L. Yang, D. Lu, Z. Mo, H. Zhu, Z. Tang, X. Gui, ACS Appl. Mater. Interfaces 10, 12816–12823 (2018)
M. Li, J. Liang, X. Wang, M. Zhang, Sensors 20, 371 (2020)
Q. Zhang, W. Jia, C. Ji, Z. Pei, Z. Jing, Y. Cheng, W. Zhang, K. Zhuo, J. Ji, Z. Yuan, S. Sang, Smart Mater. Struct. 28, 115040 (2019)
Y. Jung, W. Lee, K. Jung, B. Park, J. Park, J. Ko, H. Cho, Polymers 12, 1412 (2020)
Y. Sekertekin, I. Bozyel, D. Gokcen, Sensors 20, 2908 (2020)
X. You, J. He, N. Nan, X. Sun, K. Qi, Y. Zhou, W. Shao, F. Liu, S. Cui, J. Mater. Chem. C 6, 12981–12991 (2018)
F.R. Fan, L. Lin, G. Zhu, W. Wu, R. Zhang, Z.L. Wang, Nano Lett. 12, 3109–3114 (2012)
V.L. Trinh, C.K. Chung, Small 13, 1700373 (2017)
S. Deville, E. Saiz, R.K. Nalla, A.P. Tomsia, Science 311, 515–518 (2006)
J.H. Kim, J.H. Lee, T.Y. Yang, S.Y. Yoon, B.K. Kim, H.C. Park, Ceram. Int. 37, 2317–2322 (2011)
S. Deville, J. Mater. Res. 28, 2202–2219 (2013)
H. Niu, S. Gao, W. Yue, Y. Li, W. Zhou, H. Liu, Small 16, 1904774 (2020)
P. Miao, J. Wang, C. Zhang, M. Sun, S. Cheng, H. Liu, Nano-Micro Lett. 11, 1–37 (2019)
K. Kea, M. McMasterb, W. Christophersonb, Composites A 126, 105614 (2019)
Funding
This work was supported by the Youth Foundation Fund of Shanghai Institute of Ceramics, Chinese Academy of Sciences (Grant No. 552022000306).
Author information
Authors and Affiliations
Contributions
HP conceived and designed the experiments, and HZ supervised the complete research. FW prepared the samples, performed the experiments, and HL and XY collected and anlyzed the data. The manuscript was writed by HP and revised by HL.
Corresponding authors
Ethics declarations
Competing interests
The authors have no relevant financial interests to disclose.
Additional information
Publisher’s Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Supplementary Information
Below is the link to the electronic supplementary material.
Rights and permissions
Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.
About this article
Cite this article
Peng, H., Wang, F., Lin, H. et al. High-sensitive MwCNTs/CMC/PDMS flexible capacitive pressure sensor prepared through ice template method and its wearable applications. J Mater Sci: Mater Electron 34, 1288 (2023). https://doi.org/10.1007/s10854-023-10638-w
Received:
Accepted:
Published:
DOI: https://doi.org/10.1007/s10854-023-10638-w