Abstract
The flexible pressure sensors which cover the human body can generate electric signal under pressure. Compared to other types of pressure sensors, the capacitive flexible pressure sensors have the advantages of low energy consumption, fast response time and low detection limit. In order to obtain high performance capacitive flexible pressure sensors, efforts have been done on the structures and materials of sensors. This chapter reviews the methods to improve the sensor performance, including the preparation of microstructures and composite dielectric layers. Moreover, the research progress of capacitive flexible pressure sensors in the fields of intelligent medical and robotics is summarized. Finally, the prospects and challenges are discussed for capacitive flexible pressure sensors.
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References
Nam SH, Jeon PJ, Min SW, Lee YT, Park EY, Im S (2014) Highly sensitive non-classical strain gauge using organic Heptazole thin-film transistor circuit on a flexible substrate. Adv Func Mater 24(28):4413–4419
Li J, Bao R, Tao J, Peng Y, Pan C (2018) Recent progress in flexible pressure sensor arrays: from design to applications. J Mater Chem C 6(44):11878–11892
Li S, Peele BN, Larson CM, Zhao H, Shepherd RF (2016) A stretchable multicolor display and touch interface using photo patterning and transfer printing. Adv Mater 28(44):9770–9775
Jin X, Götz M, Wille S, Mishra YK, Adelung R, Zollfrank C (2013) A novel concept for self-reporting materials: stress sensitive photoluminescence in ZnO tetrapod filled elastomers. Adv Mater 25(9):1342–1347
Zhong LW, Chen J, Long L (2015) Progress in triboelectric nanogenerators as a new energy technology and self-powered sensors. Energy Environ Sci 8(8):2250–2282
Tee CK, Chortos A, Berndt A, Nguyen AK, Tom A, McGuire A et al (2015) A skin-inspired organic digital mechanoreceptor. Science 350(6258):313–316
Rodgers MM, Pai Vinay M, Conroy Richard S (2015) Recent advances in wearable sensors for health monitoring. Sens J IEEE 15(6):3119–3126
Qian X, Su M, Li F, Song Y (2016) Research progress of flexible wearable electronic sensors. Acta Chim Sinica 74(7):565–575
Cho SH, Lee SW, Yu S, Kim H, Chang S, Kang D et al (2017) Micropatterned pyramidal ionic gels for sensing broad-range pressures with high sensitivity. ACS Appl Mater Interfaces 9(11):10128–10135
Cai L, Song L, Luan P, Zhang Q, Zhang N, Gao Q et al (2013) Super-stretchable, transparent carbon nanotube-based capacitive strain sensors for human motion detection. Sci Rep 3(6157):3048
Mannsfeld SCB, Tee CK, Stoltenberg RM, Chen HH, Barman S, Muir BVO et al (2010) Highly sensitive flexible pressure sensors with microstructured rubber dielectric layers. Nat Mater 9(10):859–864
Tee CK, Chortos A, Dunn RR, Schwartz G, Eason E, Bao Z (2014) Tunable flexible pressure sensors using microstructured elastomer geometries for intuitive electronics. Adv Func Mater 24(34):5427–5434
Pignanelli J, Schlingman K, Carmichael TB, Rondeau-Gagné S, Ahamed MJ (2018) A comparative analysis of capacitive-based flexible PDMS pressure sensors. Sens Actuators, A 285:427–436
Nie B, Li X, Shao J, Li X, Tian H, Wang D et al (2017) Flexible and transparent strain sensors with embedded multiwalled-carbon-nanotubes meshes. ACS Appl Mater Interfaces 9(46):40681–40689
Li T, Luo H, Qin L, Wang X, Xiong Z, Ding H et al (2016) Flexible capacitive tactile sensor based on micropatterned dielectric layer. Small 12(36):5042–5048
Yoon SG, Park BJ, Chang ST (2017) Highly sensitive piezocapacitive sensor for detecting static and dynamic pressure using ion-gel thin films and conductive elastomeric composites. ACS Appl Mater Interfaces 9(41):36206–36219
Ma L, Shuai X, Hu Y, Liang X, Zhu P, Sun R et al (2018) A highly sensitive and flexible capacitive pressure sensor based on a micro-arrayed polydimethylsiloxane dielectric layer. J Mater Chem C 6(48):13232–13240
Ding Y, Xu T, Onyilagha O, Fong H, Zhu Z (2019) Recent advances in flexible and wearable pressure sensors based on piezoresistive 3D monolithic conductive sponges. ACS Appl Mater Interfaces 11(7):6685–6704
Lee BY, Kim J, Kim H, Kim C, Lee SD (2016) Low-cost flexible pressure sensor based on dielectric elastomer film with micro-pores. Sens Actuators, A 240:103–109
Ding H, Wen Z, Qin E, Yang Y, Zhang W, Yan B et al (2019) Influence of the pore size on the sensitivity of flexible and wearable pressure sensors based on porous Ecoflex dielectric layers. Mater Res Express 6(6):066304
Chen S, Zhuo B, Guo X (2016) Large area one-step facile processing of microstructured elastomeric dielectric film for high sensitivity and durable sensing over wide pressure range. ACS Appl Mater Interfaces 8(31):20364–20370
Fan Y, Liao C, Liao G, Tan R, Xie L (2017) Capacitive pressure-sensitive composites using nickel–silicone rubber: experiments and modeling. Smart Mater Struct 26(7):075003
Fan Y, Liao C, Xie L, Chen X (2018) Piezo-capacitive behavior of a magnetically structured particle-based conductive polymer with high sensitivity and a wide working range. J Mater Chem C 6(20):5401–5411
Wang J, Jiu J, Nogi M, Sugahara T, Nagao S, Koga H et al (2015) A highly sensitive and flexible pressure sensor with electrodes and elastomeric interlayer containing silver nanowires. Nanoscale 7(7):2926–2932
Shi R, Lou Z, Chen S, Shen G (2018) Flexible and transparent capacitive pressure sensor with patterned microstructured composite rubber dielectric for wearable touch keyboard application. Sci China Mater 61(12):1587–1595
Li Z (2017) Research on printing flexible pressure sensor based on composite dielectric material. Master’s thesis, Beijing Institute of Graphic Communication
Chen YS, Hsieh GW, Chen SP, Tseng PY, Wang CW (2014) Zinc oxide nanowire-poly (methyl methacrylate) dielectric layers for polymer capacitive pressure sensors. ACS Appl Mater Interfaces 7(1):45–50
Choi D, Jang S, Kim JS, Kim HJ, Kim DH, Kwon JY (2019) A highly sensitive tactile sensor using a pyramid-plug structure for detecting pressure, shear force, and torsion. Advan Mater Technol 4(3):1800284
Qiu Z, Wan Y, Zhou W, Yang J, Yang J, Huang J et al (2018) Ionic skin with biomimetic dielectric layer templated from calathea zebrine leaf. Adv Func Mater 28(37):1802343
Wang X, Liu Z, Zhang T (2017) Flexible sensing electronics for wearable/attachable health monitoring. Small 13(25):1602790
Pruvost M, Smit WJ, Monteux C, Poulin P, Colin A (2019) Polymeric foams for flexible and highly sensitive low-pressure capacitive sensors. npj Flexible Electronics 3(1):7
Liu F, Han F, Ling L, Li J, Zhao S, Zhao T et al (2018) An omni‐healable and highly sensitive capacitive pressure sensor with microarray structure. Chem–A European J 24(63):16823–16832
Wen Z, Yang J, Ding H, Zhang W, Wu D, Xu J et al (2018) Ultra-highly sensitive, low hysteretic and flexible pressure sensor based on porous MWCNTs/ecoflex elastomer composites. J Mater Sci Mater Electron 29(24):20978–20983
Yoon SG, Chang ST (2017) Microfluidic capacitive sensors with ionic liquid electrodes and CNT/PDMS nanocomposites for simultaneous sensing of pressure and temperature. J Mater Chem C 5(8):1910–1919
Almassri AM, Wan Hasan WZ, Ahmad SA, Ishak AJ, Ghazali AM, Talib DN, Wada C (2015) Pressure sensor: state of the art, design, and application for robotic hand. J Sens 2015
Hua Q, Sun J, Liu H, Bao R, Wang ZL (2018) Skin-inspired highly stretchable and conformable matrix networks for multifunctional sensing. Nat Commun 9(1):244
Maiolino P, Galantini F, Mastrogiovanni F, Gallone G, Cannata G, Carpi F (2015) Soft dielectrics for capacitive sensing in robot skins: performance of different elastomer types. Sens Actuators, A 226:37–47
Ji Z, Zhu H, Liu H, Chen T, Sun L (2016) A flexible capacitive tactile sensor for robot skin. In: 2016 international conference on advanced robotics and mechatronics (ICARM). IEEE, pp 207–212
Larson C, Peele B, Li S, Robinson S, Totaro M, Beccai L et al (2016) Highly stretchable electroluminescent skin for optical signaling and tactile sensing. Science 351(6277):1071–1074
Acknowledgements
This work is supported by the fund from of Education project (KM201810015004), the Beijing Municipal Commission of Education 2011 Collaborative Innovation Centre, the 2018 Beijing University Talents Cross Training Plan (Shipei Plan), the 2017 Beijing Municipal Commission of Education Outstanding Young Scholars (CIT&TCD201704051), the Research and Development Program of BIGC (Ea201803) and the Beijing Municipal Commission of the Education Foundation (PXM2017_014223_000036).
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Guo, Z., Ding, Y., Meng, X., Wu, D., Mo, L., Li, L. (2020). Research Progress of Capacitive Flexible Pressure Sensors. In: Zhao, P., Ye, Z., Xu, M., Yang, L. (eds) Advanced Graphic Communication, Printing and Packaging Technology. Lecture Notes in Electrical Engineering, vol 600. Springer, Singapore. https://doi.org/10.1007/978-981-15-1864-5_73
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DOI: https://doi.org/10.1007/978-981-15-1864-5_73
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