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Electrical performance characterization of glass substrate for millimeter-wave applications

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Abstract

This paper reports the electrical transmission performance characterization of glass substrate for millimeter-wave (mm-W) application. Glass is a competitive material for mm-W applications for the property of excellent electrical performance, high integration density and low-cost. Here we design and fabricate glass-based test vehicles on 6-inch AF32 glass wafer, and then we measured test vehicles and characterized transmission performance of glass substrate. Firstly, the complex permittivity of AF32 substrate is characterized by MRR method. Next, the three most representative transmission for mm-W application, microstrip (MS), coplanar waveguide (CPW) and substrate in waveguide (SIW) line, are investigated by L-2L method. Besides, the transmission performance of through glass via (TGV) is studied by comparison of transmission line with and without TGV transition. At frequency of 80 GHz, the measured insertion loss of MS, CPW and SIW is 0.25, 0.22 and 0.12 dB/mm, and the measured insertion loss of TGV is 0.558 dB/via. The results of glass-based transmission lines and performance comparison with other mm-W substrate technologies indicate that glass substrate is promising for mm-W applications.

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Data availability

The datasets generated during and/or analyzed during the current study are available from the corresponding author on reasonable request.

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Acknowledgements

This work was supported by the National Natural Science Foundation of China (Grant Number 61974121).

Funding

This work was supported by the National Natural Science Foundation of China (Grant Number 61974121).

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Authors and Affiliations

  1. School of Electronic Science and Engineering, Xiamen University, Xiamen, 361000, China

    Tian Yu & Daquan Yu

  2. Xiamen Sky Semiconductor Technology Co., Ltd, Xiamen, 361000, China

    Daquan Yu

Authors
  1. Tian Yu
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Contributions

All authors contributed to the study conception and design. Material preparation, data collection and analysis were performed by TY and DY. The first draft of the manuscript was written by TY and all authors commented on previous versions of the manuscript. All authors read and approved the final manuscript.

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Correspondence to Daquan Yu.

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Yu, T., Yu, D. Electrical performance characterization of glass substrate for millimeter-wave applications. J Mater Sci: Mater Electron 34, 126 (2023). https://doi.org/10.1007/s10854-022-09583-x

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