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Synthesis of centimeter-scale WS2 membrane by chemical vapor deposition

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Abstract

Transition metal dichalcogenides (TMDCs) are among the most widely studied two-dimensional materials due to their unique physical properties, but synthesis of large area of monolayer TMDCs films is still a great challenge. In this study, a simple and universal promoter-assisted chemical vapor deposition (CVD) method is proposed for the synthesis of centimeter-scale of Tungsten disulfide (WS2) membranes. The highly volatile transition metal halides formed by the reaction of Tungstic acid (H2WO4) and Sodium chloride (NaCl) effectively reduces the growth temperature of WS2, and the vulcanization energy barrier for the growth of WS2 monolayer, thus improve the growth rate along the in-plane direction. By optimizing the experimental parameters, high quality of WS2 films in centimeter-sizes are prepared. This study provides a method for the preparation of large-scale WS2 films and lays a foundation for the industrial application of large-scale two-dimensional materials.

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Data availability

The datasets generated during and/or analyzed during the current study are available from the corresponding author on reasonable request. All data generated or analyzed during this study are included in this published article.

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Acknowledgements

This work was supported in part by the National Science Foundation of China through Grant Nos. 61775214 and 61601433, Natural Science Foundation of Chongqing, China under Grant cstc2019jcyj-zdxmX0003 and Nos. cstc2019jcyj-msxmX0387, Project of Chongqing talents under the grant number of CQYC202002064, and Youth Innovation Promotion Association CAS.

Funding

This work was supported in part by the National Nature Science Foundation of China through Grant Nos. 61775214, Natural Science Foundation of Chongqing, China under grant cstc2019jcyj-zdxmX0003 and Nos. cstc2019jcyj-msxmX0387, Project of Chongqing talents under the grant number of CQYC202002064, and Youth Innovation Promotion Association CAS.

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Author notes

  1. Guoxin Zhang and Chunxiang Wang have contributed to this work equally.

Authors and Affiliations

  1. Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing, 400714, China

    Guoxin Zhang, Chunxiang Wang, Bing Yan, Bo Ning, Yang Zhao, Dahua Zhou, Xuan Shi, Sikai Chen, Jun Shen, Zeyun Xiao & Hongquan Zhao

  2. University of Chinese Academy of Sciences, Beijing, 100064, China

    Guoxin Zhang & Bing Yan

  3. College of Mechanical and Vehicle Engineering, Chongqing University, Chongqing, 400030, China

    Chunxiang Wang

  4. School of Optoelectronic Engineering, Chongqing University of Posts and Telecommunications, Chongqing, 400065, China

    Bo Ning, Yang Zhao & Sikai Chen

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  1. Guoxin Zhang
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Contributions

HZ conceived, leaded, designed, and administrated the whole work. GZ performed the experimental work and drafted the first version of manuscript. CW supported for the material synthesizing experiments, supplemented the XPS and XRD experiments, and drafted the first revision of the manuscript. BY finished the TEM and SEM tests. YZ supported for the data analysis. DZ supported the PL and Raman measurements. XS supported the collection of the whole experimental data and discussed the whole work. SC supported the preparation of the materials synthesis. JS and ZX supported the technique discussion.

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Correspondence to Xuan Shi or Hongquan Zhao.

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Zhang, G., Wang, C., Yan, B. et al. Synthesis of centimeter-scale WS2 membrane by chemical vapor deposition. J Mater Sci: Mater Electron 33, 22560–22572 (2022). https://doi.org/10.1007/s10854-022-09034-7

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