Abstract
In this study, palladium (Pd) and platinum (Pt) thin films are prepared via RF sputtering method with approximately 2 nm thicknesses on quartz substrates. Temperature-dependent resistances of Pd and Pt thin films are investigated at a temperature range from 30 to 130 °C. The results show that the resistance is directly proportional to temperature. The sensing properties of Pd and Pt thin films have been investigated depending on temperature and hydrogen concentration. It is found that Pt thin film shows higher sensitivity and lower limit of detection than Pd film, but the advantages of Pd thin film sensor are lower response time and unresponsive to the presence of oxygen compared to Pt thin film. The sensing mechanisms of Pd and Pt thin films are explained with continuous resistive H2 sensor type and surface scattering phenomenon, respectively. The response and recovery times of the films are decreased with rising H2 concentration and temperature.
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M. Momirlan, T.N. Veziroglu, Renew. Sustain. Energy Rev. 6(1), 141–179 (2002)
N. Sazali, Int. J. Hydrog. Energy 45(38), 18753–18771 (2020)
J.O. Abe, A.P.I. Popoola, E. Ajenifuja, O.M. Popoola, Int. J. Hydrog. Energy 44(29), 15072–15086 (2019)
T.S. King, M. Elia, J.O. Hunter, The Lancet 352(9135), 1187–1189 (1998)
W. Shin, Anal. Bioanal. Chem. 406(16), 3931–3939 (2014)
A. Rezaie, M. Buresi, A. Lembo, H. Lin, R. McCallum, S. Rao, M. Schmulson, M. Valdovinos, S. Zakko, M. Pimentel, N.A.C.G. Hydrogen, Am. J. Gastroenterol. 112(5), 775–784 (2017)
T. Huebert, L. Boon-Brett, G. Black, U. Banach, Sens. Actuat. B-Chem. 157(2), 329–352 (2011)
S.K. Arya, S. Krishnan, H. Silva, S. Jean, S. Bhansali, Analyst 137(12), 2743–2756 (2012)
H. Hashtroudi, P. Atkin, I.D.R. Mackinnon, M. Shafiei, Int. J. Hydrog. Energy 44(48), 26646–26664 (2019)
J. Dai, L. Zhu, G. Wang, F. Xiang, Y. Qin, M. Wang, M. Yang, Sensors 17(3), 577 (2017)
G. Korotcenkov, S.D. Han, J.R. Stetter, Chem. Rev. 109(3), 1402–1433 (2009)
N. Kilinc, Nanosci. Nanotechnol. Lett. 5(8), 825–841 (2013)
R.M. Penner, Acc. Chem. Res. 50(8), 1902–1910 (2017)
J.-S. Noh, J.M. Lee, W. Lee, Sensors 11(1), 825–851 (2011)
J. Lee, W. Shim, J.-S. Noh, W. Lee, ChemPhysChem 13(6), 1395–1403 (2012)
Y.-S. Shim, B. Jang, J.M. Suh, M.S. Noh, S. Kim, S.D. Han, Y.G. Song, D.H. Kim, C.-Y. Kang, H.W. Jang, W. Lee, Sens. Actuat. B 255, 1841–1848 (2018)
E. Lee, J.M. Lee, J.H. Koo, W. Lee, T. Lee, Int. J. Hydrog. Energy 35(13), 6984–6991 (2010)
K.J. Jeon, J.M. Lee, E. Lee, W. Lee, Nanotechnology 20(13), 135502 (2009)
J.-S. Jang, S. Qiao, S.-J. Choi, G. Jha, A.F. Ogata, W.-T. Koo, D.-H. Kim, I.-D. Kim, R.M. Penner, ACS Appl. Mater. Interfaces 9(45), 39464–39474 (2017)
F. Favier, E.C. Walter, M.P. Zach, T. Benter, R.M. Penner, Science 293(5538), 2227–2231 (2001)
N. Tasaltin, S. Ozturk, N. Kilinc, Z.Z. Ozturk, Appl. Phys. A-Mater. Sci. Process. 97(4), 745–750 (2009)
N. Tasaltin, S. Ozturk, N. Kilinc, Z.Z. Ozturk, J. Alloy. Compd. 509(14), 4701–4706 (2011)
E. Sennik, N. Kilinc, Z.Z. Ozturk, J. Appl. Phys. 108(5), 054317 (2010)
S. Ozturk, N. Kilinc, J. Alloy. Compd. 674, 179–184 (2016)
S.V. Patel, J.L. Gland, J.W. Schwank, Langmuir 15(9), 3307–3311 (1999)
K. Tsukada, K. Sakai, T. Kiwa, Appl. Phys. Express 5(3), 034102 (2012)
K. Tsukada, S. Takeichi, K. Sakai, T. Kiwa, Jpn. J. Appl. Phys. 53(7), 76701 (2014)
E. Sennik, S. Urdem, M. Erkovan, N. Kilinc, Mater. Lett. 177, 104–107 (2016)
T. Tanaka, S. Hoshino, T. Takahashi, K. Uchida, Sens. Actuat. B-Chem. 258, 913–919 (2018)
A. Abburi, N. Abrams, W.J. Yeh, J. Porous Mater. 19(5), 543–549 (2012)
A. Abburi, W.J. Yeh, IEEE Sens. J. 12(8), 2625–2629 (2012)
F. Yang, K.C. Donavan, S.C. Kung, R.M. Penner, Nano Lett. 12(6), 2924–2930 (2012)
H.W. Yoo, S.Y. Cho, H.J. Jeon, H.T. Jung, Anal. Chem. 87(3), 1480–1484 (2015)
F. Cao, P.F. Zhao, Z. Wang, X.H. Zhang, H. Zheng, J.B. Wang, D. Zhou, Y.M. Hu, H.S. Gu, Adv. Mater. Interfaces 6(1): (2019)
A. Uddin, U. Yaqoob, K. Hassan, G.S. Chung, Int. J. Hydrog. Energy 41(34), 15399–15410 (2016)
K. Rajoua, L. Baklouti, F. Favier, Phys. Chem. Chem. Phys. 20(1), 383–394 (2018)
K. Hassan, A.S.M.I. Uddin, G.S. Chung, Sens. Actuat. B-Chem. 234, 435–445 (2016)
M.H. Rahaman, U. Yaqoob, H.C. Kim, Sensors 19(1), 86 (2019)
A.N. Anna Anasthasiya, E. Prabhu, V. Jayaraman, K.I. Gnanasekar, Int. J. Hydrog. Energy 45(41), 22195–22203 (2020)
M. Ramanathan, G. Skudlarek, H.H. Wang, S.B. Darling, Nanotechnology 21(12), 125501 (2010)
Z. Shahzamani, M. Ranjbar, E. Comini, M.T. Goodarzi, H. Salamati, G. Sberveglieri, Int. J. Hydrog. Energy 44(31), 17185–17194 (2019)
X.Q. Zeng, M.L. Latimer, Z.L. Xiao, S. Panuganti, U. Welp, W.K. Kwok, T. Xu, Nano Lett. 11(1), 262–268 (2011)
P. Offermans, H.D. Tong, C.J.M. van Rijn, P. Merken, S.H. Brongersma, M. Crego-Calama, Appl. Phys. Lett. 94(22), 223110 (2009)
Y. Hu, J. Lei, Z. Wang, S. Yang, X. Luo, G. Zhang, W. Chen, H. Gu, Int. J. Hydrog. Energy 41(25), 10986–10990 (2016)
B.-J. Kim, J.-S. Kim, Int. J. Hydrog. Energy 39(29), 16500–16505 (2014)
T. Xu, M.P. Zach, Z.L. Xiao, D. Rosenmann, U. Welp, W.K. Kwok, G.W. Crabtree, Appl. Phys. Lett. 86(20), 203104 (2005)
Y.K. Gautam, R. Jain, S.K. Tanwar, R.D. Agrawal, R. Chandra, Sens. Actuat. B 176, 453–459 (2013)
S. Kim, B. Jang, J. Park, Y.-K. Lee, H.-S. Lee, S. Cho, W. Lee, Sens. Actuat. B-Chem. 230, 367–373 (2016)
K. Yu, X. Tian, X. Wang, F. Yang, T. Qi, J. Zuo, Sens. Actuat. B 299, 126989 (2019)
S. Kajita, S. Yamaura, H. Kimura, A. Inoue, Sens. Actuat. B 150(1), 279–284 (2010)
Y. Fukai, The Metal-Hydrogen System: Basic Bulk Properties (Springer, Berlin, Heidelberg, 2012).
F.A. Lewis, The Palladium Hydrogen System (Academic Press, London, 1967).
S.F. Yu, U. Welp, L.Z. Hua, A. Rydh, W.K. Kwok, H.H. Wang, Chem. Mater. 17(13), 3445–3450 (2005)
F. Rumiche, H.H. Wang, W.S. Hu, J.E. Indacochea, M.L. Wang, Sens. Actuat. B 134(2), 869–877 (2008)
A.J. Corso, A. Martucci, M. Bazzan, P. Zuppella, D. Garoli, M.G. Pelizzo, J. Alloy. Compd. 704, 303–310 (2017)
M. Khanuja, B.R. Mehta, P. Agar, P.K. Kulriya, D.K. Avasthi, Hydrogen induced lattice expansion and crystallinity degradation in palladium nanoparticles: Effect of hydrogen concentration, pressure, and temperature. J. Appl. Phys. 106, 93515 (2009)
M. Suleiman, N.M. Jisrawi, O. Dankert, M.T. Reetz, C. Bahtz, R. Kirchheim, A. Pundt, J. Alloy. Compd. 356, 644–648 (2003)
B. Ingham, M.F. Toney, S.C. Hendy, T. Cox, D.D. Fong, J.A. Eastman, P.H. Fuoss, K.J. Stevens, A. Lassesson, S.A. Brown, M.P. Ryan, Phys. Rev. B 78(24), 245208 (2008)
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This study was supported by Scientific and Technological Research Council of Turkey (TUBITAK, Project Number: 114M853).
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Kilinc, N. Palladium and platinum thin films for low-concentration resistive hydrogen sensor: a comparative study. J Mater Sci: Mater Electron 32, 5567–5578 (2021). https://doi.org/10.1007/s10854-021-05279-w
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DOI: https://doi.org/10.1007/s10854-021-05279-w