Abstract
A nanoporous platinum (np-Pt) thin film based hydrogen sensor was fabricated and studied. The np-Pt thin films were fabricated through a method of chemical dealloying and coarsening starting from a CuPt alloy. The alloy thin films of CuxPt1−x were deposited by sputtering copper and platinum at the same time. The dealloying process completely removed the copper from the film. We demonstrate a method to control the porosity of np-Pt by a method of coarsening. Scanning electron microscopy confirmed the presence of porosity with size ranging from a few nanometers to tens of nanometers. A sensor device with four electrodes was fabricated on the np-Pt thin films using a stainless steel mask and by sputtering copper. The electrical characteristics of the sensor exhibit marked sensitivity or current changes in the presence of hydrogen. The results demonstrate that np-Pt thin films configured as a gas sensor have high sensitivity to hydrogen.
Similar content being viewed by others
References
A. Prakash, A.V. McCormick, M.R. Zachariah, Chem. Mater. 16, 1466 (2004)
S.B. Yoon, J.Y. Kim and J.-S. Yu, Chem. Commun. (14), 1536 (2002)
J. Erlebacher, M.J. Aziz, A. Karma, N. Dimitrov, K. Sieradzki, Nature 410, 450 (2001)
A.J. Forty, Nature 282, 597 (1979)
R. Li, K. Sieradzki, Phys. Rev. Lett. 68, 1168 (1992)
J. Erlebacher, K. Sieradzki, Scripta Mater. 49, 991 (2003)
X. Lu, E. Bischoff, R. Spolenak, T.J. Balk, Scripta Mater. 56, 557 (2007)
S. Parida, D. Kramer, C.A. Volkert, H. Rosner, J. Erlebacher, J. Weissmuller, Phys. Rev. Lett. 97, 035504 (2006)
C. Zhao, Z. Qi, X. Wang, Z. Zhang, Corros. Sci. 51, 2120 (2009)
W.J. Yeh, S. Chava, J. Vac. Sci. Technol. B Microelectron. Nanometer Struct. 27, 923 (2009)
H.B. Lu, Y. Li, F.H. Wang, Scripta Mater. 56, 165 (2007)
L. Sun, C.-L. Chien, P.C. Searson, Chem. Mater. 16, 3125 (2004)
G.S. Attard, P.N. Bartlett, N.R.B. Coleman, J.M. Elliott, J.R. Owen, J.H. Wang, Science 278, 838 (1997)
P. Jiang, J.F. Bertone, V.L. Colvin, Science 291, 453 (2001)
X. Peng, K. Koczkur, S. Nigro and A, Chen, Chem. Commun. (24), 2872 (2004)
L. Hongtao et al., Nanotechnology 17, 2167 (2006)
J.C. Thorp, K. Sieradzki, L. Tang, P.A. Crozier, A. Misra, M. Nastasi, D. Mitlin, S.T. Picraux, Appl. Phys. Lett. 88, 033110 (2006)
A. Antoniou, D. Bhattacharrya, J.K. Baldwin, P. Goodwin, M. Nastasi, S.T. Picraux, A. Misra, Appl. Phys. Lett. 95, 073116 (2009)
J.-F. Huang, I.W. Sun, Chem. Mater. 16, 1829 (2004)
D.V. Pugh, A. Dursun, S.G. Corcoran, J. Mater. Res. 18, 216 (2003)
J. Erlebacher, J. Electrochem. Soc. 151, C614 (2004)
Acknowledgments
FESEM, EDS data from Franklin Bailey, Center for Electron Microscopy & Microanalysis, University of Idaho is acknowledged. This work was partially supported by the National Science Foundation grant NSF PHY-0754360.
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Abburi, A., Abrams, N. & Yeh, W.J. Synthesis of nanoporous platinum thin films and application as hydrogen sensor. J Porous Mater 19, 543–549 (2012). https://doi.org/10.1007/s10934-011-9503-8
Published:
Issue Date:
DOI: https://doi.org/10.1007/s10934-011-9503-8