Skip to main content
SpringerLink
Log in

Highly photoresponsive VO2(M1) thin films synthesized by DC reactive sputtering

  • Published:
Journal of Materials Science: Materials in Electronics Aims and scope Submit manuscript

Abstract

We report synthesis, characterization and IR photoresponse properties of 150 ± 10 nm thick high quality VO2(M1) thin films synthesized by DC reactive sputtering. Phase formation was confirmed by X-ray diffraction and Raman spectroscopic measurements. Morphology and microstructure were analysed by atomic force microscope, scanning electron microscope and transmission electron microscope which revealed polycrystalline nature of nanosized films with root mean square (rms) roughness value of 8 ± 0.7 nm. Electrical measurements revealed 1st order transition of thin films with a change in resistance of more than two orders of magnitude and temperature coefficient of resistance, TCR of − 1.24% K−1 at 30 °C. The fabricated VO2(M1) IR photodetector exhibited excellent reproducible photoresponse properties when subjected to a 1064 nm laser under 250 mW cm−2 power density with a bias voltage of 5 V at the ambient conditions of temperature and pressure. The sensitivity, responsivity, external quantum efficiency and specific detectivity were observed to be 1775%, 40.09 mA W−1, 4.67% and 7.07 × 1011 Jones, respectively.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7

Similar content being viewed by others

References

  1. C. Wu, F. Feng, Y. Xie, Chem. Soc. Rev. 42, 5157 (2013)

    CAS  Google Scholar 

  2. J. Nag, R.F. Haglund, J. Phys. Condens. Matter 20, 264016 (2008)

    Google Scholar 

  3. Y. E. & J.J.A.-G.C.L. Gomez-Heredia, J.A. Ramirez-Rincon, D. Bhardwaj, P. Rajasekar, I.J. Tadeo, J.L. Cervantes-Lopez, J. Ordonez-Miranda, O. Ares, A.M. Umarji, J. Drevillon, K. Joulain, Sci. Rep. 9, 1 (2019)

    CAS  Google Scholar 

  4. A. Zylbersztejn, N.F. Mott, Phys. Rev. B 11, 4383 (1975)

    CAS  Google Scholar 

  5. G. Stefanovich, A. Pergament, D. Stefanovich, J. Phys. Condens. Matter 12, 8837 (2000)

    CAS  Google Scholar 

  6. H. Choi, J. Ahn, J. Jung, T. Noh, D. Kim, Phys. Rev. B 54, p. 4621, (1996).

    CAS  Google Scholar 

  7. D. Ruzmetov, D. Heiman, B.B. Claflin, V. Narayanamurti, S. Ramanathan, Phys. Rev. B 79, 10 (2009)

    Google Scholar 

  8. M. Liu, H.Y. Hwang, H. Tao, A.C. Strikwerda, K. Fan, G.R. Keiser, A.J. Sternbach, K.G. West, S. Kittiwatanakul, J. Lu, S.A. Wolf, F.G. Omenetto, X. Zhang, K.A. Nelson, R.D. Averitt, Nature 487, 345 (2012)

    CAS  Google Scholar 

  9. J.M. Wu, L.B. Liou, J. Mater. Chem. 21, 5499 (2011)

    CAS  Google Scholar 

  10. Z. Zhang, Y. Gao, Z. Chen, J. Du, C. Cao, L. Kang, H. Luo, Langmuir 26, 10738 (2010)

    CAS  Google Scholar 

  11. Y. Hu, C.H. Lin, S. Min, R.L. Smith, S. Roberts, J. Optoelectron. Mater. Eng. 8, 345 (2017)

    Google Scholar 

  12. B. Wang, J. Lai, H. Li, H. Hu, S. Chen, Infrared Phys. Technol. 57, 8 (2013)

    CAS  Google Scholar 

  13. I.J. Tadeo, E.P. Mukhokosi, S.B. Krupanidhi, A.M. Umarji, RSC Adv. 9, 9983 (2019)

    CAS  Google Scholar 

  14. A. Rúa, F.E. Fernández, N. Sepúlveda, J. Appl. Phys. 107, 1 (2010)

    Google Scholar 

  15. J. Hou, B. Wang, Z. Ding, R. Dai, Z. Wang, Z. Zhang, J. Zhang, Appl. Phys. Lett. 111, 072107 (2017)

    Google Scholar 

  16. J. Hou, Z. Wang, Z. Ding, Z. Zhang, J. Zhang, Sol. Energy Mater. Sol. Cells 176, 142 (2018)

    CAS  Google Scholar 

  17. J.S. Dam, P. Tidemand-lichtenberg, C. Pedersen, Nat. Photonics 6, 788 (2012)

    CAS  Google Scholar 

  18. S.F. Tedde, J. Fu, M.V. Kovalenko, T. Rauch, M. Bo, U. Lemmer, W. Heiss, O. Hayden, Nat. Photonics 3, 332 (2009)

    Google Scholar 

  19. M.M. Lee, J. Teuscher, T. Miyasaka, T.N. Murakami, H.J. Snaith, Science 338, p. 643, (2012).

    CAS  Google Scholar 

  20. S.A. Mcdonald, G. Konstantatos, S. Zhang, P.W. Cyr, E.J.D. Klem, L. Levina, E.H. Sargent, Nat. Mater. 4, 138 (2005)

    CAS  Google Scholar 

  21. Z. Li, Z. Hu, J. Peng, C. Wu, Y. Yang, F. Feng, P. Gao, J. Yang, Y. Xie, Adv. Funct. Mater. 24, 1821 (2014)

    CAS  Google Scholar 

  22. M. Shahid, J. Cheng, T. Li, M.A. Khan, Y. Wang, Y. Hu, M. Zhang, J. Yang, H.S. Aziz, C. Wan, H. Nishijima, W. Pan, J. Mater. Chem. C 6, 6510 (2018)

    CAS  Google Scholar 

  23. K.K.N. Mukhokosi, P. Emma, Phys. Status Solidi (A) 215, p. 1800470, (2018).

    Google Scholar 

  24. and Y.X. Changzheng Wu, J. Dai, X. Zhang, J. Yang, F. Qi, C. Gao, Angew. Chem. 122, 138 (2010)

    Google Scholar 

  25. F.H. Chen, L.L. Fan, S. Chen, G.M. Liao, Y.L. Chen, P. Wu, L. Song, C.W. Zou, Z.Y. Wu, ACS Appl. Mater. Interfaces 7, 6875 (2015)

    CAS  Google Scholar 

  26. J. Yoon, H. Kim, X. Chen, N. Tamura, B.S. Mun, C. Park, H. Ju, ACS Appl. Mater. Interfaces 8, 2280 (2016)

    CAS  Google Scholar 

  27. J. Jian, X. Wang, L. Li, M. Fan, W. Zhang, J. Huang, Z. Qi, H. Wang, ACS Appl. Mater. Interfaces 9, 5319 (2017)

    CAS  Google Scholar 

  28. D.H. Kim, H.S. Kwok, Appl. Phys. Lett. 65, 3188 (1994)

    CAS  Google Scholar 

  29. D. Bhardwaj, A. Goswami, A.M. Umarji, J. Appl. Phys. 124, 135301 (2018)

    Google Scholar 

  30. D. Ruzmetov, K.T. Zawilski, S.D. Senanayake, V. Narayanamurti, S. Ramanathan, J. Phys. Condens. Matter 20, 465204 (2008)

    Google Scholar 

  31. M. Soltani, S. Toubou, R. Karmouch, J. Mater. Sci. Mater. Electron. 30, 1 (2019)

    CAS  Google Scholar 

  32. F. Ureña-Begara, A. Crunteanu, J.P. Raskin, Appl. Surf. Sci. 403, 717 (2017)

    Google Scholar 

  33. Y. Ningyi, L. Jinhua, L. Chenglu, Appl. Surf. Sci. 191, 176 (2002)

    Google Scholar 

  34. C.S. Blackman, C. Piccirillo, R. Binions, I.P. Parkin, Thin Solid Films 517, 4565 (2009)

    CAS  Google Scholar 

  35. B.W. Mwakikunga, E. Sideras-Haddad, M. Maaza, Opt. Mater. 29, p. 481, (2007).

    CAS  Google Scholar 

  36. M. Benkahoul, M.K. Zayed, A. Solieman, S.N. Alamri, J. Alloys Compd. 704, 760 (2017)

    CAS  Google Scholar 

  37. M.M. Margoni, S. Mathuri, K. Ramamurthi, R.R. Babu, K. Sethuraman, Thin Solid Films 606, 51 (2016)

    CAS  Google Scholar 

  38. M. Li, S. Ji, J. Pan, H. Wu, L. Zhong, Q. Wang, J. Mater. Chem. A 2, 20470 (2014)

    CAS  Google Scholar 

  39. M. Wan, B. Liu, S. Wang, L. Hu, Y. He, H. Tao, X. Zhao, J. Alloys Compd. 706, 289 (2017)

    CAS  Google Scholar 

  40. Z. Yang, C. Ko, S. Ramanathan, Annu. Rev. Mater. Res. 41, 337 (2011)

    CAS  Google Scholar 

  41. C. L. and G. Nihoul, Phys. Rev. B 57, 5111 (1997)

    Google Scholar 

  42. S. Lee, I.N. Ivanov, J.K. Keum, H.N. Lee, Sci. Rep. 6, 1 (2016)

    Google Scholar 

  43. R. Bharathi, R. Naorem, A.M. Umarji, J. Phys. D Appl. Phys. 48, 305103 (2015)

    Google Scholar 

  44. R. Baddour-Hadjean, V. Golabkan, J.P. Pereira-Ramos, A. Mantoux, D. Lincot, J. Raman Spectrosc. 33, 631 (2002)

    CAS  Google Scholar 

  45. M. Castriota, E. Cazzanelli, A. Fasanella, D. Teeters, Thin Solid Films 553, 127 (2014)

    CAS  Google Scholar 

  46. S.H. Lee, H.M. Cheong, M.J. Seong, P. Liu, C.E. Tracy, A. Mascarenhas, J.R. Pitts, S.K. Deb, Solid State Ionics 165, 111 (2003)

    CAS  Google Scholar 

  47. Q. Su, C.K. Huang, Y. Wang, Y.C. Fan, B.A. Lu, W. Lan, Y.Y. Wang, X.Q. Liu, J. Alloys Compd. 475, 518 (2009)

    CAS  Google Scholar 

  48. L. Abello, E. Husson, Y. Repelin, G. Lucazeau, Spectrochim. Acta 39A, 641 (1983)

    CAS  Google Scholar 

  49. P. Schilbe, Phys. B 316–317, 600 (2002)

    Google Scholar 

  50. C. Chen, R. Wang, L. Shang, C. Guo, Appl. Phys. Lett. 93, 2 (2008)

    Google Scholar 

  51. F.D. Hardcastle, I.E. Wachs, J. Raman Spectrosc. 21, 683 (1990)

    CAS  Google Scholar 

  52. S. Dou, Y. Wang, X. Zhang, Y. Tian, X. Hou, J. Wang, X. Li, J. Zhao, Y. Li, Sol. Energy Mater. Sol. Cells 160, 164 (2017)

    CAS  Google Scholar 

  53. F.J. Morin, Phys. Rev. Lett. 3, 34 (1959)

    CAS  Google Scholar 

  54. N. Chi-Anh, H.J. Shin, K. Kim, Y.H. Han, S. Moon, Sens. Actuators A 123–124, p. 87, (2005).

    Google Scholar 

  55. B.D. Gauntt, E.C. Dickey, M.W. Horn, J. Mater. Res. 24, 1590 (2009)

    CAS  Google Scholar 

  56. W. Lixia, L.I. Jianping, G.A.O. Xiaoguang, H.E. Xiuli, Prog. Nat. Sci. 16, 1193 (2006)

    Google Scholar 

  57. Z. Yang, S. Hart, C. Ko, A. Yacoby, S. Ramanathan, J. Appl. Phys. 110, 033725 (2011)

    Google Scholar 

  58. Z. Jia, J. Xiang, F. Wen, R. Yang, C. Hao, Z. Liu, ACS Appl. Mater. Interfaces 8, 4781 (2016)

    CAS  Google Scholar 

  59. E.P. Mukhokosi, S.B. Krupanidhi, K.K. Nanda, Sci. Rep. 7, 15215 (2017)

    Google Scholar 

  60. W.B. Fu, G.L. Shang, X.X. Gong, L. De Zhang, G.T. Fei, J. Mater. Chem. C 5, 1471 (2017)

    CAS  Google Scholar 

  61. C. Ko, Z. Yang, S. Ramanathan, ACS Appl. Mater. Interfaces 3, 3396 (2011)

    CAS  Google Scholar 

  62. G. Xu, C.-M. Huang, M. Tazawa, P. Jin, D.-M. Chen, L. Miao, Appl. Phys. Lett. 93, 061911 (2008)

    Google Scholar 

  63. H. Zhou, X. Cao, M. Jiang, S. Bao, P. Jin, Laser Photonics Rev. 8, 617 (2014)

    CAS  Google Scholar 

  64. L. Wang, J. Jie, Z. Shao, Q. Zhang, X. Zhang, Y. Wang, Z. Sun, S.T. Lee, Adv. Funct. Mater. 25, 2910 (2015)

    CAS  Google Scholar 

  65. B. Murali, S.B. Krupanidhi, J. Appl. Phys. 114, 144312 (2013)

    Google Scholar 

  66. L. Zeng, L. Tao, C. Tang, B. Zhou, H. Long, Y. Chai, S.P. Lau, Y.H. Tsang, Sci. Rep. 6, 20343 (2016)

    CAS  Google Scholar 

  67. H. Deng, X. Yang, D. Dong, B. Li, D. Yang, S. Yuan, K. Qiao, Y.B. Cheng, J. Tang, H. Song, Nano Lett. 15, 7963 (2015)

    CAS  Google Scholar 

  68. W. Feng, J. Bin Wu, X. Li, W. Zheng, X. Zhou, K. Xiao, W. Cao, B. Yang, J.C. Idrobo, L. Basile, W. Tian, P.H. Tan, P.A. Hu, J. Mater. Chem. C 3, 7022 (2015)

    CAS  Google Scholar 

  69. W. Choi, M.Y. Cho, A. Konar, J.H. Lee, G.B. Cha, S.C. Hong, S. Kim, J. Kim, D. Jena, J. Joo, S. Kim, Adv. Mater. 24, p. 5832, (2012).

    CAS  Google Scholar 

Download references

Acknowledgements

Authors greatly acknowledge Division of Chemical Sciences, Indian Institute of Science, Bengaluru for providing TEM facility. Micro and Nano Characterization Facility (MNCF) at Centre for Nano Science and Engineering (CeNSE), Indian Institute of Science, Bengaluru is highly acknowledged for providing XPS facility. The authors would also like to thank FIST for providing funds for XRD facilities. Inyalot Jude Tadeo offers heartfelt gratitude to the Office of International Relations (OIR), Indian Institute of Science, Bengaluru for granting him Ph.D. scholarship. Devanshi Bhardwaj thanks CSIR for providing Ph.D. scholarship. Saluru B. Krupanidhi acknowledges Fellowship Grant from Indian National Science Academy.

Author information

Authors and Affiliations

  1. Materials Research Centre, Indian Institute of Science, Bengaluru, 560012, India

    Inyalot Jude Tadeo, Devanshi Bhardwaj, D. Sheela, Saluru B. Krupanidhi & Arun M. Umarji

  2. Central Research Laboratory, Bharat Electronics Limited, Bengaluru, 560097, India

    D. Sheela

Authors
  1. Inyalot Jude Tadeo
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Devanshi Bhardwaj
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. D. Sheela
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Saluru B. Krupanidhi
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Arun M. Umarji
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Arun M. Umarji.

Additional information

Publisher's Note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Tadeo, I.J., Bhardwaj, D., Sheela, D. et al. Highly photoresponsive VO2(M1) thin films synthesized by DC reactive sputtering. J Mater Sci: Mater Electron 31, 4687–4695 (2020). https://doi.org/10.1007/s10854-020-03023-4

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10854-020-03023-4

Search

Navigation