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Effect of deposition ambient on structural and optical properties of MgxZn1−xO alloy thin films grown by RF sputtering

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Abstract

MgxZn1−xO thin films were deposited on Corning eagle 2,000 glass substrates by a RF magnetron sputtering using a ceramic target. The effect of Ar/O2 ratios on structural and optical properties was investigated. The XRD results showed that the film demonstrated the best structural properties when the Ar/O2 ratio equal 7:3. Sputtering ambient seemed to have minor effect on the optical properties of MgxZn1−xO thin films.

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Acknowledgments

This work was supported by the “Hundred Talents Program,” the Chinese Academy of Sciences, the Zhejiang Natural Science Foundation (Y407364), and the Ningbo Natural Science Foundation (No. 2007A610027, No. 2008A610047, No. 2009A610018). The authors would give thanks to the all measurers of XRD, SEM, XPS and UV–Vis absorption spectroscopy of Ningbo Institute of Material Technology & Engineering Chinese Academy of Science.

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Authors and Affiliations

  1. Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences, 315201, Ningbo, People’s Republic of China

    Jia Li, Jin-Hua Huang, Wei-Jie Song & Ye Yang

  2. Shanghai Institute of Ceramics, Chinese Academy of Sciences, 200050, Shanghai, People’s Republic of China

    Jia Li & Xiao-Min Li

  3. College of Information Science and Engineering, Ningbo University, No. 818 Fenghua Road, 315211, Ningbo, Jiangbei District, People’s Republic of China

    Rui-Qin Tan

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  1. Jia Li
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  2. Jin-Hua Huang
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  5. Ye Yang
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Correspondence to Wei-Jie Song.

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Li, J., Huang, JH., Song, WJ. et al. Effect of deposition ambient on structural and optical properties of MgxZn1−xO alloy thin films grown by RF sputtering. J Mater Sci: Mater Electron 21, 1327–1331 (2010). https://doi.org/10.1007/s10854-010-0070-6

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  • DOI: https://doi.org/10.1007/s10854-010-0070-6

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