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Plasma parameters and volume kinetics in Cl2/O2 mixtures

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Abstract

We investigated plasma characteristics, plasma mass content and kinetic dependencies of both neutral and charged particle formation and decay in Cl2/O2 gas mixture. For these purposes we used a combination of experimental methods (optical emission spectroscopy, Langmuir probe) and a plasma modeling on the base of self-consistent solution of Boltzmann kinetic equation together with balance kinetic equations for neutral and charged particles in a quasi-stationary approximation. It was found that the change of O2/(Cl2+O2) mixing ratio from 0 to 0.2 leads to an increase of electron average energy and electron energy distribution function (EEDF) deformation. The main mechanisms of Cl and O atom formation are the direct electron impact dissociation of corresponding molecules while the contribution of all possible “secondary” processes is not significant in the case of a relatively low O2 addition.

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Authors and Affiliations

  1. Department of Microelectronic Devices Materials Technology, Ivanovo State University of Chemistry & Technology, 153460, F. Engels st., 7, Ivanovo, Russia

    A. Efremov

  2. Department of Electronics, Hanseo University, 360 Daegok-Ri, Haemi-Myun, Chung-Nam, 356-820, Korea

    C.-S. Park & S.-I. Choi

  3. School of Electrical and Electronic Eng., Chung-Ang University, 221, Huksuk-Dong, Dongjak-Gu, Seoul, 156-756, Korea

    C. I. Kim

  4. Department of Electronics, Hoseo University, 21 Sechul-Ri, Baebang-Myun, Asan, Chung-Nam, 336-795, Korea

    S.-H. Chai

  5. Department of Control & Instrumentation Engineering, Korea University at Jochiwon, Chungnam, 339-700, Korea

    K.-H. Kwon

Authors
  1. A. Efremov
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  2. K.-H. Kwon
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  3. C.-S. Park
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  4. S.-I. Choi
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  5. C. I. Kim
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  6. S.-H. Chai
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Efremov, A., Kwon, KH., Park, CS. et al. Plasma parameters and volume kinetics in Cl2/O2 mixtures. J Mater Sci: Mater Electron 16, 315–321 (2005). https://doi.org/10.1007/s10854-005-1141-y

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  • DOI: https://doi.org/10.1007/s10854-005-1141-y

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