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Effect of the mixture composition on the electrophysical parameters and emission spectra of CF2Cl2/Ar and CF2Cl2/He plasma

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Abstract

The effect of the mixture was analyzed on the electrophysical parameters and emission spectra of CF2Cl2/Ar and CF2Cl2/He plasma. Data on the gas temperature and reduced electric field intensity are obtained. Based on the analysis of the plasma emission spectra, it is suggested that the dilution of CF2Cl2 with argon or helium, even in a 1-to-1 ratio, does not cause significant changes in the concentration of Cl atoms.

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Authors and Affiliations

  1. Research Institute for Thermodynamics and Kinetics of Chemical Processes, Ivanovo State University of Chemistry and Technology, Ivanovo, 153000, Russia

    S. A. Pivovarenok

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  1. S. A. Pivovarenok
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Correspondence to S. A. Pivovarenok.

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Original Russian Text © S.A. Pivovarenok, 2017, published in Mikroelektronika, 2017, Vol. 46, No. 4.

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Pivovarenok, S.A. Effect of the mixture composition on the electrophysical parameters and emission spectra of CF2Cl2/Ar and CF2Cl2/He plasma. Russ Microelectron 46, 267–271 (2017). https://doi.org/10.1134/S1063739717040072

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  • DOI: https://doi.org/10.1134/S1063739717040072

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