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Polycrystalline silicon foils by flash lamp annealing of spray-coated silicon nanoparticle dispersions

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Abstract

A novel technique for the preparation of thin silicon foils (d ≈ 10 µm) starting from silicon nanoparticle dispersions is reported. The basic steps are ultrasonic spray coating of mixtures of silicon nanoparticles and organosilicon compounds and subsequent flash lamp annealing (FLA). The organosilicon compounds are used to stabilize the silicon nanoparticles in dispersion. The FLA induces melting of the silicon nanoparticles which transform into polycrystalline silicon thin films. Parameter adjustment (e.g., pressure, flash duration, flash energy, and substrate temperature) allows for the preparation of thin films as well as free-standing and flexible silicon foils. If the sprayed film thickness reaches a critical value (d ≈ 20 µm) and the FLA is performed under vacuum conditions (5 × 10−3 mbar), then the film peels off from the molybdenum substrate. In a following step, the foil is flashed by FLA from the backside. This method targets thin silicon foils exhibiting thicknesses between 5 and 10 µm. The lateral size of silicon foils depends on the setup used. In this work, samples with a maximum area of approximately 5 × 5 cm2 were produced. The silicon foils were investigated by scanning electron microscopy and spectroscopic ellipsometry to determine thickness, surface structure, and the effective dielectric response. The compositions (Si, C, and O) and the bond characteristics of Si–O and Si–C were analyzed by means of energy dispersive X-ray spectroscopy and X-ray photoemission spectroscopy. Transmission electron microscopy and X-ray diffraction provided the average sizes of the silicon nanoparticles before and after FLA. A rough estimation of the free charge carrier concentration [n el ≈ (1013–1014) cm−3] was possible by electrical four-point probe measurements taking into account information on crystallite sizes.

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Acknowledgements

The authors thank the Joint Solar Silicon company for providing the raw material of silicon nanoparticles as well as the Dresden Thin Film Technology GmbH for the development of an individually customized flash lamp annealing system. Dr. Andreas Liebig is thanked for PXRD measurements. The authors acknowledge the financial support by the Bundesministerium für Bildung und Forschung (BMBF) (FKZ: 13N11081), the Staatsministerium für Wissenschaft und Kunst (SMWK, Saxonian Ministry for Science and Art), and the Fonds der Chemischen Industrie.

Conflict of interest

The authors declare that they have no conflict of interest.

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Authors and Affiliations

  1. Fakultät für Naturwissenschaften, Institut für Chemie, Koordinationschemie, Technische Universität Chemnitz, 09107, Chemnitz, Germany

    B. Büchter, R. Fritzsche & M. Mehring

  2. Fakultät für Naturwissenschaften, Institut für Physik, Halbleiterphysik, Technische Universität Chemnitz, 09107, Chemnitz, Germany

    F. Seidel, D. Lehmann, D. Bülz, H. Freitag & D. R. T. Zahn

  3. Fakultät für Naturwissenschaften, Institut für Chemie, Anorganische Chemie, Technische Universität Chemnitz, 09107, Chemnitz, Germany

    R. Buschbeck, A. Jakob & H. Lang

  4. Fakultät für Naturwissenschaften, Institut für Physik, Analytik an Festkörperoberflächen, Technische Universität Chemnitz, 09107, Chemnitz, Germany

    S. Schulze & M.  Hietschold

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  1. B. Büchter
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Correspondence to M. Mehring.

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Büchter, B., Seidel, F., Fritzsche, R. et al. Polycrystalline silicon foils by flash lamp annealing of spray-coated silicon nanoparticle dispersions. J Mater Sci 50, 6050–6059 (2015). https://doi.org/10.1007/s10853-015-9154-2

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