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Ultrasonic spray coating and flash lamp annealing of silicon nanoparticle dispersions for silicon thin film formation

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Abstract

Ultrasonic spray coating is reported as a deposition method for thin silicon films using a mixture of silicon nanoparticles and organosilicon compounds. The as-deposited films were treated by flash lamp annealing (FLA) using xenon light in order to obtain polycrystalline silicon. The nanoparticles were characterized by diffuse reflection infrared Fourier transform spectroscopy, transmission electron microscopy, and powder X-ray diffraction prior to deposition and film formation. The effect of FLA on the morphology of silicon films obtained from these silicon nanoparticles is investigated. Thin polycrystalline films up to 4 µm with a silicon content up to 95 % were prepared by combining the use of ultrasonic spray coating and FLA.

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Acknowledgements

The Bundesministerium für Bildung und Forschung (BMBF) (FKZ: 13N11081), the Staatsministerium für Wissenschaft und Kunst (SMWK, Saxonian Ministry for Science and Art), and the Fonds der Chemischen Industrie is acknowledged for financial support. The authors thank the Joint Solar Silicon company for providing the raw material of silicon nanoparticles as well as the Dresden Thin Film Technology GmbH for the development of an individually customized flash lamp annealing system. Dr. Andreas Liebig is acknowledged for PXRD measurements.

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Authors and Affiliations

  1. Koordinationschemie, Institut für Chemie, Fakultät für Naturwissenschaften, Technische Universität Chemnitz, Chemnitz, 09107, Germany

    Benjamin Büchter, Ronny Fritzsche & Michael Mehring

  2. Halbleiterphysik, Institut für Physik, Fakultät für Naturwissenschaften, Technische Universität Chemnitz, Chemnitz, 09107, Germany

    Falko Seidel, Iulia Toader, Hans Freitag & Dietrich R. T. Zahn

  3. Anorganische Chemie, Institut für Chemie, Fakultät für Naturwissenschaften, Technische Universität Chemnitz, Chemnitz, 09107, Germany

    Roy Buschbeck, Alexander Jakob & Heinrich Lang

  4. Analytik an Festkörperoberflächen, Fakultät für Naturwissenschaften, Institut für Physik, Technische Universität Chemnitz, Chemnitz, 09107, Germany

    Steffen Schulze & Michael Hietschold

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  1. Benjamin Büchter
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  2. Falko Seidel
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  8. Hans Freitag
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  9. Heinrich Lang
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  10. Michael Hietschold
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  11. Dietrich R. T. Zahn
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  12. Michael Mehring
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Correspondence to Michael Mehring.

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Büchter, B., Seidel, F., Fritzsche, R. et al. Ultrasonic spray coating and flash lamp annealing of silicon nanoparticle dispersions for silicon thin film formation. J Mater Sci 49, 7979–7990 (2014). https://doi.org/10.1007/s10853-014-8505-8

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  • DOI: https://doi.org/10.1007/s10853-014-8505-8

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