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Microstructure of ZnO films synthesized on MgAl2O4 from low-temperature aqueous solution: growth and post-annealing

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Abstract

The microstructure of ZnO films synthesized from low-temperature (90 °C) aqueous solution on (111) MgAl2O4 single crystal substrates was characterized by X-ray diffraction, high-resolution scanning electron microscopy, conventional and high-resolution transmission electron microscopy. To examine the thermally activated microstructural evolution of the ZnO, both as-deposited and annealed films were characterized. The ZnO films were confirmed to have a ZnO\( [10\bar{1}0](0001)\left\| {{\text{MgAl}}_{ 2} {\text{O}}_{4} [011](1\bar{1}1)} \right. \) orientation relationship, with Zn polarity normal to the surface. Despite their highly oriented nature, the ZnO films have a columnar grain structure with low-angle (<2.5°) grain boundaries. In addition to lattice dislocations forming low-angle grain boundaries, threading dislocations were observed, emanating from the interface with the substrate. In annealed films, thermally generated voids were observed and appeared to preferentially form at grain boundaries and dislocations. Based on these characterization results, mechanisms are proposed for film growth and microstructural evolution. Finally, the diffusion coefficient of vacancies via dislocations at grain boundaries in the produced ZnO films was estimated.

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Acknowledgements

E. Zolotoyabko is gratefully acknowledged for his assistance with the high-resolution XRD experiments. The authors acknowledge partial support of this research from a joint United States–Israel Binational Science Foundation Grant (BSF Grant 2008103), and the Russell Berrie Nanotechnology Institute at the Technion. BN acknowledges the support of the Irwin and Joan Jacobs Fellowship. JJR acknowledges the support of the United States National Science Foundation under Grant No. 095254.

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Author notes

  1. Magnus Garbrecht

    Present address: Thin Film Physics Division, IFM, Linköping University, Linköping, Sweden

Authors and Affiliations

  1. Department of Materials Science and Engineering, Technion, Israel Institute of Technology, Haifa, Israel

    Boris Nijikovsky, Magnus Garbrecht & Wayne D. Kaplan

  2. Materials Department, University of California Santa Barbara, Santa Barbara, CA, USA

    Jacob J. Richardson & Steven P. DenBaars

Authors
  1. Boris Nijikovsky
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  2. Jacob J. Richardson
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  3. Magnus Garbrecht
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  4. Steven P. DenBaars
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  5. Wayne D. Kaplan
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Corresponding author

Correspondence to Wayne D. Kaplan.

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Nijikovsky, B., Richardson, J.J., Garbrecht, M. et al. Microstructure of ZnO films synthesized on MgAl2O4 from low-temperature aqueous solution: growth and post-annealing. J Mater Sci 48, 1614–1622 (2013). https://doi.org/10.1007/s10853-012-6918-9

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