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Laser transfer processing of thick film lead zirconate titanate and removal of damage layer

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Abstract

A mechanical polishing technique is demonstrated for the effective removal of the interfacial region of a lead zirconate titanate thick film after laser transfer from a sapphire fabrication substrate. The laser-exposed interface originally in contact with sapphire, sintered at 1150 °C, was glass-like in appearance, consistent with melting being the principal de-lamination mechanism during a 15-ns single pulse of KrF laser radiation. The mechanical removal of the laser-generated, amorphous low-permittivity layer resulted in a decrease of the coercive field, from ~45 to ~30 kV/cm, with an increase in relative permittivity (100 Hz) from 350 to 780. Remnant polarisation was ~20 μC/cm2 in both sample types. The contribution of the laser-generated damage layer is modelled using a series two-capacitor circuit.

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Acknowledgements

The authors wish to thank the Engineering and Physical Sciences Research Council for financial support. Thanks also to Tim Comyn, Bob Miles and Mike Ward for useful discussions, and to Rob Dorey, Cranfield University, for supplying the hybrid PZT film shown in Fig. 3.

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Authors and Affiliations

  1. Institute for Materials Research, University of Leeds, Leeds, LS2 9JT, UK

    C. James, A. J. Laister & S. J. Milne

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  1. C. James
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  2. A. J. Laister
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  3. S. J. Milne
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Correspondence to S. J. Milne.

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James, C., Laister, A.J. & Milne, S.J. Laser transfer processing of thick film lead zirconate titanate and removal of damage layer. J Mater Sci 47, 2310–2315 (2012). https://doi.org/10.1007/s10853-011-6045-z

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  • DOI: https://doi.org/10.1007/s10853-011-6045-z

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