Abstract
Thick film two phase, 0–3 composite PZT-epoxy dome-shaped structures have been fabricated for the first time using a modified solvent and spin coating technique, where a PZT and ethanol solution was dispersed in an epoxy matrix, combined with a hardener, spin coated onto stainless steel sheets, and poled at ~2.2 kV/mm. The electro-mechanical performances of the films were investigated as a function of volume fraction of PZT. The volume fraction of PZT was varied from 0.1 to 0.7 and the piezoelectric coefficients d 31 and d 33 , and the capacitance, C, were measured, and used to calculate the effective dielectric constants. The values for d33, d31, C and dielectric constant were 1.06 pC/N, 0.74 pC/N, 6.0 pF and 76.1 respectively, at 70 % volume fraction of PZT. The surface topography and morphology were examined via AFM and SEM. The piezoelectric strain coefficients, capacitance and effective dielectric constant increased with increasing PZT content, in addition to the surface roughness. Agglomeration of PZT particles and surface crevices were observed on sample surfaces, which are most likely due to surface tension and air bubbles formed during the mixing process.
Similar content being viewed by others
References
R.C. Buchanan et al., High piezoelectric actuation response in graded Nd(2)O(3) and ZrO(2) doped BaTiO(3) structures. J. Electroceram. 26(1–4), 116–121 (2011)
O. Delas et al., Optimizing the thickness of piezoceramic actuators for bending vibration of planar structures. J. Intell. Mater. Syst. Struct. 18(11), 1191–1201 (2007)
G.H. Haertling, Ferroelectric ceramics: History and technology. J. Am. Ceram. Soc. 82(4), 797–818 (1999)
C.H. Nguyen, S. Pietrzko, R. Buetikofer, The influence of temperature and bonding thickness on the actuation of a cantilever beam by PZT patches. Smart Mater. Struct. 13(4), 851–860 (2004)
A. Nisar et al., MEMS-based micropumps in drug delivery and biomedical applications. Sensors Actuators B-Chem. 130(2), 917–942 (2008)
S. Choi, H. Lee, W. Moon, A micro-machined piezoelectric hydrophone with hydrostatically balanced air backing. Sensors Actuators a-Phys. 158(1), 60–71 (2010)
H. Lee, S. Choi, W. Moon, A micro-machined piezoelectric flexural-mode hydrophone with air backing: Benefit of air backing for enhancing sensitivity. J. Acoust. Soc. Am. 128(3), 1033–1044 (2010)
K.A. Cook-Chennault, N. Thambi, A.M. Sastry, Powering MEMS portable devices—a review of non-regenerative and regenerative power supply systems with special emphasis on piezoelectric energy harvesting systems. Smart Mater. Struct. 17, 043001 (2008)
K.A. Cook-Chennault, N. Thambi, M.A. Bitetto, E.B. Hameyie, Piezoelectric energy harvesting: A green and clean alternative for sustained power production. Bull. Sci. Technol. Soc. 28, 496–509 (2008)
H.S. Yoon, G. Washington, A. Danak, Modeling, optimization, and design of efficient initially curved piezoceramic unimorphs for energy harvesting applications. J. Intell. Mater. Syst. Struct. 16(10), 877–888 (2005)
F. Amirouche, Y. Zhou, T. Johnson, Current micropump technologies and their biomedical applications. Microsyst. Technol. Micro Nanosyst. -Inf. Storage Process. Syst. 15(5), 647–666 (2009)
M.M. Teymoori, E. Abbaspour-Sani, Design and simulation of a novel electrostatic peristaltic micromachined pump for drug delivery applications. Sensors Actuators a-Phys. 117(2), 222–229 (2005)
M.S. Yoon et al., Compact size ultrasonic linear motor using a dome shaped piezoelectric actuator. J. Electroceram. 28(2–3), 123–131 (2012)
J.P. Choi et al., Design and fabrication of synthetic air-jet micropump. Int. J. Precis. Eng. Manuf. 12(2), 355–360 (2011)
K.Y. Kim et al., Performance evaluation of lightweight piezo-composite actuators. Sensors Actuators a-Phys. 120(1), 123–129 (2005)
O. Bilgen, M.A. Karami, D.J. Inman, M.I. Friswell, The actuation characterization of cantilevered unimorph beams with single crystal piezoelectric materials. Smart Mater. Struct. 20(5), 055024 (2011)
O. Bilgen, Y. Wang, D.J. Inman, Electromechanical comparison of cantilevered beams with multifunctional piezoceramic devices. Mech. Syst. Sig. Process. 27, 763–777 (2012)
Y. Man-Soon, H. Sung-Moo, U. Soon-Chul, A newly designed chopper for pyroelectric infrared sensor by using a dome-shaped piezoelectric linear motor (DSPLM). J.Electroceram. 23(2–4), 242–247 (2009)
A. Furuta, K. Uchino, Dynamic observation of crack-propagation in piezoelectric multilayer actuators. J. Am. Ceram. Soc. 76(6), 1615–1617 (1993)
X.L. Chao et al., Fabrication, characteristics and temperature stability of Pb(Mg1/3Nb2/3)O-3-Pb(Sb1/3Nb2/3)O-3-Pb(Ni1/3Nb2/3)O-3-Pb(Zr, Ti)O-3 piezoelectric actuators. Sensors Actuators a-Phys. 151(1), 71–76 (2009)
X.C. Chu et al., Vibration and fatigue of multilayer piezoelectric transformer. Rare Metal Mater. Eng. 38, 226–229 (2009)
J.H. Koh et al., Electric field induced fracture mechanism and aging of piezoelectric behavior in Pb(MgNb)O-3-Pb(ZrTi)O-3 multilayer ceramic actuators. Ceram. Int. 30(7), 1863–1867 (2004)
J. Yoo, K. Kim, Y. Jeong, Electrical properties of low temperature sintering step-down multilayer piezoelectric transformer. Jpn. J. Appl. Phys. 2 Lett. Express Lett. 46(20–24), L486–L488 (2007)
J. Yoo et al., Electrical properties of low temperature sintering multilayer piezoelectric transformer using Pb(Mn1/3Nb2/3)O-3-Pb(Zn1/3Nb2/3)O-3-Pb(Zr, Ti)O-3. Sensors Actuators a-Phys. 137(1), 81–85 (2007)
U. Soon-Chul, Y. Man-Soon, H. Sung-Moo, A newly designed chopper for pyroelectric infrared sensor by using a dome-shaped piezoelectric linear motor (DSPLM). J. Electroceram. 23(2–4), 242–247 (2009)
G.H. Feng, A piezoelectric dome-shaped-diaphragm transducer for microgenerator applications. Smart Mater. Struct. 16(6), 2636–2644 (2007)
G.H. Feng, E.S. Kim, Piezoelectrically actuated dome-shaped diaphragm micropump. J. Microelectromech. Syst. 14(2), 192–199 (2005)
G.H. Feng et al., Fabrication of MEMS ZnO domeshaped-diaphragm transducers for high-frequency ultrasonic imaging. J. Micromech. Microeng. 15(3), 586–590 (2005)
C.H. Cheng, S.L. Tu, Fabrication of a novel piezoelectric actuator with high load-bearing capability. Sensors Actuators a-Phys. 141(1), 160–165 (2008)
J. Peng, C. Chao, H. Tang, Piezoelectric micromachined ultrasonic transducer based on dome-shaped piezoelectric single layer. Microsyst. Technol. Micro Nanosyst. -Inf. Storage Process. Syst. 16(10), 1771–1775 (2010)
N.S. Goo, S.C. Woo, K.H. Park, Influences of dome height and stored elastic energy on the actuating performance of a plate-type piezoelectric composite actuator. Sensors Actuators a-Phys. 137(1), 110–119 (2007)
S.B. Lang, G. Li, Rainbow ceramics: Processing techniques; Piezoelectric, dielectric and pyroelectric properties; and polarization distributions as determined with SLIMM. J. Korean Phys. Soc. 32, S1268–S1270 (1998)
X.P. Ruan et al., Design optimization of dome actuators. IEEE Trans. Ultrason. Ferroelectr. Freq. Control. 46(6), 1489–1496 (1999)
P. Ngernchuklin, E.K. Akdogan, A. Safari, B. Jadidian, Electromechanical displacement of piezoelectric-electrostrictive monolithic bilayer composites. J. Appl. Phys. 105(3), 034102 (2009)
X. Shen, Preparation and structure of rainbow piezoelectric ceramics. J. Wuhan Univ. Technol. Mater. Sci. Ed. 18(4), 24–26 (2003)
R.G. Bryant et al., The correlation of electrical properties of prestressed unimorphs as a function of mechanical strain and displacement. Integr. Ferroelectr. 71, 267–287 (2005)
K.M. Mossi, G.V. Selby, R.G. Bryant, Thin-layer composite unimorph ferroelectric driver and sensor properties. Mater. Lett. 35(1–2), 39–49 (1998)
K.J. Yoon et al., Design and manufacture of a lightweight piezo-composite curved actuator. Smart Mater. Struct. 11(1), 163–168 (2002)
N.S. Goo et al., Validation of a laminated beam model of LIPCA piezoelectric actuators. J. Intell. Mater. Syst. Struct. 16(3), 189–195 (2005)
N.S. Goo et al., Behaviors and performance evaluation of a lightweight piezo-composite curved actuator. J. Intell. Mater. Syst. Struct. 12(9), 639–646 (2001)
A. Haris et al., Modeling and analysis for the development of Lightweight Piezoceramic Composite Actuators (LIPCA). Comput. Mater. Sci. 30(3–4), 474–481 (2004)
C.W. Kim, K.J. Yoon, Fatigue behavior degradation due to the interlaminar conditions in Lightweight Piezoelectric Composite Actuator (LIPCA). Int. J. Mod. Phys. B 20(25–27), 4365–4370 (2006)
G. Lee et al., Modeling and design of h-infinity controller for piezoelectric actuator LIPCA. J. Bionic Eng. 7(2), 168–174 (2010)
K.J. Yoon et al., Actuator performance degradation of Piezo-Composite Actuator LIPCA under cyclic actuation, in Advances in Fracture and Failure Prevention, Pts 1 and 2, ed. by K. Kishimoto (2004), p. 1331–1336.
K.J. Yoon et al., Thermal deformation analysis of curved actuator LIPCA with a piezoelectric ceramic layer and fiber composite layers. Compos. Sci. Technol. 63(3–4), 501–506 (2003)
C.Y. Li et al., Flexible dome and bump shape piezoelectric tactile sensors using PVDF-TrFE copolymer. J. Microelectromech. Syst. 17(2), 334–341 (2008)
E.K. Akdogan, M. Allahverdi, A. Safari, Piezoelectric composites for sensor and actuator applications. IEEE Trans. Ultrason. Ferroelectr. Freq. Control. 52(5), 746–775 (2005)
E. Venkatragavaraj et al., Piezoelectric properties of ferroelectric PZT-polymer composites. J. Phys. D Appl. Phys. 34(4), 487–492 (2001)
T. Furukawa, K. Fujino, E. Fukada, Electromechanical properties in the composites of epoxy resin and PZT ceramics. Jpn. J. Appl. Phys. 15(11), 2119–2129 (1976)
A. Seema, K.R. Dayas, J.M. Varghese, PVDF-PZT-5H composites prepared by hot press and tape casting techniques. J. Appl. Polym. Sci. 106(1), 146–151 (2007)
B. Satish, K. Sridevi, M.S. Vijaya, Study of piezoelectric and dielectric properties of ferroelectric PZT-polymer composites prepared by hot-press technique. J. Phys. D Appl. Phys. 35(16), 2048–2050 (2002)
T. Yamada, T. Ueda, T. Kitayama, Piezoelectricity of a high-content lead zirconate titanate/polymer composite. J. Appl. Phys. 53(6), 4328–4332 (1982)
W. Nhuapeng, T. Tunkasiri, Properties of 0–3 lead zirconate titanate-polymer composites prepared in a centrifuge. J. Am. Ceram. Soc. 85(3), 700–702 (2002)
M. Dietze, M. Es-Souni, Structural and functional properties of screen-printed PZT-PVDF-TrFE composites. Sensors Actuators a-Phys. 143(2), 329–334 (2008)
A. Es-Souni et al., Pyroelectric and piezoelectric properties of thick PZT films produced by a new sol–gel route. J. Eur. Ceram. Soc. 25(12), 2499–2503 (2005)
K. Arlt, M. Wegener, Piezoelectric PZT/PVDF-copolymer 0–3 composites: Aspects on film preparation and electrical poling. IEEE Trans. Dielectr. Electr. Insul. 17(4), 1178–1184 (2010)
M. Wegener, K. Arlt, PZT/P(VDF-HFP) 0–3 composites as solvent-cast thin films: preparation, structure and piezoelectric properties. J. Phys. D Appl. Phys. 41(16), 165409 (2008)
Y.T. Or et al., Modeling of poling, piezoelectric, and pyroelectric properties of ferroelectric 0–3 composites. J. Appl. Phys. 94(5), 3319–3325 (2003)
D.A. van den Ende, W.A. Groen, S. van der Zwaag, The effect of calcining temperature on the properties of 0–3 piezoelectric composites of PZT and a liquid crystalline thermosetting polymer. J. Electroceram. 27(1), 13–19 (2011)
J.P. de la Cruz, Piezoelectric Thick Films: Preparation and Characterization, in Microelectromechanical Systems and Devices, ed by N. Islam (InTech, 2012), pp. 351–368
A. Safari et al., Piezoelectric and Acoustic Materials for Transducer Applications (Springer, New York, 2008)
M. Dietze, J. Krause, C.-H. Solterbeck, M. Es-Souni, Thick film polymer-ceramic composites for pyroelectric applications. J. Appl. Phys. 101(5), 054113 (2007)
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Banerjee, S., Du, W., Wang, L. et al. Fabrication of dome-shaped PZT-epoxy actuator using modified solvent and spin coating technique. J Electroceram 31, 148–158 (2013). https://doi.org/10.1007/s10832-013-9834-8
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s10832-013-9834-8