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Fabrication and characteristics of PZT thick films on Pt/Ti foil substrates for piezoelectric vibrators

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Abstract

Crack free perovskite PbZr0.53Ti0.47O3 (PZT (53/47)) thick films up to 30 μm were prepared on flexible platinum-coated titanium foil substrates (Pt/Ti) by a metal organic decomposition (MOD) process. The dielectric, ferroelectric and piezoelectric properties of the films were examined and discussed. A well-saturated hysteresis loop of the thick film was present in almost rectangular shape (Pr = 35 μC/cm2; Ec = 32 kV/cm). The efficient piezoelectric coefficient d 33, f of the thick film is about 448 (1 kHz). PZT piezoelectric vibrators were made in bimorph mode. The displacements of the vibrators were investigated as the functions of the applied electric field and the substrate thickness. Under the same condition, the vibrator made from the thinnest Pt/Ti substrate gives the largest displacement.

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References

  1. M. Koch, N. Harris, A.G.R. Evans, N.M. White, et al., Sens. Actuators 70, 98 (1998)

    Article  Google Scholar 

  2. Y. Jeon, J. Chung, K. No, J. Electroceram. 4(1), 195 (2000)

    Article  CAS  Google Scholar 

  3. T. Kanda, T. Morita, M.K. Kurosawa, T. Higuchi, Sens. Actuators 83, 67 (2000)

    Article  Google Scholar 

  4. J.Baborowski, N. Ledermann, S. Gentil, P. Muralt, The 11th International Conference on Solid-State Sensors and Actuators (Munich, Germany, 2001), p. 10.

  5. R.A. Dorey, R.W. Whatmore, J. Electroceram. 12, 19 (2004)

    Article  CAS  Google Scholar 

  6. L. Simon, S. Le Dren, P. Gonard, J. Eur. Ceram. Soc. 21, 1441 (2001)

    Article  CAS  Google Scholar 

  7. Sung-Ho Lee, M. Esashi, Sens. Actuators A 114, 88 (2004)

    Article  CAS  Google Scholar 

  8. D.A. Barrow, T.E. Petroff, M. Sayer, Surf. Coat. Technol. 76/77, 113 (1995)

    Article  Google Scholar 

  9. T. Kanda, M. K. Kurosawa, T. Higuchi, Ultrasonics 40, 61 (2002)

    Article  PubMed  Google Scholar 

  10. F.F.C. Duval, R.A. Dorey, R.H. Haigh, R.W. Whatmore, Thin Solid Films 444, 235 (2003)

    Article  ADS  CAS  Google Scholar 

  11. X.H. Pu, W.G. Luo, A.L. Ding, H.Y. Tian, Phys. Stat. Sol. (a) 182, R10–12 (2000)

    Article  ADS  CAS  Google Scholar 

  12. X.Y. He, A.L. Ding, X.S. Zheng, Microelectron. Eng. 99, 865 (2003)

    Article  CAS  Google Scholar 

  13. Physical Group, Shandong University, Piezoelectric Ceramics and Applications. (People Press, Shandong, 1973), p. 46 (in Chinese).

  14. H.D. Chen, K.R. Udayakumar, L.E. Cross, et al., J. Appl. Phys. 77(7), 3349 (1995)

    Article  ADS  CAS  Google Scholar 

  15. A. Schroth, M. Ichiki, R. Maeda, J. Akedo, SPIE 3242, 380 (1997)

    Article  ADS  CAS  Google Scholar 

  16. X.N. Jiang, C. Sun, Z. Zhang, B. Xu, Y.H. Ye, Sens. Actuators 87, 72 (2000)

    Article  Google Scholar 

  17. L. Simon, S. Le Dren, P. Gonard, J. Eur. Ceram. Soc. 21, 1441 (2001)

    Article  CAS  Google Scholar 

  18. S. Le Dren, L. Simon, P. Gonnard, M. Troccaz, A. Nicolas, Mat. Res. Bull. 35, 2037 (2000)

    Article  Google Scholar 

  19. M.-A. Dubois, P. Muralt, Sens. Actuators 77, 106 (1999)

    Article  Google Scholar 

  20. R.A. Dorey, R.W. Whatmore, Integr. Ferroelectr. 50, 111 (2002)

    Article  Google Scholar 

Download references

Acknowledgements

The authors thank the Shanghai “AM” fund (0424) for the financial support.

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Authors and Affiliations

  1. State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, 1295 Ding Xi Road, Shanghai, 200050, China

    Xi-Yun He, Ai-Li Ding, Xia Zeng & Ping-Sun Qiu

  2. Department of Materials Science and Engineering, Jingdezhen Institute of Ceramics, Taoyang Road, 333001, Jingdezhen, China

    Yong Zhang

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  1. Xi-Yun He
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  2. Yong Zhang
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  3. Ai-Li Ding
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Correspondence to Xi-Yun He.

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He, XY., Zhang, Y., Ding, AL. et al. Fabrication and characteristics of PZT thick films on Pt/Ti foil substrates for piezoelectric vibrators. J Electroceram 21, 871–874 (2008). https://doi.org/10.1007/s10832-007-9305-1

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  • DOI: https://doi.org/10.1007/s10832-007-9305-1

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