Skip to main content

Advertisement

SpringerLink
Log in

Prefabrication design, theoretical framework and simulation demonstration of a meander-shaped MEMS piezoresistive pressure sensor implanted on silicon substrate circular diaphragm for enhancement of key performance parameters utilized for low-pressure applications

  • Published:
Journal of Computational Electronics Aims and scope Submit manuscript

Abstract

Pressure sensors have shown an astounding change in revenue generation during the past few years. The rapid expansion of smart micro-system technology for automation systems has significantly increased the demand for sensors. One of the main reasons pressure sensors are flourishing in the market is their high sensitivity, versatility, miniaturization and mass production. In this proposed work, a MEMS meander-shaped piezoresistive pressure sensor for low-pressure applications is presented. It is mounted on a rigidly clamped circular diaphragm. COMSOL Multiphysics software was employed to develop the model and simulate it at a pressure range of 0–1 MPa. High sensitivity and low nonlinearity in the proposed model are analysed. Analytical models and numerical simulations are used to validate the performance advantage of this design. To get reliable simulation results, FEA (finite element analysis) was used with the COMSOL Multiphysics software. The results are then compared to previous research studies. Over an operating range of 0–1 MPa, the proposed design produces a sensitivity of 164.6 mV/V/MPa. As a result, the proposed architecture has a wide range of application possibilities.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig.7
Fig. 8
Fig. 9
Fig. 10
Fig. 11

Similar content being viewed by others

Code availability

Plots have been generated using the licensed version of software’s COMSOL Multiphysics and MATLAB.

References

  1. Bhat, K.N., Nayak, M.M.: MEMS pressure sensors-an overview of challenges in technology and packaging. J. ISSS. 2(1), 39–71 (2013)

    Google Scholar 

  2. Bhat, K.N.: Silicon micromachined pressure sensors. J. Indian Inst. Sci. 87(1), 115–131 (2007)

    CAS  Google Scholar 

  3. Fiorillo, A.S., Critello, C.D., Pullano, S.A.: Theory, technology and applications of piezoresistive sensors: a review. Sens Actuators A 281, 156–175 (2018). https://doi.org/10.1016/j.sna.2018.07.006

    Article  CAS  Google Scholar 

  4. Kumar, S.S., Pant, B.D.: Polysilicon thin film piezoresistive pressure microsensor: design, fabrication and characterization. Microsyst. Technol. 21, 1949–1958 (2015). https://doi.org/10.1007/s00542-014-2318-1

    Article  CAS  Google Scholar 

  5. Santhosh Kumar, S.D., Pant, B.D.: Design principles and considerations for the ideal silicon piezoresistive pressure sensor: a focused review. Microsyst. Technol. 20, 213–1247 (2014). https://doi.org/10.1007/s00542-014-2215-7

    Article  CAS  Google Scholar 

  6. Belwanshi, V.: Analytical modeling to estimate the sensitivity of MEMS technology-based piezoresistive pressure sensor. J. Comput. Electron. 20(1), 668–680 (2021). https://doi.org/10.1007/s10825-020-01592-5

    Article  CAS  Google Scholar 

  7. Jindal, S.K., Raghuwanshi, S.K.: A complete analytical model for circular diaphragm pressure sensor with freely supported edge. Microsyst. Technol. 21(5), 1073–1079 (2015). https://doi.org/10.1007/s00542-014-2144-5

    Article  Google Scholar 

  8. Devi, R., Gill, S.S.: A squared bossed diaphragm piezoresistive pressure sensor based on CNTs for low pressure range with enhanced sensitivity. Microsyst. Technol. 27(8), 3225–3233 (2021). https://doi.org/10.1007/s00542-020-05208-7

    Article  CAS  Google Scholar 

  9. Zhao, L.B., Fang, X.D., Zhao, Y.L., Jiang, Z.D., Li, Y.: A high pressure sensor with circular diaphragm based on MEMS technology. Key Eng. Mater. 483, 206–211 (2011). https://doi.org/10.4028/www.scientific.net/kem.483.206

    Article  CAS  Google Scholar 

  10. Balavalad, K.B., Sheeparamatti, B.G.: Design simulation and analysis of piezoresistive micro pressure sensor for pressure range of 0 to 1MPa. In: 2016 International Conference on Electrical, Electronics, Communication, Computer and Optimization Techniques (ICEECCOT), pp. 345–349. IEEE (2016). https://doi.org/10.1109/ICEECCOT.2016.7955243

  11. Nallathambi, A., Shanmuganantham, T., Sindhanaiselvi, D.: Design and analysis of MEMS based piezoresistive pressure sensor for sensitivity enhancement. Mater. Today Proc. 5(1), 1897–1903 (2018). https://doi.org/10.1016/j.matpr.2017.11.291

    Article  Google Scholar 

  12. Mehmood, Z., Haneef, I., Udrea, F.: Material selection for optimum design of MEMS pressure sensors. Microsyst. Technol. 26(9), 2751–2766 (2020). https://doi.org/10.1007/s00542-019-04601-1

    Article  Google Scholar 

  13. Timoshenko, S.P., WoinowskyKrieger, S.: Theory of plates and shells. McGraw-hill, London (1959)

    Google Scholar 

  14. Bao, M.: Analysis and design principles of MEMS devices. Elsevier, Amsterdam (2005)

    Google Scholar 

  15. Ross, C.T.F.: Strength of material and structure, 4th edn. Arnold, London (1999)

    Google Scholar 

  16. Li, C., Cordovilla, F., Ocaña, J.L.: Design optimization and fabrication of a novel structural piezoresistive pressure sensor for micro-pressure measurement. Solid State Electron. 139, 39–47 (2018). https://doi.org/10.1016/j.sse.2017.09.012

    Article  ADS  CAS  Google Scholar 

  17. Kumar, S.S., Pant, B.D.: Effect of piezoresistor configuration on output characteristics of piezoresistive pressure sensor: an experimental study. Microsyst. Technol. 22, 709–719 (2016). https://doi.org/10.1007/s00542-015-2451-5

    Article  Google Scholar 

  18. Kanekal, D., Jindal, S.K.: Investigation of MEMS piezoresistive pressure sensor with a freely supported rectangular silicon carbide diaphragm as a primary sensing element for altitudinal applications. SILICON 15(4), 1947–1959 (2023). https://doi.org/10.1007/s12633-022-02146-z

    Article  CAS  Google Scholar 

  19. Sabhapandit, E., Jindal, S.K., Kanekal, D., Patil, H.Y.: Numerical simulation of a striated piezoresistive MEMS pressure sensor on circular silicon diaphragm: a finite element method-based study. NANO 18(04), 2350023 (2023). https://doi.org/10.1142/S1793292023500236

    Article  CAS  Google Scholar 

Download references

Acknowledgements

We are grateful to the VIT management for providing us with the opportunity to perform the research.

Funding

Not applicable.

Author information

Authors and Affiliations

  1. School of Electronics Engineering, Vellore Institute of Technology, Vellore, Tamil Nadu, 632014, India

    Dadasikandar Kanekal & Sumit Kumar Jindal

Authors
  1. Dadasikandar Kanekal
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Sumit Kumar Jindal
    View author publications

    You can also search for this author in PubMed Google Scholar

Contributions

All authors contributed to the design and conception of the study. The material preparation, analysis and simulation were all completed in collaboration by both the authors. The initial draft of the manuscript was written by Mr. Dadasikandar Kanekal, while Mr. Sumit Kumar Jindal offered feedback on earlier draft. Both the authors have finally read and approved the final manuscript.

Corresponding author

Correspondence to Sumit Kumar Jindal.

Ethics declarations

Conflict of interest

Not applicable.

Ethics approval and consent to participate

No.

Human and animal rights

No.

Informed consent

Not applicable.

Consent for publication

Yes.

Additional information

Publisher's Note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Kanekal, D., Jindal, S.K. Prefabrication design, theoretical framework and simulation demonstration of a meander-shaped MEMS piezoresistive pressure sensor implanted on silicon substrate circular diaphragm for enhancement of key performance parameters utilized for low-pressure applications. J Comput Electron (2024). https://doi.org/10.1007/s10825-024-02133-0

Download citation

  • Received:

  • Accepted:

  • Published:

  • DOI: https://doi.org/10.1007/s10825-024-02133-0

Keywords

Search

Navigation