Skip to main content
SpringerLink
Log in

Structural and Optical Properties of SiC/Si Heterostructures Obtained Using Rapid Vacuum-Thermal Carbidization of Silicon

  • Published:
Journal of Applied Spectroscopy Aims and scope

A transmission electron microscopy (TEM) investigation revealed that rapid vacuum-thermal carbidization of silicon at 1100°C leads to formation of cubic silicon carbide (SiC) layers. A band in the IR transmission spectrum at 798 cm–1 corresponding to the Si–C stretching vibration and a maximum in the Raman spectrum at 793 cm–1 relating to the transverse optical phonon mode of SiC confirm the formation of a layer of the cubic SiC polytype. The absorption band of Si–O–Si (1100 cm–1) was found using IR spectroscopy. The dependence of the transmission coefficient on wavenumber was determined.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. G. Ferro, Crit. Rev. Solid State Mater. Sci., 40, 56–76 (2015); https://www.tandfonline.com/doi/abs/10.1080/10408436.2014.940440.

  2. W.-R. Chang, Y.-K. Fang, S.-F. Ting, Y.-S. Tsair, C.-N. Chang, C.-Y. Lin, and S.-F. Chen, IEEE Electron Devices Lett., 24, No. 9, 565–567 (2003); https://ieeexplore.ieee.org/document/1224519.

  3. A. Aldalbahi, E. Li, M. Rivera, R. Velazquez, T. Altalhi, X. Peng, and P. X. Feng, Sci. Rep., 6, 23457 (2016); https://www.nature.com/articles/srep23457.

  4. S. Ogawa, M. Okabe, Y. Ikeda, T. Itoh, N. Yoshida, and S. Nonomura, Thin Solid Films, 516, No. 5, 740–742 (2008); https://www.sciencedirect.com/science/article/abs/pii/S0040609007009935?via%3Dihub.

  5. D. Peftitsis, G. Tolstoy, A. Antonopoulos, J. Rabkowski, J. K. Lim, M. Bakowski, L. Anquist, and H. P. Nee, IEEE Trans. Power Electron., 27, 28–36 (2012), https://ieeexplore.ieee.org/document/5770230.

  6. I. A. Skibarko, O. V. Milchanin, P. I. Gaiduk, and F. F. Komarov, Inst. Phys. Conf. Ser., 166, 465–469 (1999); https://www.researchgate.net/publication/296464292_Structural_and_optical_properties_of_GaNSiCSi_heterostructures_grown_by_MBE.

  7. S. A. Kukushkin and A. V. Osipov, Fiz. Tverd. Tela, 50, No. 7, 1188–1195 (2008); http://journals.ioffe.ru/articles/viewPDF/2699.

  8. Y. Chen, Y. Francescato, J. D. Caldwell, V. Giannini, T. W. W. Mass, O. J. Glembocki, F. J. Bezares, T. Taubner, R. Kasica, M. Hong, and S. A. Maier, ACS Photonics, 1, 718–724 (2014); https://pubs.acs.org/doi/10.1021/ph500143u.

  9. P. I. Gaiduk, A. N. Larsen, J. L. Hansen, E. Wendler, and W. Wesch, Phys. B, 340–342, 813–817 (2003).

  10. L. A. Falkovsky, J. M. Bluet, and J. Camassel, Phys. Rev. B: Condens Matter Mater. Phys., 57, Article ID 11283 (1998); https://journals.aps.org/prb/abstract/10.1103/PhysRevB.57.11283.

  11. F. A. Johnson, Proc. Phys. Soc., 73, 265 (1959); https://iopscience.iop.org/article/10.1088/0370-1328/73/2/315.

  12. I. H. Campbell and P. M. Fauchet, Solid State Commun., 58, 739 (1986); https://www.sciencedirect.com/science/article/abs/pii/003810988690513-2.

  13. V. V. Sobolev and A. N. Shestyakov, Fiz. Tekh. Poluprovodn., 34, No. 4, 447–451 (2000); http://elibrary.lt/resursai/Uzsienio%20leidiniai/ioffe/ftp/2000/04/ftp3404_13.pf [https://journals.ioffe.ru/articles/viewPDF/37117, https://link.springer.com/article/10.1134/1.1188002#citeas].

  14. I. G. Aksyanov, M. E. Kompan, and I. V. Kul′kova, Fiz. Tverd. Tela, 52, 1724–1728 (2009); http://journals.ioffe.ru/articles/viewPDF/1957.

  15. J. M. Ziman, Electrons and Phonons, Clarendon Press, Oxford (1960).

  16. S. A. Grudinkin, V. G. Golubev, A. V. Osipov, N. A. Feoktistov, and S. A. Kukushkin, Fiz. Tverd. Tela, 57, No. 12, 2469 (2015); http://labspt.ru/download/Grudinkin-Golubev-Osipov.pdf.

  17. T. P. Smirnova, A. M. Badalian, L. V. Yakovkina, V. V. Kaichev, V. I. Bukhtiyarov, A. N. Shmakov, I. P. Asanov, V. I. Rachlin, and A. N. Fomina, Thin Solid Films, 429, 144–151 (2003); https://www.sciencedirect.com/science/article/abs/pii/S0040609003004085.

Download references

Author information

Authors and Affiliations

  1. Belarusian State University, Minsk, Belarus

    M. V. Lobanok, A. I. Mukhammad & P. I. Gaiduk

Authors
  1. M. V. Lobanok
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. A. I. Mukhammad
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. P. I. Gaiduk
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to M. V. Lobanok.

Additional information

Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 89, No. 2, pp. 204–209, March–April, 2022. https://doi.org/10.47612/0514-7506-2022-89-2-204-209.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Lobanok, M.V., Mukhammad, A.I. & Gaiduk, P.I. Structural and Optical Properties of SiC/Si Heterostructures Obtained Using Rapid Vacuum-Thermal Carbidization of Silicon. J Appl Spectrosc 89, 256–260 (2022). https://doi.org/10.1007/s10812-022-01352-2

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10812-022-01352-2

Keywords

Search

Navigation