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Frustrated Total Internal Reflection Spectra of Diazoquinone–Novolac Photoresist Films

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Journal of Applied Spectroscopy Aims and scope

Radiation-induced effects in thin films of diazoquinone–novolac photoresists on silicon irradiated with high-energy electrons (~5 MeV) were investigated by frustrated total internal reflection (FTIR) IR Fourier spectroscopy. It was found that irradiation with electrons at a dose of more than 3·1015 cm–2 leads to decrease of the integral absorption at wave numbers in the region of 3700–400 cm–1. The intensity of bands due to the –O–H– and particularly aliphatic –C–H– bonds is increased most strongly during electron irradiation. At a dose of Φ = 1·1017 cm–2 the intensity of the bands due to the methylene (–CH2–) and methyl (–CH3) groups is comparable with the noise level. The intensity of the band at ~1600 cm–1, due to the vibrations of the aromatic ring, does not change at radiation doses in the range of 3·1014–1·1017 cm–2. The obtained experimental data indicate strong cross-linking of the polymeric components during irradiation with electrons. It was found that the radiation-induced changes in the FTIR spectra depend on the type of photoresist (FP9120 and S1813 G2 SP15). The experimental relationships of change in the optical characteristics of thin films of photoresists due to electrons are explained in terms of the radiation chemistry of diazoquinone–novolac resins.

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References

  1. W. Moreau, Semiconductor Lithography. Principles, Practices, and Materials [Russian translation], Mir, Moscow (1990).

    Google Scholar 

  2. J. Marques-Hueso, R. Abargues, J. L. Valdes, and J. P. Martinez-Pastor, J. Mater. Chem., 20, 7436–7443 (2010).

    Article  Google Scholar 

  3. M. Sharma, A. A. Naik, P. Raghunathan, and S. V. Eswaran, J. Chem. Sci., 124, No. 2, 395–401 (2012).

    Article  Google Scholar 

  4. J. S. Martins, D. G. A. L. Borges, R. C. Machado, A. G. Carpanez, R. M. Grazul, F. Zappa, W. S. Melo, M. L. M. Rocco, R. R. Pinho, and C. R. A. Lima, Europ. Polym. J., 59, 1–7 (2014).

    Article  Google Scholar 

  5. B.-H. Kim, Y. H. Kim, and D. C. Moon, J. Chromatogr. Sci., 51, 161–165 (2013).

    Article  Google Scholar 

  6. Debmalya Roy, P. K. Basu, P. Raghunathan, and S. V. Eswaran, Magn. Res. Chem., 41, 84–90(2003).

    Google Scholar 

  7. J. Bocker, Spektroskopie [Russian translation], Tekhnosfera, Moscow (2009).

    Google Scholar 

  8. D. I. Brinkevich, A. A. Kharchenko, V. S. Prosolovich, V. B. Odzhaev, S. D. Brinkevich, and Yu. N. Yankovski, Mikroélektronika, 48, No. 3, 235–239 (2019).

    Google Scholar 

  9. S. D. Brinkevich, E. V. Grinyuk, D. I. Brinkevich, and V. S. Prosolovich, Khimiya Vysokikh Énergii, 54, No. 5, 377–386 (2020) [S. D. Brinkevich, E. V. Grinyuk, D. I. Brinkevich, and V. S. Prosolovich, High Energy Chem., 54, No. 5, 342–351 (2020)].

  10. E. Pretsch, P. Bullmann, and C. Affolter, Structure Determination of Organic Compounds. Tables of Spectral Data [Russian translation], Mir, Binom, Moscow (2006).

  11. D. I. Brinkevich, U. S. Prasalovich, and Y. M. Yankouski, Zh. Bel. Gos. Un-ta. Fizika, No. 2, 24–34 (2020).

    Google Scholar 

  12. B. N. Tarasevich, IR Spectra of Principal Classes of Organic Compounds. Reference Materials [in Russian], MGU, Moscow (2012).

    Google Scholar 

  13. I. Poljansek, U. Sebenik, and M. Krajnc, J. Appl. Polym. Sci., 99, No. 5, 2016–2028 (2006).

    Article  Google Scholar 

  14. M. V. Belkov, S. D. Brinkevich, S. N. Samovich, I. V. Skornyakov, G. B. Tolstorozhev, and O. I. Shadyro, Zh. Prikl. Spektrosk., 78, No. 6, 851–858 (2011).

    Google Scholar 

  15. G. B. Tolstorozhev, I. V. Skornyakov, M. V. Bel'kov, O. I. Shadyro, S. D. Brinkevich, and S. N. Samovich. Opt. Spektrosc., 113, No. 2, 202–207 (2012).

    Google Scholar 

  16. A. N. Oleshkevich, N. M. Lapchuk, V. B. Odzhaev, I. A. Karpovich, V. S. Prosolovich, D. I. Brinkevich, and S. D. Brinkevich, Mikroélektronika, 49, No. 1, 58–65 (2020).

    Google Scholar 

  17. D. I. Brinkevich, S. D. Brinkevich, N. V. Vabishchevich, V. B. Odzhaev, and V. S. Prosolovich, Mikroélektronika, 43, No. 3, 193–199 (2014).

    Google Scholar 

  18. S. A. Vabishchevich, N. V. Vabishchevich, D. I. Brinkevich, V. S. Prosolovich, and S. D. Brinkevich, Vestn. Polots. Gos. Un-ta, Ser. S. Fundament. Nauki. Fizika, No. 12, 51–57 (2016).

  19. S. N. Gapan’kova, S. D. Brinkevich, I. P. Edimecheva, V. P. Kurchenko, and O. I. Shadyro, Khimiya Vysokikh Énergii, 45, No. 3, 227–232 (2011).

    Google Scholar 

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Authors and Affiliations

  1. Belarusian State University, 220030, Minsk, Belarus

    S. D. Brinkevich, D. I. Brinkevich & V. S. Prosolovich

  2. Scientific-Practical Materials Research Centre, National Academy of Sciences of Belarus, Minsk, Belarus

    S. B. Lastovskii

  3. JSC INTEGRAL, Holding Management Company, Minsk, Belarus

    A. N. Pyatlitski

Authors
  1. S. D. Brinkevich
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  2. D. I. Brinkevich
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  3. V. S. Prosolovich
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  4. S. B. Lastovskii
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  5. A. N. Pyatlitski
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Correspondence to S. D. Brinkevich.

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Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 87, No. 6, pp. 941–948, November–December, 2020.

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Brinkevich, S.D., Brinkevich, D.I., Prosolovich, V.S. et al. Frustrated Total Internal Reflection Spectra of Diazoquinone–Novolac Photoresist Films. J Appl Spectrosc 87, 1072–1078 (2021). https://doi.org/10.1007/s10812-021-01111-9

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  • DOI: https://doi.org/10.1007/s10812-021-01111-9

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